JP2000094695A - Manufacture of print head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form a pressure chamber or a through hole in a channel plate finely and precisely by blowing abrasive grains of specified means grain size to the surface being machined of a matter to be machined thereby etching the surface being machined and forming a pressure chamber and a through hole in one surface of a planar member. SOLUTION: A channel plate is manufactured by making a nozzle of through hole and a through hole 50C or a recess of ink channel, e.g. a pressure chamber, in one surface 50A of a glass plate 50 by powder beam machining. In powder beam etching, abrasive grains having mean grain size of 24 μm or less are blown to the surface to be machined. An ink jet head is manufactured by pasting a diaphragm and a piezoelectric actuator comprising a piezoelectric element, while positioning, on one surface of the channel plate. According to the method, a pressure chamber and an ink channel, e.g. a nozzle, can be formed with high accuracy without causing fluctuation in the width, length or depth.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a print head, and more particularly, to a method suitable for applying to a method for manufacturing an ink jet print head.

[0002]

2. Description of the Related Art Conventionally, in an ink-jet printer, characters or graphics are printed on a recording medium by discharging ink droplets onto a recording medium such as paper or film in response to a recording signal. It is made to be able to do.

FIG. 10 shows an example of the configuration of a conventional ink jet print head used in such an ink jet printer. A piezoelectric actuator 3 is fixed to one surface 2A of a flow path plate 2, and the flow path The nozzle plate 4 is attached to the other surface 2B of the plate 2.

In this case, an arrow x is provided on one surface 2A side of the flow path plate 2.
_A plurality of recessed pressure chambers 2C for ink storage are arranged in parallel at a predetermined pitch along _one direction. Each of the pressure chambers 2C can be successively supplied with ink from an ink cartridge (not shown) via a common channel 2D.

[0005] throughway 2E which through the respective passage plate 2 to the distal end portion of the pressure chamber 2C in the thickness direction (arrow z ₁ direction) is bored, the nozzle plate 4 and the respective through passages 2E nozzle 4A respectively in correspondence consisting of a plurality of through holes are formed at a predetermined pitch along the arrow x ₁ direction.

On the other hand, the piezoelectric actuator 3 has a plurality of piezoelectric elements or the like on one surface of a vibration plate 5 made of a flexible material so as to face each pressure chamber 2C of the flow path plate 2 via the vibration plate 5. Are arranged along the direction of the arrow x ₁ , and the other surface of the vibration plate 5 is adhered to the one surface 2 </ b> A of the flow path plate 2 so that the flow path plate 2
It is fixed to.

[0007] while being polarized in this case the piezoelectric element 6 is a thickness direction, respectively (arrow z ₁ direction), and one surface and the other surface are respectively the upper and lower electrodes formed in the piezoelectric elements 6, thus by generating a potential difference between these upper and lower electrodes, it may deflect the piezoelectric element 6 in a direction for displacing the diaphragm 5 inside the corresponding pressure chamber 2C by bimorph effect (arrow z ₁ direction opposite) It has been made like that.

As a result, in this type of ink jet print head 1, a potential difference is generated between the upper electrode and the lower electrode of the piezoelectric element 6 to displace the diaphragm 5 to the inside of the corresponding pressure chamber 2C. A pressure corresponding to the amount can be generated in the pressure chamber 2C,
This pressure causes the ink in the pressure chamber 2C to pass through the passage 2.
The corresponding nozzle 4A can be discharged to the outside via E.

[0009]

Conventionally, the flow path plate 2 of the ink jet print head 1 is formed by etching one surface of a glass plate by a sand blasting method to form a pressure chamber 2C, a common flow path 2D, a through path 2E, and the like. It was manufactured so as to form an ink flow path.

[0010] Here, the sand blasting method means that the particle size is 25%.
This is a processing method in which abrasive grains of about 100 [μm] are sprayed on the processed surface of the workpiece, and the abrasive grains are used to cut the processed surface of the workpiece to perform etching.

However, the sand blasting method has a problem that the processing accuracy is poor because the grain size of the abrasive grains used is large as described above, and the injection amount of the abrasive grains during processing cannot be controlled.

For this reason, in the ink jet print head 1 in which the flow path plate 2 is formed by using such a sandblasting method, there is a problem that the width, length and depth of the ink flow path of the flow path plate 2 vary. there were. This means that the ink amount of the ink droplets ejected from each nozzle 4A varies, and the image quality of the printed image is degraded.

In the sand blasting method, the size that can be processed is up to about three times the particle size of the abrasive grains used, and can sufficiently cope with the fine processing accompanying the miniaturization of the ink jet print head 1 and the increase in the number of nozzles. There was no problem.

Therefore, as a method of forming the flow path plate 2 of the ink jet print head 1, if a new processing method capable of performing fine processing with high precision other than the sand blast processing method can be applied, deterioration of the image quality of a printed image can be prevented and fine processing can be performed. It is thought that it is possible to cope with the situation.

The present invention has been made in view of the above points, and is intended to propose a method of manufacturing a print head capable of preventing image quality deterioration of a printed image and sufficiently coping with fine processing in practical use. is there.

[0016]

According to the present invention, there is provided a method for manufacturing a print head, wherein abrasive grains having an average particle diameter of 24 [μm] or less are sprayed on a processing surface of a workpiece. The flow path plate was formed by forming a pressure chamber and a through hole on one surface of a plate-shaped member made of a predetermined material by using a processing method of etching the processed surface.

As a result, according to this method of manufacturing a print head, the pressure chambers and through holes of the flow path plate can be formed minutely and with high precision without causing variations in the width, length and depth. .

According to the present invention, in a method of manufacturing a print head, abrasive grains are mixed at a substantially uniform density in high-pressure air, and the solid-gas two-phase flow thus obtained is applied to the processing surface of the workpiece. The flow path plate is formed by forming a pressure chamber and a through hole on one surface of a plate-like member made of a predetermined material by using a processing method of etching the processing surface by spraying. .

As a result, according to this print head manufacturing method, the pressure chambers and through holes of the flow path plate can be formed minutely and with high precision without causing variations in the width, length and depth.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings.

(1) Configuration of Powder Beam Processing Apparatus In recent years, as one of the etching processing methods, a particle diameter of 1 to 20 [μ
m) is mixed almost uniformly with high-pressure air to form a solid-gas two-phase flow, and the solid-gas two-phase flow is blown onto the processing surface of the workpiece to solidify the processing surface. A processing method of etching by grinding using abrasive grains contained in the gas-two-phase flow (hereinafter referred to as a powder beam processing method)
Has been proposed.

According to such a powder beam processing method, since the particle size of the abrasive grains used is as small as 1 to 20 [μm], a fine pattern can be etched with high precision at high speed. It is possible to reliably control the injection amount of the abrasive grains.

FIG. 1 shows a processing apparatus 10 (hereinafter referred to as a powder beam processing apparatus) capable of performing the etching processing by such a powder beam processing method.

In this case, the powder beam processing apparatus 10
In the above, after the high-pressure air AIR ₁ output from the air compressor 11 passes through the regulating valve 12 and the solenoid valve 13, the high-pressure air AIR ₁ is divided, and the divided high-pressure air AIR ₁ (hereinafter referred to as the first
AIR _{2 is connected} to the first air supply pipe 1
4. The air is ejected into the abrasive grain storage chamber 15B of the mixing tank 16 via the air chamber 15A and the filter 16 provided in the lower part of the mixing tank 15 in order.

At this time, the abrasive grain storage chamber 15 of the mixing tank 15
A contains abrasive grains 17 of silicon carbide, alumina, glass, or the like having an average particle size of about 1 to 20 [μm]. Thus, the first diverted stream is injected into the abrasive grain storage chamber 15B. It is blown up by the high-pressure air aIR _2.

The other divided high-pressure air (hereinafter, referred to as a second divided high-pressure air) AIR ₃ is connected to the regulating valve 1.
The air is ejected into the delivery pipe 20 via the air supply pipe 8 and the second air supply pipe 19 in order. As a result, a portion of the delivery pipe 20 that connects the connection portion 20A to the second air supply pipe 19 and the upper part of the mixing tank 15 (hereinafter, this portion is referred to as a connection portion 20A of the delivery pipe 20). negative pressure by the air flow of the second shunt high pressure air aIR ₃ occurs.

The negative pressure causes the abrasive grains 17 in a state of being diffused into the air (solid-air state) in the abrasive grain storage chamber 15B of the mixing tank 15 to be sucked into the connecting portion 20B of the delivery pipe 20, and the delivery pipe 20 At the connecting portion 20A with the second air supply pipe 19, the second split high-pressure air AIR ₃ is almost uniformly mixed to generate a solid-gas two-phase flow AIR ₄ .

Further, the solid-gas two-phase flow AIR ₄ is thereafter fixed to the distal end of the arm 23 in the injection chamber 22 through the delivery pipe 20 and the nozzle 21 attached to the distal end thereof. It is sprayed onto the processing surface of the set workpiece 24 at a predetermined angle.

[0029] In this powder beam processing apparatus 10 in this manner is made to be able to etch a machining surface of the workpiece 24 by the abrasive grains 17 contained in the solid-gas two-phase flow AIR _4.

At this time, the arm 23 is configured so that the tip thereof can be freely moved in the front-rear and left-right directions (x ₂ y ₂ directions) by the driving unit 25, whereby the processing surface of the workpiece 24 is The entire surface can be etched by the solid-gas two-phase flow AIR ₄ .

On the other hand, a solid-gas two-phase flow AIR ₄ injected into the injection chamber 22 so as to be sprayed on the processing surface of the workpiece 24.
Thereafter, the abrasive is supplied to the abrasive storage tank 28 integrally attached to the upper part of the mixing tank 15 via the return pipes 26 and 27. The abrasive grains 17 contained in the solid-gas two-phase flow AIR ₄ are thereafter stored in the abrasive grain storage tank 28, and the high-pressure air forming the solid-gas two-phase flow AIR ₄ is removed from the abrasive grain storage tank 28. The air is supplied to an exhaust fan 31 through an exhaust pipe 29 and an electromagnetic valve 30 connected to the upper part of
After being filtered in 1, it is discharged outside.

At this time, the abrasive grain storage tank 28 and the abrasive grain storage chamber 15 of the mixing tank 15 are stored in the abrasive grain storage tank 28.
B so as to close the communication port communicating between the coil springs B and the coil spring 3
The supply valve 33 is disposed so as to be urged upward (z ₂ direction) by the _second feeder ₂ , and thus a predetermined amount of the abrasive particles 17.
At the stage where the abrasive grains 17 are stored in the abrasive grain storage tank 28, the weight of the feed valve 33 moves downward against the elastic force of the coil spring 32, and the abrasive grains 17 stored in the abrasive grain storage tank 17 are moved downward. Storage chamber 15B of the mixing tank 15
It can be supplied to.

In addition to this configuration, in the case of the powder beam processing apparatus 10, a stirring member 35 that rotates in the direction of arrow a based on the rotation output of the motor 34 is provided in the abrasive storage chamber 15B of the mixing tank 15. I have.

Thus, the powder beam processing apparatus 1
0, the solid-air state of the abrasive grains 17 temporarily blown up by the first branch high-pressure air AIR _{2 is} changed to the stirring member 35.
To produce a solid-gas two-phase flow AIR ₄ that always contains a certain amount of abrasive grains 17,
The solid-gas two-phase flow AIR ₄ enables the processed surface of the workpiece 24 to be accurately etched.

(2) Inkjet print head 40
2 and 3 show an ink jet print head 40 manufactured by applying the present invention. The ink jet print head 40 is formed by fixing a piezoelectric actuator 42 to one surface 41A of a flow path plate 41. I have.

The pressure chamber 41C for the ink reservoir composed of a plurality of recesses in a predetermined pitch along the arrow x ₃ direction on one surface 41A of the case flow passage plate 41 is arranged. Each of the pressure chambers 41C has a common flow path 41D and an ink introduction path 41 which is a narrow path provided at the rear of each pressure chamber 41C.
Ink can be supplied from an ink cartridge (not shown) via E sequentially.

Further the front end of the pressure chambers 41C, so as to penetrate the respective channel plate 41 in the thickness direction (arrow z ₃ direction), and the other surface 41B of the side opening of the passage plate 41 is an arrow x Nozzles 41F each having a tapered through-hole are provided so as to be arranged at a predetermined pitch along _three directions.

On the other hand, the piezoelectric actuator 42 has a plurality of piezoelectric elements or the like on one surface of a vibration plate 43 made of a flexible material so as to face each pressure chamber 41C of the flow path plate 41 via the vibration plate 43. of the piezoelectric element 44 is configured by being arranged along the arrow x ₃ direction, the vibration plate 43 of the other surface so as to adhere to the one surface 41A side of the flow path plate 41 the flow channel plate 41 It is stuck to.

[0039] while being polarized in this case the piezoelectric element 44 is its thickness direction, respectively (arrow z ₃ direction), and each upper electrode or the lower electrode is formed one surface and the other surface of the piezoelectric element 44, thus By generating a potential difference between the upper electrode and the lower electrode, each piezoelectric element 44 is individually made to vibrate the diaphragm 43 by the bimorph effect.
It is made to be able to deflect in the direction of displacing the inner side of the corresponding pressure chamber 41C (arrow z ₃ direction opposite direction) a.

As a result, in the ink jet print head 40, a potential difference is generated between the upper electrode and the lower electrode of the piezoelectric element 44 to displace the diaphragm 43 inside the corresponding pressure chamber 41C. A corresponding pressure can be generated in the pressure chamber 41C, and the ink in the pressure chamber 41C can be discharged to the outside via the nozzle 41F by this pressure.

(3) Manufacturing Procedure of the Inkjet Printhead 40 According to the Present Embodiment
Can be manufactured by the following procedure shown in FIG. 4 and FIG.

That is, first, as shown in FIG.
A dry film 51 is applied on one surface 50A of a glass plate 50 that is a base of the flow path plate 41. Next, as shown in FIG. 4 (B), the dry film 51 is exposed through a mask 52 for a nozzle pattern, and developed to develop a nozzle pattern on the dry film 51 as shown in FIG. 4 (C). The opening 51A corresponding to the above is formed.

Further, as shown in FIG. 4D, the surface 50A of the glass plate 50 is etched by the powder beam processing method using the dry film 51 as a resist by using the powder beam processing apparatus 10 shown in FIG. In the glass plate 50, a through hole 50C to be a nozzle 41F (FIGS. 2 and 3) is formed so that the opening diameter on the other surface 50B side of the glass plate 50 finally becomes about 30 [μm]. Thereafter, the dry film 51 is peeled off from one surface 50A of the glass plate 50 so as to wash the glass plate 50.

Subsequently, as shown in FIG. 5A, a new dry film 53 is attached to one surface 50A of the glass plate 50, and thereafter, as shown in FIG. Then, by exposing through a mask 54 and developing, an opening 53A corresponding to the pattern of the ink flow path of the flow path plate 41 as shown in FIG. 5C is formed in the dry film 53.

Next, as shown in FIG. 5D, one surface of the glass plate 50 is etched by a powder beam processing method using the dry film 53 as a resist by using the powder beam processing apparatus 10 shown in FIG.
As shown in (A), a concave portion 50C formed of a concave-shaped ink flow channel such as a pressure chamber 41C (FIGS. 2 and 3) and a common flow channel 41D (FIGS. 2 and 3) is provided on one surface 50A side of the glass plate 50. Form.

Thereafter, the dry film 53 is peeled off from one surface 50A of the glass plate 50 so as to wash the glass plate 50. As a result, a flow path plate 41 in which the nozzle 41F, the pressure chamber 41C, and the like are integrally formed as shown in FIG. 6B is formed.

Subsequently, as shown in FIG. 6C, a piezoelectric actuator 42 composed of a vibration plate 43 and a piezoelectric element 44 formed in a separate process from the flow path plate 41 on one surface 41A of the flow path plate 41. Position and attach. Thus, the ink jet print head 40 shown in FIGS. 2 and 3 can be obtained.

When the ink jet print head 40 is manufactured as described above, for example, as shown in FIG. 7, a large number of flow path plates 41 may be formed separately from one glass plate 60. Accordingly, the flow path plate 41 can be formed at low cost.

More specifically, according to the procedure shown in FIGS. 8A to 9C, first, as shown in FIG. 8A, on one surface of a substrate 61 made of a glass material or the like, for example, Nitto Denko Corporation Foamable heat-releasable sheet 6 such as Riba Alpha (trade name)
The glass plate 60 is pasted through the substrate 2.

Here, the heat release sheet 62 has one surface 62
An adhesive layer made of a thermofoamable adhesive is formed on the A side, and when heated, the adhesive layer foams and comes into a point contact state with the substance adhered to the adhesive layer, thereby easily peeling off the substance. It was made to get.

In the step of FIG. 8A, the other surface 62B of the heat-releasable sheet 62 is bonded to the substrate 61, and the glass plate 62 is bonded to the adhesive layer on the one surface 62A of the heat-releasable sheet 62.
The glass plate 60 is attached to the substrate 61 by bonding.

Next, as shown in FIG. 8B, one surface 60 of the glass plate 60 thus adhered on the substrate 61.
On the A side, the through-hole 60C that becomes the nozzle 41F according to the procedure described above with reference to FIGS.
C, an ink flow path pattern (hereinafter, referred to as a pattern) including an ink introduction path 41E and a recess 60D serving as a common flow path 41D.
This is referred to as a flow path pattern 60E) and the flow path plate 41 is used to form a plurality of sheets.

Subsequently, as shown in FIG. 8C, a dry film 63 is deposited on one surface 60A of the glass plate 60, exposed through a mask 64 having a predetermined shape, and developed. As shown in FIG. 8 (D), each of the dry film 63 has a frame-shaped opening 63A that borders the outer shape of the flow path plate 41 corresponding to each flow path pattern 60E of the glass plate 60. 60E.

Subsequently, as shown in FIG. 9A, the glass plate 60 is subjected to powder beam processing using the dry film 63 as a resist and the powder beam processing apparatus 10 shown in FIG. Is cut out in accordance with the shape of each opening 63A of the dry fimur 63. Thus, one flow path plate 41 is separately formed corresponding to each flow path pattern 60E of the glass plate 60.

Next, as shown in FIG. 9B, the glass plate 60 thus cut into the plurality of flow path plates 41 is washed while being adhered to the substrate 61, thereby forming one surface 60A. Of the dry film 63 is removed.

Then, as shown in FIG. 9 (C), the heat release sheet 62 is heated by heating the heat release sheet 62 by placing the substrate 61 on a hot plate and the like, so that the one side 62A side is foamed. Each of the flow path plates 41 is individually peeled from 62. Thereby, a large number of flow path plates 41 shown in FIGS. 2 and 3 can be manufactured at once.

(4) Operation and Effect of the Embodiment In the above configuration, one surface 50 of the glass plates 50 and 60
The flow path plate 41 is formed on the A and 60A sides by using a powder beam processing method so as to form the through holes 50C and 60C and the recesses 50D and 60D which are ink flow paths such as the nozzle 41F and the pressure chamber 41C. After that, the flow path plate 4
The inkjet print head 40 is manufactured by positioning and attaching a piezoelectric actuator 42 including a vibration plate 43 and a piezoelectric element 44 on one surface 41A.

Therefore, according to the manufacturing procedure of the ink jet print head 40 according to this embodiment, the flow path plate 41
Each of the pressure chambers 41C and the ink introduction can be performed with high precision without causing variation in the width, length, depth, etc., by using the powder beam processing method as the etching processing method for the glass plates 50, 60 when forming the glass plates 50, 60. It is possible to form ink passages such as a passage 41E, a common passage 41D, and each nozzle 41F.
Accordingly, it is possible to prevent a variation in the amount of ink ejected from each nozzle 41F from occurring.

The glass plate 5 for forming the flow path plate 41
Since the powder beam processing method is used as the etching processing method of 0 and 60, the ink flow path of each pressure chamber 41C and the like can be formed finely as needed.

The glass plate 5 when forming the flow path plate 41
When the powder beam processing method is used as the etching processing method for 0 and 60, the pressure chamber 41C is formed in the glass plates 50 and 60.
(Concave portions 50D, 60D) are formed, and then the nozzle 41F is formed.
When the (through holes 50C, 60C) are formed, the pressure chamber 41C is formed under the influence of the pressure chamber 41C formed first.
Nozzle 41F is placed in pressure chamber 41
It may be biased to the C side, and its cross section may be elliptical.

In this regard, in this embodiment,
After the nozzles 41F are formed on the glass plates 50 and 60, the pressure chambers 41C are formed, so that positional deviation and deformation of the formed nozzles 41F can be prevented.

According to the above configuration, the nozzle 41F, the pressure chamber 40C, and the like are formed on the surfaces 50A, 60A of the glass plates 50, 60 using the powder beam processing method for the flow path plate 41 of the ink jet print head 40. In this way, the ink flow path of the flow path plate 41 can be formed with high accuracy and finely as needed without causing variations in the width, length, depth, and the like. In this way, it is possible to avoid the occurrence of variation in the amount of ink ejected from each nozzle 41F of the manufactured ink jet print head 40, thereby preventing deterioration of the image quality of the printed image, and being practically sufficient for fine processing. And a method of manufacturing an ink jet print head which can cope with the above.

(5) Other Embodiments In the above-described embodiment, a case has been described in which the present invention is applied at the time of manufacturing the ink-jet printhead 40. However, the present invention is not limited to this. It can be widely applied as a method for manufacturing a so-called bubble jet type print head in which ink is heated and boiled by a heating element, and the ink is ejected to the outside at the pressure of the generated bubbles, and as a method for manufacturing other print heads. .

Further, in the above-described embodiment, one side 50A, 60A of the glass plates 50, 60 has an average particle diameter of 1-20.
The glass plates 50, 60 are sprayed by spraying [μm] abrasive grains 17 (the first characteristic point of the powder beam processing method).
Although the description has been given of the case where the surfaces 50A and 60A are etched, the present invention is not limited to this, and in this case, abrasive grains having an average particle diameter of 20 to 24 [μm] may be used. If, for example, abrasive grains having an average particle size of 24 [μm] or less, which cannot be used by the sandblasting method, are used, the flow path plate 4
The effect that one ink flow path can be formed with high precision without causing variations in the width, length, depth and the like can be obtained.

Further, in the above-described embodiment, a solid-gas two-phase flow AIR ₄ (FIG. 1) is formed by mixing the abrasive grains 17 with the high-pressure air AIR ₃ (FIG. 1) almost uniformly. The gas two-phase flow AIR _{4 is applied} to one side 50 of the glass plates 50, 60.
A, 60A (the second of powder beam processing method)
Of the glass plates 50, 60
Although the case where the etching process is performed on 0A and 60A has been described, the present invention is not limited to this. In this case, an abrasive having an average particle size of 20 to 24 [μm] may be used. If, for example, abrasive grains having an average particle size of 24 [μm] or less, which cannot be used by the sandblasting method, are used, the width, length, depth, etc. Thus, an effect of being able to be formed with high precision without causing variations in the size can be obtained.

Further, in the above-described embodiment, the nozzles 41F (through holes 50C, 60C) are provided in the glass plates 50, 60.
C), the pressure chambers 41C and the like (the concave portions 50D and 60C) are formed.
Although the case of forming D) has been described, the present invention is not limited to this, and the order may be reversed as necessary.

Further, in the above-described embodiment, the through holes 50C are formed in the glass plates 50, 60 so that the opening diameters on the other surfaces 50B, 60B are finally about 30 μm.
However, the present invention is not limited to this, and the nozzle plate is formed on the other surface 41B side of the flow path plate 41 as in the related art. May be attached to form a nozzle.

Further, in the above embodiment, FIG.
The through holes 50 are formed in the glass plates 50 and 60 during the etching process by the powder beam processing method described in (D).
Although the case where C and 60C are formed has been described, the present invention is not limited to this, and an unpenetrated dent is formed in the glass plates 50 and 60 during the etching process in FIG. At the time of the etching process by the powder beam processing method described later with reference to FIG. 5D, the recess may be processed so as to become the nozzle 41F (through hole).

Further, in the above-described embodiment, the piezoelectric actuator 42 as a pressure generating means for generating pressure in each pressure chamber 41C of the flow path plate 41 as necessary is used as shown in FIG.
Although the case where the configuration is made as shown in FIG. 3 has been described, the present invention is not limited to this, and various other configurations can be widely applied.

Further, in the above-described embodiment, the case where the flow path plate 41 is formed by etching the glass plates 50 and 60 has been described. However, the present invention is not limited to this. As a material of the plate 41, a single-layer or multilayer plate-like member made of a predetermined material having ink durability other than a glass material can be widely applied.

[0071]

As described above, according to the present invention, in a method of manufacturing a print head, a pressure chamber for storing ink, comprising a concave portion having a predetermined shape on one surface of a plate-like member made of a predetermined material; A first step of forming a flow path plate by forming a communicating through hole, and one surface side of the flow path plate,
A second step of fixing pressure generating means for generating pressure in the pressure chamber, if necessary. In the first step, abrasive grains having an average particle size of 24 [μm] or less are formed on the processing surface of the workpiece. By forming a pressure chamber and a through hole on one surface of the plate member by using a processing method of etching the processing surface by spraying, the pressure chamber and the through hole of the flow path plate are formed. A print head that can be formed finely and with high precision without causing variations in its width, length, and depth, thus preventing deterioration of the image quality of printed images and being practically sufficient for fine processing. A manufacturing method can be realized.

According to the present invention, in a method of manufacturing a print head, a pressure chamber for storing ink, which is formed of a recess having a predetermined shape, on one surface of a plate-like member made of a predetermined material, and a through hole communicating with the pressure chamber. And a second step of fixing a pressure generating means for generating pressure in the pressure chamber, if necessary, on one surface side of the flow path plate. In the first step, the abrasive grains are mixed at a substantially uniform density in high-pressure air, and the solid-gas two-phase flow thus obtained is sprayed onto the processing surface of the workpiece so that the abrasive grains are sprayed. By forming a pressure chamber and a through-hole on one surface of the plate-like member by using a processing method of etching, the pressure chamber and the through-hole of the flow path plate have a width, a length, and a depth. It can be formed finely and with high precision without variation, Comb to prevent degradation in the image quality of the printed image, a method of manufacturing a printhead capable of practically sufficiently correspond be implemented to fine processing.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view illustrating a configuration of a powder beam processing apparatus used in manufacturing an ink jet print head according to an embodiment.

FIG. 2 is a perspective view showing a partial cross section of the configuration of the inkjet print head according to the present embodiment.

FIG. 3 is a cross-sectional view illustrating a configuration of an inkjet print head according to the present embodiment.

FIG. 4 is a cross-sectional view showing a procedure for manufacturing the inkjet print head according to the embodiment.

FIG. 5 is a cross-sectional view illustrating a procedure for manufacturing the inkjet print head according to the embodiment.

FIG. 6 is a cross-sectional view showing a procedure for manufacturing the inkjet print head according to the embodiment.

FIG. 7 is a schematic perspective view for explaining the batch production of a large number of flow path plates.

FIG. 8 is a cross-sectional view for explaining a procedure for manufacturing a large number of flow path plates.

FIG. 9 is a cross-sectional view for explaining a procedure for manufacturing a number of flow path plates.

FIG. 10 is a cross-sectional view illustrating a configuration of a conventional inkjet print head.

[Explanation of symbols]

10: powder beam processing device, 17: abrasive grains, 40
…… Inkjet print head, 41 …… Channel plate,
41A, 50A, 60A ... one side, 41B, 50B, 6
0B: other surface, 41C: pressure chamber, 41D: common flow path, 41E: ink introduction path, 42: piezoelectric actuator, 43: diaphragm, 44: piezoelectric element, 50, 60
...... Glass plate, 50C, 60C ... Through-hole, 50D, 6
OD: recess.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Toru Tanigawa 6-35, Kita-Shinagawa, Shinagawa-ku, Tokyo Inside Sony Corporation (72) Inventor Akira Akira 30-No.・ Precision Magne Co., Ltd. F-term (reference) 2C057 AF24 AF93 AG12 AG44 AP02 AP13 AP22 AP31 AQ01 BA04 BA14

Claims (5)

[Claims] 1. A flow path plate is formed by forming an ink storage pressure chamber having a concave portion of a predetermined shape on one surface of a plate member made of a predetermined material and a through hole communicating with the pressure chamber. A first step, and a second step of fixing pressure generating means for generating pressure in the pressure chamber, if necessary, on the one surface side of the flow path plate. The average grain size is 24 on the machined surface of the workpiece
The pressure chamber and the through hole are formed on the one surface of the plate-like member by using a processing method of etching the processing surface by spraying abrasive particles of not more than (μm). Manufacturing method of print head. 2. The method according to claim 1, wherein in the first step, the pressure chamber is formed after the through hole is formed in the plate member. 3. A flow path plate is manufactured by forming a pressure chamber for storing ink, which is a recess having a predetermined shape, on one surface of a plate-shaped member made of a predetermined material, and a through hole communicating with the pressure chamber. A first step; and, if necessary, a second step of fixing pressure generating means for generating pressure in the pressure chamber on the one surface side of the flow path plate. Abrasive grains are mixed at a substantially uniform density in the air, and the solid-gas two-phase flow thus obtained is sprayed onto the machined surface of the workpiece by using the machining method of etching the machined surface. And forming the pressure chamber and the through-hole on the one surface of the plate-shaped member. 4. The method according to claim 3, wherein in the first step, the pressure chamber is formed after the through hole is formed in the plate member. 5. In the first step, the average particle size is 24 [μm
The method according to claim 3, wherein the solid-gas two-phase flow is formed by mixing the following abrasive grains in the high-pressure air at a substantially uniform density.