JP2000042338A - Air purifying method and air purifying device - Google Patents
Air purifying method and air purifying deviceInfo
- Publication number
- JP2000042338A JP2000042338A JP10211195A JP21119598A JP2000042338A JP 2000042338 A JP2000042338 A JP 2000042338A JP 10211195 A JP10211195 A JP 10211195A JP 21119598 A JP21119598 A JP 21119598A JP 2000042338 A JP2000042338 A JP 2000042338A
- Authority
- JP
- Japan
- Prior art keywords
- air
- air flow
- water
- partition
- ultrafine mist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 52
- 239000003595 mist Substances 0.000 claims abstract description 33
- 238000001816 cooling Methods 0.000 claims abstract description 18
- 239000007787 solid Substances 0.000 claims abstract description 4
- 238000005192 partition Methods 0.000 claims description 41
- 238000002347 injection Methods 0.000 claims description 20
- 239000007924 injection Substances 0.000 claims description 20
- 238000004140 cleaning Methods 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 9
- 230000006837 decompression Effects 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 239000008213 purified water Substances 0.000 claims description 2
- 239000008400 supply water Substances 0.000 claims description 2
- 230000005494 condensation Effects 0.000 claims 1
- 238000009833 condensation Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract description 19
- 239000000428 dust Substances 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 6
- 239000007921 spray Substances 0.000 description 6
- 230000005653 Brownian motion process Effects 0.000 description 4
- 238000005537 brownian motion Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 3
- 238000004887 air purification Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
- Separation Of Particles Using Liquids (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば、クリ−ン
ルームや局所クリーントンネルなどの電子部品の製造工
場で用いられる局所清浄化用の空気清浄化方法と空気清
浄化装置に係り、特に、設備コスト、ランニングコスト
が安価で、しかもケミカル物質の除去能力に優れた空気
清浄化方法および空気清浄化装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air cleaning method and an air cleaning apparatus for local cleaning used in a factory for manufacturing electronic components such as a clean room and a local clean tunnel. The present invention relates to an air purifying method and an air purifying apparatus which are inexpensive in cost and running cost and excellent in chemical substance removing ability.
【０００２】[0002]
【従来の技術】空気中の微小、微量不純物を除去する装
置としてエアーワッシャ−方式の空気清浄化装置が知ら
れている（平成１０年４月１６日、１７日開催、第１６
回空気清浄とコンタミネーションコントロール大会、
（Ａ−２）エアーワッシャの無機成分除去性能の実態調
査、（Ａ−３）エアーワッシャによる大気中ケミカル物
質の除去（その２）除去効果におよぼす水質の影響
等）。2. Description of the Related Art As a device for removing minute and trace impurities in the air, an air washer-type air cleaning device is known (held on April 16 and 17, 1998, No. 16).
Times air purification and contamination control competition,
(A-2) Investigation of the actual condition of the inorganic component removal performance of the air washer, (A-3) Removal of atmospheric chemical substances by the air washer (Part 2) Influence of water quality on the removal effect, etc.).
【０００３】エアーワッシャー方式による空気清浄化装
置は、高濃度のガス成分を除去する目的で一般に使用さ
れている湿式スクラバー方式の一部に分類されるもの
で、湿式スクラバー方式として知られる空気清浄化方法
としては次のようなものが挙げられる。[0003] An air cleaning device using an air washer system is classified as a part of a wet scrubber system generally used for removing high-concentration gas components, and is known as a wet scrubber system. The methods include the following.
【０００４】モレタナ塔：塔内に堰や溢流部の多孔板を
数段取りつけ、排ガスと向流接触させる。 充填塔：表面積の大きい充墳物の表面に吸収液を流し、
ガスを低速で向流接触させる。 スプレー塔：空塔内に吸収流を噴霧し、ガスを低速度で
向流接触させる。 サイクロンスクラバー：吸収塔にガスをサイクロン流で
導入し、塔内で噴霧させる。 ベンチュジースクラバ−：ガスをベンチュリー部に高速
で流し、小量の水で併流混合する。 ジエットスクラバ−：ガスをスロット部にやや高速で流
し、大量の水で併流混合する。 流動式吸収塔：塔内に充填したプラスチック球が、流動
層をなし、流れと向流接触する。[0004] Moretana tower: A plurality of perforated plates of weirs and overflow parts are installed in the tower and brought into countercurrent contact with exhaust gas. Packing tower: Absorbing liquid is poured on the surface of a packing material with a large surface area,
The gas is brought into countercurrent contact at a low speed. Spray tower: The absorption stream is sprayed into the empty tower, and the gas is brought into countercurrent contact at a low speed. Cyclone scrubber: The gas is introduced into the absorption tower in a cyclone stream and sprayed in the tower. Venturi scrubber: A gas is caused to flow through a venturi at a high speed and mixed with a small amount of water. Jet scrubber: A gas is flowed through the slot at a slightly higher speed, and mixed together with a large amount of water. Fluidized absorption tower: The plastic spheres filled in the tower form a fluidized bed and come into countercurrent contact with the stream.
【０００５】上記した各種の方式のうち空気清浄化装置
として実用化しているのは、スプレ−塔方式とサイクロ
ンスクラバ−方式である。[0005] Among the above-mentioned various systems, the spray tower system and the cyclone scrubber system have been put to practical use as air purifiers.
【０００６】スプレー塔方式は、エア一ワッシャ−方式
に類似する方式であり、サイクロンスクラバー方式は、
例えば、特公平３−７６９９３号公報、特公平３−７６
９９４号公報、特開昭６２−６８５１０５号公報、特開
平４−１１８０６８号公報、特開平１０一１１３５２５
号公報等に開示された空気清浄化装置に類似するもので
ある。The spray tower system is similar to the air-washer system, and the cyclone scrubber system is
For example, Japanese Patent Publication No. 3-76993, Japanese Patent Publication No. 3-76
994, JP-A-62-685105, JP-A-4-111868, JP-A-10-113525
This is similar to the air purifying device disclosed in Japanese Patent Application Publication No. JP-A-H07-209139.
【０００７】各方式は、それぞれ次表のような特性およ
び長所、短所を有している。Each system has characteristics, advantages and disadvantages as shown in the following table.
【０００８】[0008]
【表１】 [Table 1]
【０００９】[0009]
【発明が解決しようとする課題】上表から明らかなよう
に、ケミカル物質の除去を考えた場合、スプレー塔方式
の空気清浄化方法では除去効率が不確実で、ケミカル物
質の少ない空気を安定に供給することが困難であるとい
う問題がある。As can be seen from the above table, when considering the removal of chemical substances, the removal efficiency is uncertain with the air purification method of the spray tower system, and the air with little chemical substance is stably removed. There is a problem that supply is difficult.
【００１０】また、サイクロンスクラバ−方式の空気清
浄化装置は、特開平１０−１１３５２５号公報にも開示
されるように、ケミカル物質の少ない空気を安定に供給
することは可能であるが、スプレー塔方式の空気清浄化
方法に比べると、液ガス比を多くとっているため、設備
コストとランニングコストが高くなるという問題があ
る。As disclosed in Japanese Patent Application Laid-Open No. 10-113525, a cyclone scrubber-type air purifying apparatus can stably supply air with a small amount of chemical substances. Compared with the air cleaning method of the system, since the liquid-gas ratio is increased, there is a problem that the equipment cost and the running cost increase.
【００１１】本発明はかかる従来の問題を解消すべくな
されたもので、サイクロンスクラバ一方式の空気清浄化
装置においてケミカル物質の除去率の高い理由が、超微
細ミストを多量に発生させている点にあることに着目し
て、スプレー塔方式に水噴射機構に超微細ミスト発生機
構を付加することで上記問題を解消したものである。す
なわち、本発明は、従来のスプレー塔方式による空気清
浄化装置と設備コスト、ランニングコストが同等で、し
かもサイクロンスクラバー方式の空気清浄化装置に匹敵
するケミカル物質の除去能力を有する空気清浄化方法お
よび空気清浄化装置を提供することを目的とする。The present invention has been made in order to solve such a conventional problem. The reason for the high removal rate of a chemical substance in a cyclone scrubber-type air cleaning device is that a large amount of ultrafine mist is generated. The above problem has been solved by adding an ultra-fine mist generating mechanism to the water spraying mechanism in the spray tower method. That is, the present invention provides an air cleaning method which has the same equipment cost and running cost as a conventional air purifying apparatus using a spray tower system, and has a chemical substance removing ability comparable to that of a cyclone scrubber system air purifying apparatus. An object of the present invention is to provide an air cleaning device.
【００１２】[0012]
【課題を解決するための手段】本発明の空気清浄化方法
は、空気流を発生させる工程と、前記空気流中に水滴を
噴射する工程と、前記水滴を含む空気流を減圧領域に導
入して前記水滴を減圧膨張により超微細ミストに分裂さ
せる工程と、前記超微細ミストを含む空気流を冷却固体
表面と接触させて前記超微細ミストを凝縮除去する工程
とを有することを特徴としている。According to the present invention, there is provided an air cleaning method comprising the steps of generating an air flow, injecting water droplets into the air flow, and introducing the air flow containing the water droplets into a reduced pressure area. And separating the water droplets into ultrafine mist by expansion under reduced pressure, and contacting an air flow containing the ultrafine mist with a cooling solid surface to condense and remove the ultrafine mist.
【００１３】供給水としては純水や超純水が好適してい
る。なお、超微細ミストを冷却固体表面と接触させて生
じた凝縮水は再生循環して使用することが望ましい。As the supply water, pure water or ultrapure water is suitable. It is desirable that the condensed water generated by bringing the ultrafine mist into contact with the surface of the cooled solid is recycled and used.
【００１４】上記の空気流中に噴射された水滴はおよそ
１０μｍより大きい粒子径であることが好ましく、減圧
膨張により分裂された超微細ミストはおよそ０．３μｍ
より小さい粒子径であることが好ましい。It is preferable that the water droplets injected into the air stream have a particle diameter larger than about 10 μm, and the ultrafine mist split by the reduced pressure expansion is about 0.3 μm.
Preferably, the particle size is smaller.
【００１５】上記の空気流中に噴射された水滴は主とし
て噴射による慣性運動を主体とした動きにより空気中の
不純物を捕捉し、減圧膨張により分裂された超微細ミス
トはブラウン運動を主体とした動きにより空気中の不純
物、特にケミカル物質を捕捉する。The water droplets jetted into the air flow capture impurities in the air mainly by the motion mainly due to the inertial motion due to the jetting, and the ultrafine mist split by the decompression expansion expands mainly the Brownian motion. Traps impurities in the air, especially chemical substances.
【００１６】空気流の流速は３ｍ／秒以上、好ましくは
３〜１５ｍ／秒の範囲である。The flow rate of the air flow is 3 m / sec or more, preferably in the range of 3 to 15 m / sec.
【００１７】空気流の流速は３ｍ／秒より遅いと衝立背
後に生ずる減圧領域が水滴を分裂させ難くなる。なお、
空気流の流速が１５ｍ／秒を超えても効果はそれ以上向
上せず、かえって各種の構成素材に風圧に絶える強度が
必要となってコストアップの要因となる。If the flow velocity of the air flow is lower than 3 m / sec, it is difficult for the depressurized region generated behind the partition to break water droplets. In addition,
Even if the flow velocity of the air flow exceeds 15 m / sec, the effect is not further improved, but rather, various constituent materials need strength to cut off the wind pressure, which causes a cost increase.
【００１８】水滴の噴射量（ｌ）は空気量（ｍ3 ）に対
して０．５〜０．７ ｌ／ｍ3 の範囲にあることが望ま
しく、また、水滴の噴射圧ｆ０．５〜２．０ｋｇ／ｃｍ
2 Ｇの範囲にあることが望ましい。It is desirable that the water droplet injection amount (l) is in the range of 0.5 to 0.7 l / m 3 with respect to the air amount (m 3 ), and the water droplet injection pressure f 0.5 to 2 0.0kg / cm
It is preferably in the range of 2 G.
【００１９】本発明の空気清浄化装置は、隔壁で囲まれ
た空気流路と、前記空気流路内に配置された水噴射ノズ
ルと、前記水噴射ノズルの下流に配設された多数の衝立
と、前記空気流路内に前記水噴射ノズルから前記衝立側
に向かう空気流を形成させて前記衝立の背面側に減圧領
域を形成させる送気ファンと、前記衝立の下流側に配置
された空気流中の超微細ミストを凝縮除去する冷却手段
とを有することを特徴としている。The air purifying apparatus according to the present invention comprises an air flow path surrounded by a partition, a water injection nozzle disposed in the air flow path, and a plurality of partitions provided downstream of the water injection nozzle. An air supply fan that forms an air flow from the water injection nozzle toward the partition in the air flow path to form a decompression region on the back side of the partition, and air disposed downstream of the partition. And cooling means for condensing and removing ultra-fine mist in the flow.
【００２０】この空気清浄化方法には、前記冷却手段に
より凝縮された水の不純物の量を計測する計測装置を設
けることもできる。凝縮水の不純物量は被処理空気の供
給源であるクリ−ンルームや局所クリーントンネル内の
空気のクリーン度と関連するから凝縮水の不純物量を監
視することによりクリ−ンルームや局所クリーントンネ
ル内の空気のクリーン度を監視することができる。冷却
手段としては、例えば冷却コイルを用いることができ
る。This air cleaning method may be provided with a measuring device for measuring the amount of impurities of water condensed by the cooling means. The amount of impurities in the condensed water is related to the cleanliness of the air in the clean room and the local clean tunnel, which is the supply source of the air to be treated. Air cleanliness can be monitored. As the cooling means, for example, a cooling coil can be used.
【００２１】本発明の空気清浄化装置には、冷却手段に
より凝縮された水を浄化して水噴射ノズルの供給水に供
給する再循環システムを設けることが望ましい。このと
き再生水の不純物濃度も上述した計測装置により計測し
て水質を管理することが望ましい。The air purifying apparatus of the present invention is desirably provided with a recirculation system for purifying water condensed by the cooling means and supplying the purified water to the water supplied from the water injection nozzle. At this time, it is desirable to control the water quality by measuring the impurity concentration of the regenerated water also by the above-described measuring device.
【００２２】本発明の空気清浄化装置において空気流中
に減圧領域を形成するために用いられる多数の衝立は、
背面側に減圧領域を形成し得るものであればよく、特に
形状は限定されない。一般には、衝立として、空気流の
流線を遮るように配置された矩形、その他任意形状の平
板が用いられる。The number of partitions used to create a reduced pressure zone in the air stream in the air cleaning device of the present invention are:
What is necessary is just to be able to form the decompression area on the back side, and the shape is not particularly limited. Generally, a rectangular or other flat plate arranged so as to block a streamline of an air flow is used as a partition.
【００２３】これらの平板は、空気流路を横切るように
間隔をおいて多数配列した組を空気流路に沿って、多段
に、かつ前の組の平板間の間隙に後の組の平板が位置す
るように配列することが好ましい。In these flat plates, a large number of sets arranged at intervals so as to traverse the air flow path are arranged in multiple stages along the air flow path, and the subsequent set of flat plates is placed in the gap between the previous set of flat plates. It is preferable to arrange them so that they are located.
【００２４】これらの多数の衝立の組は、３段以上、好
ましくは３〜７段に配列されて用いられる。These multiple screen sets are used in three or more stages, preferably three to seven stages.
【００２５】空気流は各組の衝立を通過するにつれて圧
力が低下するので、後段の衝立の組を通過する空気流に
よっても減圧領域が形成されるようにするため、各組相
互の間隔は、下流にいくに従って順次狭くすることが望
ましい。Since the pressure of the air flow decreases as it passes through each set of partitions, the distance between the sets is set so that a reduced pressure region is also formed by the air flow passing through the subsequent set of partitions. It is desirable that the width be gradually reduced toward the downstream.
【００２６】本発明においては、水噴射ノズルから噴射
された水滴は、慣性運動により空気中の微小な塵埃と衝
突して水滴中に取り込み、一部は衝立と衝突し凝縮して
除去される。他の水滴は衝立の背面側に形成される減圧
領域において分裂して超微細ミストを形成する。超微細
ミストはブラウン運動により空気中の、特にガス状のケ
ミカル物質を取り込む。In the present invention, water droplets jetted from the water jet nozzle collide with minute dust in the air due to inertial motion and are taken into the water droplets, and a part of the water droplets collide with the partition and are condensed and removed. Other droplets split in a reduced pressure region formed on the back side of the screen to form an ultrafine mist. The ultrafine mist takes up the chemical substances in the air, especially gaseous, by Brownian motion.
【００２７】このようにして空気中の塵埃やガス状のケ
ミカル物質を取り込んだ超微細ミストは冷却手段により
凝縮除去され、塵埃やケミカル物質の除かれた空気が送
り出される。The ultra-fine mist that has taken in the dust and gaseous chemical substance in the air in this way is condensed and removed by the cooling means, and the air from which the dust and the chemical substance have been removed is sent out.
【００２８】本発明は、例えば、クリ−ンルームや局所
クリーントンネルなどの空気清浄化に好適している。The present invention is suitable for purifying air in, for example, a clean room or a local clean tunnel.
【００２９】[0029]
【発明の実施の形態】以下、図面を参照しながら本発明
の実施の形態について詳細に説明する。なお、各図面に
おいて、同一の構成には同一の符号を付し、図面ごとの
重複する説明は省略する。Embodiments of the present invention will be described below in detail with reference to the drawings. In each of the drawings, the same components are denoted by the same reference numerals, and redundant description for each drawing will be omitted.
【００３０】[0030]
【実施例】図１は、本発明の空気清浄化装置の一実施例
を概略的に示す図である。FIG. 1 is a diagram schematically showing an embodiment of an air purifying apparatus according to the present invention.
【００３１】同図において、空気ダクト１の例えばクリ
ーンルームに連結した空気取入口近傍には除塵のための
プレフィルタ２が装着され、その下流に噴射ノズル３が
多数の噴射口を下流側に向けて配置されている。噴射ノ
ズル３の下流には多数のステンレス板からなる衝立板４
が空気ダクト１の長手方向に直交する方向に等間隔で、
かつ多段に配設されている。In FIG. 1, a pre-filter 2 for dust removal is mounted near an air intake of an air duct 1 connected to, for example, a clean room, and downstream of the pre-filter 2, an injection nozzle 3 directs a large number of injection ports toward the downstream side. Are located. A partition plate 4 made of a number of stainless steel plates is provided downstream of the injection nozzle 3.
Are equally spaced in a direction perpendicular to the longitudinal direction of the air duct 1,
And it is arranged in multiple stages.
【００３２】各段の衝立板４は前段の衝立板４の間隙に
次の段の衝立板４が位置するように互い違いに配置され
ている。The partitions 4 of each stage are alternately arranged so that the partitions 4 of the next stage are located in the gaps between the partitions 4 of the preceding stage.
【００３３】多段に配置された衝立板４の下方にはバッ
ファタンク５が配置され、噴射ノズル３から噴射され衝
立板４に衝突し超微細ミストとならずに衝立板４を伝っ
て流下した水をポンプ６により冷却器７を介して再び噴
射ノズル３から噴射するようになっている。A buffer tank 5 is disposed below the partition plates 4 arranged in multiple stages. The buffer tank 5 is jetted from the injection nozzles 3 and collides with the partition plate 4 to flow down the partition plate 4 without forming ultra-fine mist. Is again injected from the injection nozzle 3 via the cooler 7 by the pump 6.
【００３４】さらに、衝立板４の下流には超微細ミスト
を冷却し凝縮して除去する冷却コイル８が配設されてい
る。冷却コイル８の表面で凝縮した水は、バッファタン
ク５に導かれ衝立板４から流下した水とともに再び噴射
ノズル３から噴射される。Further, a cooling coil 8 for cooling, condensing and removing the ultrafine mist is provided downstream of the partition plate 4. The water condensed on the surface of the cooling coil 8 is guided to the buffer tank 5 and is again injected from the injection nozzle 3 together with the water flowing down from the partition plate 4.
【００３５】冷却コイル８の下流には空気ダクト１内に
３ｍ／秒以上の空気流を生じさせる送気ファン９が設置
されている。Downstream of the cooling coil 8, an air supply fan 9 for generating an air flow of 3 m / sec or more in the air duct 1 is provided.
【００３６】この実施例の装置では、送気ファン９を駆
動させると空気ダクト１内に３ｍ／秒以上の流速の空気
流が形成される。In the apparatus of this embodiment, when the air supply fan 9 is driven, an air flow having a flow rate of 3 m / sec or more is formed in the air duct 1.
【００３７】この状態で、図２に模式的に示すように、
噴射ノズル３から噴射圧０．５〜２．０ｋｇ／ｃｍ
2 Ｇ、流量０．５〜０．７ ｌ／ｍ3 で粒子径１０〜１
００μｍの水滴Ｐを噴射させると、この水滴は塵埃等の
微粒子と衝突してこれらを取り込みつつ一部は最初の衝
立板４Ａに衝突し凝縮して流下し、残りは空気流に乗っ
て衝立板４Ａを回って衝立板４Ａの背面に形成される減
圧領域に至って分裂してガス状の超微細ミストＭとな
る。水滴Ｐは、噴射による慣性運動により塵埃と衝突し
て塵埃を取り込むが、超微細ミストＭはブラウン運動が
支配的となる。この時の粒子密度は、約１０5 〜１０7
個／ｃｃと高いため、ブラウン運動をしながら気流にの
ってガス状のケミカル物質と接触する確率が極めて高く
なる。衝立板４Ａの間隙を塞ぐように配置された次の段
の衝立板４Ｂ、さらにその後段の衝立板４Ｃ、４Ｄによ
っても同様にして超微細ミストＭが生成される。なお、
同図において、衝立板４Ａの組と衝立板４Ｂの組との間
隔Ａ、衝立板４Ｂの組と衝立板４Ｃの組との間隔Ｂ、衝
立板４Ｃの組と衝立板４Ｄの組との間隔Ｃ、衝立板４Ｄ
の組と衝立板４Ｅの組との間隔Ｄは、Ａ＞Ｂ＞Ｃ＞Ｄと
されて、後段の衝立板によっても減圧領域が形成される
ようにされている。In this state, as schematically shown in FIG.
Injection pressure from injection nozzle 3 0.5 to 2.0 kg / cm
2 G, particle size 10-1 at flow rate 0.5-0.7 l / m 3
When a water droplet P of 00 μm is jetted, the water droplet collides with fine particles such as dust and captures them while a part of the water droplet collides with the first partition plate 4A and condenses and flows down. It turns around 4A, reaches a decompression region formed on the back surface of the partition plate 4A, and is split into gaseous ultrafine mist M. The water droplet P collides with the dust and takes in the dust due to the inertial motion due to the ejection, but the Brownian motion is dominant in the ultrafine mist M. Particle density at this time, about 10 5 -10 7
Since the number of particles per cc is high, the probability of contact with gaseous chemical substances in the airflow while performing Brownian motion is extremely high. Ultrafine mist M is generated in the same manner by the next stage partition plate 4B arranged so as to close the gap between the partition plates 4A, and further by subsequent stage partitions 4C and 4D. In addition,
In the drawing, the distance A between the set of the partition plates 4A and the pair of the partition plates 4B, the interval B between the pair of the partition plates 4B and the pair of the partition plates 4C, and the interval between the pair of the partition plates 4C and the pair of the partition plates 4D. C, screen plate 4D
Is set to be A>B>C> D, so that the pressure reducing region is formed by the subsequent screen plate.
【００３８】したがって、空気流中のガス状のケミカル
物質は超微細ミストＭ中に溶け込んで除去されることに
なる。ガス状のケミカル物質を取り込んだ超微細ミスト
Ｍは、冷却コイル８に到達し、冷却されて凝集し、大さ
な水滴となって系外へ排水として排除される。Therefore, the gaseous chemical substance in the air flow is dissolved in the ultrafine mist M and removed. The ultrafine mist M that has taken in the gaseous chemical substance reaches the cooling coil 8, is cooled and aggregates, and is formed as large water droplets and is discharged out of the system as wastewater.
【００３９】このようにして塵埃やガス状のケミカル物
質の除去された空気は、空気ダクト１の排気口から排出
され、例えばクリーンルームに送られる。The air from which dust and gaseous chemical substances have been removed in this way is discharged from the air outlet of the air duct 1 and sent to, for example, a clean room.
【図１】本発明の実施例の空気清浄化装置を概略的に示
す図である。FIG. 1 is a diagram schematically showing an air cleaning device according to an embodiment of the present invention.
【図２】本発明の実施例の超微細ミストの生成過程を模
式的に示す図である。FIG. 2 is a diagram schematically showing a process of generating an ultrafine mist according to an example of the present invention.
１……空気ダクト、２……プレフィルタ、３……噴射ノ
ズル、４……衝立板、５……バッファタンク、６……ポ
ンプ、７……冷却器、８……冷却コイル、９……送気フ
ァン９。DESCRIPTION OF SYMBOLS 1 ... Air duct, 2 ... Pre-filter, 3 ... Injection nozzle, 4 ... Partition plate, 5 ... Buffer tank, 6 ... Pump, 7 ... Cooler, 8 ... Cooling coil, 9 ... Air supply fan 9.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｂ０１Ｄ 53/77 Ｆターム(参考） 4D002 AA40 AC10 BA02 CA01 GB01 GB20 4D020 AA10 BA08 CB25 CB27 DA01 DA03 DB01 DB11 DB20 4D032 AC01 AC08 AE04 BA03 BB01 BB20 CA01 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification code FI Theme coat ゛ (Reference) B01D 53/77 F-term (Reference) 4D002 AA40 AC10 BA02 CA01 GB01 GB20 4D020 AA10 BA08 CB25 CB27 DA01 DA03 DB01 DB11 DB20 4D032 AC01 AC08 AE04 BA03 BB01 BB20 CA01
Claims (12)
る減圧領域に導入して前記水滴を減圧膨張により超微細
ミストに分裂させる工程と、 前記超微細ミストを含む空気流を冷却固体表面と接触さ
せて前記超微細ミストを凝縮除去する工程とを有するこ
とを特徴とする空気清浄化方法。Generating an air flow; injecting a water droplet into the air flow; introducing an air flow including the water droplet into a decompression region behind a partition in the air flow to form the water droplet. Splitting the ultrafine mist into ultrafine mist by expansion under reduced pressure, and contacting an air flow containing the ultrafine mist with a cooling solid surface to condense and remove the ultrafine mist. .
１０μｍより大きい粒子径であり、減圧膨張により分裂
された超微細ミストはおよそ０．３μｍより小さい粒子
径であることを特徴とする請求項１記載の空気清浄化方
法。2. The method according to claim 1, wherein the water droplets injected into the air stream have a particle size of about 10 μm or more, and the ultrafine mist split by the reduced pressure expansion has a particle size of about 0.3 μm or less. Item 7. The air cleaning method according to Item 1.
性運動を主体とした動きにより空気中の不純物を捕捉
し、減圧膨張により分裂された超微細ミストはブラウン
運動を主体とした動きにより空気中の不純物を捕捉する
ことを特徴とする請求項１又は２記載の空気清浄化方
法。3. The water droplets injected into the air stream mainly capture impurities in the air by movement mainly based on inertial motion, and the ultrafine mist split by the decompression expansion expands the air based on Brownian movement. 3. The air cleaning method according to claim 1, wherein impurities in the air are captured.
項１乃至３のいずれか１項記載の空気清浄化方法。4. The air cleaning method according to claim 1, wherein the flow rate of the air stream is 3 m / sec or more.
ｍ2 Ｇである請求項１乃至５のいずれか１項記載の空気
清浄化方法。5. An injection pressure of a water droplet is 0.5 to 2.0 kg / c.
The air cleaning method according to any one of claims 1 to 5, wherein m 2 G is used.
かう空気流を形成させて前記衝立の背面側に減圧領域を
形成させる送気ファンと、前記衝立の下流側に配置され
た空気流中の超微細ミストを凝縮除去する冷却手段とを
有することを特徴とする空気清浄化装置。6. An air flow path surrounded by a partition, a water injection nozzle disposed in the air flow path, a number of partitions disposed downstream of the water injection nozzle, An air supply fan that forms an air flow from the water injection nozzle toward the partition to form a decompression region on the back side of the partition, and an ultrafine mist in the air flow disposed downstream of the partition. An air purifying apparatus, comprising: a cooling means for removing condensation.
物の量を計測する計測装置を有することを特徴とする請
求項６記載の空気清浄化装置。7. The air purifying apparatus according to claim 6, further comprising a measuring device for measuring an amount of impurities of water condensed by said cooling means.
して前記水噴射ノズルの供給水として供給する再循環シ
ステムを有することを特徴とする請求項６又は７記載の
空気清浄化装置。8. The air purifying apparatus according to claim 6, further comprising a recirculation system for purifying water condensed by the cooling means and supplying the purified water as supply water to the water injection nozzle.
遮るように空気流路に沿って多段に配設されていること
を特徴とする請求項６乃至８のいずれか１項記載の空気
清浄化装置。9. The multi-partition according to claim 6, wherein the plurality of partitions are arranged in multiple stages along an air flow path so as to block streamlines of the air flow. Air purifier.
横切るように間隔をおいて多数配列した組を空気流路に
沿って多段に、かつ前の組の平板間の間隙に後の組の平
板が位置するように配列したものであることを特徴とす
る請求項６乃至９のいずれか１項記載の空気清浄化装
置。10. The multi-partition screen includes a plurality of sets of flat plates arranged at intervals so as to traverse the air flow passage in multiple stages along the air flow passage and a gap between the preceding set of flat plates. The air cleaning apparatus according to any one of claims 6 to 9, wherein the flat plates are arranged so as to be positioned.
列されていることを特徴とする請求項９又は１０記載の
空気清浄化装置。11. The air purifying apparatus according to claim 9, wherein the plurality of screen sets are arranged in three to seven stages.
向かって順次狭くされていることを特徴とする請求項９
乃至１１のいずれか１項記載の空気清浄化装置。12. The apparatus according to claim 9, wherein an interval between the screens of each set is gradually reduced toward the downstream.
An air purifying apparatus according to any one of claims 1 to 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10211195A JP2000042338A (en) | 1998-07-27 | 1998-07-27 | Air purifying method and air purifying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10211195A JP2000042338A (en) | 1998-07-27 | 1998-07-27 | Air purifying method and air purifying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000042338A true JP2000042338A (en) | 2000-02-15 |
| JP2000042338A5 JP2000042338A5 (en) | 2005-10-27 |
Family
ID=16601959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10211195A Pending JP2000042338A (en) | 1998-07-27 | 1998-07-27 | Air purifying method and air purifying device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000042338A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101570613B1 (en) * | 2014-08-26 | 2015-11-20 | 성균관대학교산학협력단 | Air purification apparatus |
| JP2015536817A (en) * | 2012-11-06 | 2015-12-24 | イノベーション イン サイエンシーズ アンド テクノロジーズ エス．アール．エル．Ｉｎｎｏｖａｔｉｏｎｉｎ Ｓｃｉｅｎｃｅｓ ＆ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｓ．Ｒ．Ｌ． | Method and system for mixing gases and liquids to recover compounds gravitationally, physically and chemically |
| JP2019030835A (en) * | 2017-08-07 | 2019-02-28 | Ｊｆｅスチール株式会社 | Particle recovery method |
| CN109809528A (en) * | 2019-04-09 | 2019-05-28 | 海南大学 | Ultra-gravity low-pressure constant temperature membrane distillation seawater desalination device and method for desalinating seawater |
| CN110479046A (en) * | 2019-09-11 | 2019-11-22 | 马德民 | A kind of device using liquid medium purification gas |
-
1998
- 1998-07-27 JP JP10211195A patent/JP2000042338A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015536817A (en) * | 2012-11-06 | 2015-12-24 | イノベーション イン サイエンシーズ アンド テクノロジーズ エス．アール．エル．Ｉｎｎｏｖａｔｉｏｎｉｎ Ｓｃｉｅｎｃｅｓ ＆ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｓ．Ｒ．Ｌ． | Method and system for mixing gases and liquids to recover compounds gravitationally, physically and chemically |
| KR101570613B1 (en) * | 2014-08-26 | 2015-11-20 | 성균관대학교산학협력단 | Air purification apparatus |
| JP2019030835A (en) * | 2017-08-07 | 2019-02-28 | Ｊｆｅスチール株式会社 | Particle recovery method |
| CN109809528A (en) * | 2019-04-09 | 2019-05-28 | 海南大学 | Ultra-gravity low-pressure constant temperature membrane distillation seawater desalination device and method for desalinating seawater |
| CN109809528B (en) * | 2019-04-09 | 2023-07-21 | 海南大学 | High-gravity low-pressure constant temperature membrane distillation seawater desalination device and seawater desalination method |
| CN110479046A (en) * | 2019-09-11 | 2019-11-22 | 马德民 | A kind of device using liquid medium purification gas |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2021203662B2 (en) | Submicron particle removal from gas streams | |
| US5413626A (en) | Process for the wet cleaning of gases | |
| US5582807A (en) | Method and apparatus for removing particulate and gaseous pollutants from a gas stream | |
| US3036417A (en) | Gas scrubbing and like operations | |
| JPH06254345A (en) | Horizontal wet type cleaning device and method for removing sulfur dioxide from gaseous stream | |
| CN1171747A (en) | Venturi scrubber and method with optimized remote spray | |
| JP2002536168A (en) | Charged droplet gas scrubber apparatus and method | |
| JP2000042338A (en) | Air purifying method and air purifying device | |
| JP2002035524A (en) | Apparatus for removing impurity component in air | |
| US4153432A (en) | Apparatus and method for collection of contaminants | |
| JPH0440054B2 (en) | ||
| CN208893886U (en) | mist eliminator | |
| US6716272B2 (en) | Scrubber for paint booths | |
| JPH0796122A (en) | Water spray type air purifier | |
| KR200151286Y1 (en) | Exhaust gas purification device | |
| US5156819A (en) | Steam scrubbing system for exhaust gases | |
| JPH06126129A (en) | Water film spray-type desulfurization apparatus | |
| JPH0796125A (en) | Water spray type air purifier | |
| KR200228752Y1 (en) | Air washing system for air clean room | |
| RU2281148C1 (en) | Impingement scrubber | |
| JPH0478412A (en) | Gas absorption method | |
| JP2000167416A (en) | Draft device and treatment of exhaust gas from draft device | |
| EA041897B1 (en) | METHOD FOR CLEANING THE GAS FLOW | |
| EA040015B1 (en) | METHOD FOR REMOVING SUBMICRON PARTICLES FROM A GAS FLOW | |
| JPH0325701B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050722 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050722 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070928 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071009 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080226 |