ITMI20011120A1 - Wafer di silicio aventi distribuzione controllata di difetti, metodi di preparazione degli stessi, ed estrattori czochralski per la fabbrica - Google Patents
Wafer di silicio aventi distribuzione controllata di difetti, metodi di preparazione degli stessi, ed estrattori czochralski per la fabbrica Download PDFInfo
- Publication number
- ITMI20011120A1 ITMI20011120A1 IT2001MI001120A ITMI20011120A ITMI20011120A1 IT MI20011120 A1 ITMI20011120 A1 IT MI20011120A1 IT 2001MI001120 A IT2001MI001120 A IT 2001MI001120A IT MI20011120 A ITMI20011120 A IT MI20011120A IT MI20011120 A1 ITMI20011120 A1 IT MI20011120A1
- Authority
- IT
- Italy
- Prior art keywords
- wafer
- ingot
- silicon
- concentration
- silicon wafer
- Prior art date
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2000-0057344A KR100378184B1 (ko) | 1999-11-13 | 2000-09-29 | 제어된 결함 분포를 갖는 실리콘 웨이퍼, 그의 제조공정및 단결정 실리콘 잉곳의 제조를 위한 초크랄스키 풀러 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ITMI20011120A0 ITMI20011120A0 (it) | 2001-05-25 |
| ITMI20011120A1 true ITMI20011120A1 (it) | 2002-11-25 |
Family
ID=36772732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT2001MI001120A ITMI20011120A1 (it) | 2000-09-29 | 2001-05-25 | Wafer di silicio aventi distribuzione controllata di difetti, metodi di preparazione degli stessi, ed estrattori czochralski per la fabbrica |
Country Status (4)
| Country | Link |
|---|---|
| CN (2) | CN1289720C (zh) |
| IT (1) | ITMI20011120A1 (zh) |
| MY (1) | MY131022A (zh) |
| SG (2) | SG135030A1 (zh) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4853027B2 (ja) * | 2006-01-17 | 2012-01-11 | 信越半導体株式会社 | シリコン単結晶ウエーハの製造方法 |
| TWI580825B (zh) * | 2012-01-27 | 2017-05-01 | Ｍｅｍｃ新加坡有限公司 | 藉由定向固化作用製備鑄態矽之方法 |
| JP6100226B2 (ja) * | 2014-11-26 | 2017-03-22 | 信越半導体株式会社 | シリコン単結晶ウェーハの熱処理方法 |
| KR101759876B1 (ko) * | 2015-07-01 | 2017-07-31 | 주식회사 엘지실트론 | 웨이퍼 및 웨이퍼 결함 분석 방법 |
| KR102626492B1 (ko) * | 2016-11-14 | 2024-01-17 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 고광전변환효율 태양전지의 제조 방법 및 고광전변환효율 태양전지 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63315589A (ja) * | 1987-06-16 | 1988-12-23 | Osaka Titanium Seizo Kk | 単結晶製造装置 |
| FI901414A0 (fi) * | 1989-03-30 | 1990-03-21 | Nippon Kokan Kk | Anordning foer framstaellning av kiselenkristaller. |
| KR960006262B1 (ko) * | 1990-03-20 | 1996-05-13 | 닛뽕 고오깡 가부시기가이샤 | 실리콘 단결정의 제조장치 |
| US5401669A (en) * | 1993-05-13 | 1995-03-28 | Memc Electronic Materials, Spa | Process for the preparation of silicon wafers having controlled distribution of oxygen precipitate nucleation centers |
| JPH0761889A (ja) * | 1993-08-26 | 1995-03-07 | Komatsu Electron Metals Co Ltd | 半導体単結晶引き上げ装置および引き上げ方法 |
| JPH1179889A (ja) * | 1997-07-09 | 1999-03-23 | Shin Etsu Handotai Co Ltd | 結晶欠陥が少ないシリコン単結晶の製造方法、製造装置並びにこの方法、装置で製造されたシリコン単結晶とシリコンウエーハ |
| JP3992800B2 (ja) * | 1997-09-22 | 2007-10-17 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 単結晶製造装置および単結晶の製造方法 |
| JP4166316B2 (ja) * | 1998-02-27 | 2008-10-15 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 単結晶製造装置 |
| JP3670493B2 (ja) * | 1998-10-09 | 2005-07-13 | 東芝セラミックス株式会社 | 単結晶引上装置 |
| US6197111B1 (en) * | 1999-02-26 | 2001-03-06 | Memc Electronic Materials, Inc. | Heat shield assembly for crystal puller |
| JP3709494B2 (ja) * | 1999-02-26 | 2005-10-26 | 株式会社Ｓｕｍｃｏ | シリコン単結晶引上げ装置の熱遮蔽部材 |
-
2001
- 2001-05-24 MY MYPI20012486 patent/MY131022A/en unknown
- 2001-05-25 CN CN 01123301 patent/CN1289720C/zh not_active Expired - Lifetime
- 2001-05-25 IT IT2001MI001120A patent/ITMI20011120A1/it unknown
- 2001-05-25 CN CNB2005101202266A patent/CN100430531C/zh not_active Expired - Lifetime
- 2001-05-25 SG SG200402260-4A patent/SG135030A1/en unknown
- 2001-05-25 SG SG200103159A patent/SG108822A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SG108822A1 (en) | 2005-02-28 |
| CN1345986A (zh) | 2002-04-24 |
| ITMI20011120A0 (it) | 2001-05-25 |
| CN1782140A (zh) | 2006-06-07 |
| MY131022A (en) | 2007-07-31 |
| SG135030A1 (en) | 2007-09-28 |
| CN100430531C (zh) | 2008-11-05 |
| CN1289720C (zh) | 2006-12-13 |
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