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IT1403421B1 - Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione - Google Patents

Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione

Info

Publication number
IT1403421B1
IT1403421B1 ITTO2010A001050A ITTO20101050A IT1403421B1 IT 1403421 B1 IT1403421 B1 IT 1403421B1 IT TO2010A001050 A ITTO2010A001050 A IT TO2010A001050A IT TO20101050 A ITTO20101050 A IT TO20101050A IT 1403421 B1 IT1403421 B1 IT 1403421B1
Authority
IT
Italy
Prior art keywords
magnetoresistive sensor
triassial
manufacturing procedure
integrated
sensor
Prior art date
Application number
ITTO2010A001050A
Other languages
English (en)
Inventor
Caterina Riva
Dario Paci
Marco Morelli
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITTO2010A001050A priority Critical patent/IT1403421B1/it
Priority to US13/996,922 priority patent/US9442168B2/en
Priority to PCT/EP2011/074045 priority patent/WO2012085296A1/en
Priority to EP11805049.1A priority patent/EP2656090B1/en
Priority to CN201180059749.8A priority patent/CN103261905B/zh
Publication of ITTO20101050A1 publication Critical patent/ITTO20101050A1/it
Application granted granted Critical
Publication of IT1403421B1 publication Critical patent/IT1403421B1/it
Priority to US14/938,121 priority patent/US10177306B2/en
Priority to US16/201,264 priority patent/US11063211B2/en
Priority to US17/343,388 priority patent/US11737369B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0052—Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N59/00—Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
ITTO2010A001050A 2010-12-23 2010-12-23 Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione IT1403421B1 (it)

Priority Applications (8)

Application Number Priority Date Filing Date Title
ITTO2010A001050A IT1403421B1 (it) 2010-12-23 2010-12-23 Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione
US13/996,922 US9442168B2 (en) 2010-12-23 2011-12-23 Integrated magnetoresistive sensor, in particular three-axis magnetoresistive sensor and manufacturing method thereof
PCT/EP2011/074045 WO2012085296A1 (en) 2010-12-23 2011-12-23 Integrated magnetoresistive sensor, in particular three-axes magnetoresistive sensor and manufacturing method thereof
EP11805049.1A EP2656090B1 (en) 2010-12-23 2011-12-23 Integrated magnetoresistive sensor, in particular three-axes magnetoresistive sensor and manufacturing method thereof
CN201180059749.8A CN103261905B (zh) 2010-12-23 2011-12-23 集成磁阻传感器，特别是三轴磁阻传感器及其制造方法
US14/938,121 US10177306B2 (en) 2010-12-23 2015-11-11 Method for manufacturing an integrated magnetoresistive sensor, in particular a three-axis magnetoresistive sensor
US16/201,264 US11063211B2 (en) 2010-12-23 2018-11-27 Method for manufacturing an integrated magnetoresistive device
US17/343,388 US11737369B2 (en) 2010-12-23 2021-06-09 Method for manufacturing an integrated magnetoresistive sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2010A001050A IT1403421B1 (it) 2010-12-23 2010-12-23 Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione

Publications (2)

Publication Number Publication Date
ITTO20101050A1 ITTO20101050A1 (it) 2012-06-24
IT1403421B1 true IT1403421B1 (it) 2013-10-17

Family

ID=43737439

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2010A001050A IT1403421B1 (it) 2010-12-23 2010-12-23 Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione

Country Status (5)

Country Link
US (4) US9442168B2 (it)
EP (1) EP2656090B1 (it)
CN (1) CN103261905B (it)
IT (1) IT1403421B1 (it)
WO (1) WO2012085296A1 (it)

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Also Published As

Publication number Publication date
EP2656090B1 (en) 2014-12-03
US20130299930A1 (en) 2013-11-14
US20160072057A1 (en) 2016-03-10
ITTO20101050A1 (it) 2012-06-24
US20190097127A1 (en) 2019-03-28
EP2656090A1 (en) 2013-10-30
US10177306B2 (en) 2019-01-08
WO2012085296A1 (en) 2012-06-28
US11063211B2 (en) 2021-07-13
CN103261905B (zh) 2017-04-26
US11737369B2 (en) 2023-08-22
US20210296578A1 (en) 2021-09-23
CN103261905A (zh) 2013-08-21
US9442168B2 (en) 2016-09-13

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