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IT1307236B1 - Pompa ionica. - Google Patents

Pompa ionica.

Info

Publication number
IT1307236B1
IT1307236B1 IT1999TO000260A ITTO990260A IT1307236B1 IT 1307236 B1 IT1307236 B1 IT 1307236B1 IT 1999TO000260 A IT1999TO000260 A IT 1999TO000260A IT TO990260 A ITTO990260 A IT TO990260A IT 1307236 B1 IT1307236 B1 IT 1307236B1
Authority
IT
Italy
Prior art keywords
ionic pump
ionic
pump
Prior art date
Application number
IT1999TO000260A
Other languages
English (en)
Inventor
Miriam Spagnol
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT1999TO000260A priority Critical patent/IT1307236B1/it
Priority to DE69936569T priority patent/DE69936569T2/de
Priority to EP99123496A priority patent/EP1047106B1/en
Priority to US09/541,314 priority patent/US6264433B1/en
Publication of ITTO990260A1 publication Critical patent/ITTO990260A1/it
Application granted granted Critical
Publication of IT1307236B1 publication Critical patent/IT1307236B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
IT1999TO000260A 1999-04-02 1999-04-02 Pompa ionica. IT1307236B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT1999TO000260A IT1307236B1 (it) 1999-04-02 1999-04-02 Pompa ionica.
DE69936569T DE69936569T2 (de) 1999-04-02 1999-11-25 Ionenzerstäuberpumpe
EP99123496A EP1047106B1 (en) 1999-04-02 1999-11-25 Sputter ion pump
US09/541,314 US6264433B1 (en) 1999-04-02 2000-04-01 Sputter ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT1999TO000260A IT1307236B1 (it) 1999-04-02 1999-04-02 Pompa ionica.

Publications (2)

Publication Number Publication Date
ITTO990260A1 ITTO990260A1 (it) 2000-10-02
IT1307236B1 true IT1307236B1 (it) 2001-10-30

Family

ID=11417696

Family Applications (1)

Application Number Title Priority Date Filing Date
IT1999TO000260A IT1307236B1 (it) 1999-04-02 1999-04-02 Pompa ionica.

Country Status (4)

Country Link
US (1) US6264433B1 (it)
EP (1) EP1047106B1 (it)
DE (1) DE69936569T2 (it)
IT (1) IT1307236B1 (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060013545A (ko) * 2003-05-20 2006-02-10 가부시끼가이샤 도시바 스퍼터 이온 펌프, 그 제조 방법 및 스퍼터 이온 펌프를구비한 화상 표시 장치
US7413412B2 (en) * 2004-06-28 2008-08-19 Hewlett-Packard Development Company, L.P. Vacuum micropump and gauge
US7850432B2 (en) * 2006-09-14 2010-12-14 Gamma Vacuum, Llc Ion pump having emission containment
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
US10550829B2 (en) * 2016-09-08 2020-02-04 Edwards Vacuum Llc Ion trajectory manipulation architecture in an ion pump

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319875A (en) * 1965-03-22 1967-05-16 Varian Associates Ion vacuum pumps
DE2365951C3 (de) * 1973-09-18 1978-08-31 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Ionengetterpumpe
US3994625A (en) * 1975-02-18 1976-11-30 Varian Associates Sputter-ion pump having improved cooling and improved magnetic circuitry
DE2826501B1 (de) * 1978-06-16 1979-11-08 Siemens Ag Evakuierungsvorrichtung zur Erzeugung eines Isoliervakuums um die supraleitende Wicklung eines Rotors
SU712870A1 (ru) * 1978-07-31 1980-01-30 Предприятие П/Я А-3634 Анод магниторазр дного насоса
US4334829A (en) * 1980-02-15 1982-06-15 Rca Corporation Sputter-ion pump for use with electron tubes having thoriated tungsten cathodes
US4328079A (en) * 1980-05-02 1982-05-04 The Cyclotron Corporation Method for pumping impurities, especially noble gases, from hydrogen or mixtures of hydrogen and its isotopes
US4397611A (en) * 1981-07-06 1983-08-09 The Perkin-Elmer Corp. Particle beam instrumentation ion pump
IT1156530B (it) * 1982-09-14 1987-02-04 Varian Spa Pompa ionica con catodo a struttura perfezionata particolarmente per il pompaggio di gas nobili
JPH073385Y2 (ja) * 1988-03-07 1995-01-30 富士写真フイルム株式会社 測光装置
JPH05290792A (ja) * 1992-04-06 1993-11-05 Anelva Corp スパッタイオンポンプ
EP0782174A1 (en) * 1995-12-26 1997-07-02 Nihon Shinku Gijutsu Kabushiki Kaisha Sputter ion pump
US6004104A (en) * 1997-07-14 1999-12-21 Duniway Stockroom Corp. Cathode structure for sputter ion pump
JPH11354071A (ja) * 1998-06-08 1999-12-24 Ulvac Corp スパッタイオンポンプ
WO2000057452A2 (en) * 1999-03-19 2000-09-28 Fei Company Corrugated style anode element for ion pumps

Also Published As

Publication number Publication date
ITTO990260A1 (it) 2000-10-02
EP1047106A2 (en) 2000-10-25
EP1047106A3 (en) 2004-01-07
US6264433B1 (en) 2001-07-24
DE69936569D1 (de) 2007-08-30
DE69936569T2 (de) 2008-04-30
EP1047106B1 (en) 2007-07-18

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