IT1296155B1 - Rotore di pompa turbomolecolare - Google Patents

Rotore di pompa turbomolecolare

Info

Publication number: IT1296155B1
Authority: IT; Italy
Prior art keywords: pump rotor; turbomolecular pump; turbomolecular; rotor; pump
Prior art date: 1996-04-05

Application number

IT96TO000265A

Other languages

English (en)

Inventor

Roberto Cerruti

Original Assignee

Varian Spa

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-04-05

Filing date

1996-04-05

Publication date

1999-06-09

1996-04-05 Application filed by Varian Spa filed Critical Varian Spa

1996-04-05 Priority to IT96TO000265A priority Critical patent/IT1296155B1/it

1996-04-05 Publication of ITTO960265A0 publication Critical patent/ITTO960265A0/it

1996-09-05 Priority to EP96202468A priority patent/EP0799999B1/en

1996-09-05 Priority to DE1996625893 priority patent/DE69625893T2/de

1997-04-18 Priority to US08/844,505 priority patent/US5904469A/en

1997-04-23 Priority to JP9118649A priority patent/JPH10299687A/ja

1997-10-05 Publication of ITTO960265A1 publication Critical patent/ITTO960265A1/it

1999-06-09 Application granted granted Critical

1999-06-09 Publication of IT1296155B1 publication Critical patent/IT1296155B1/it

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/40—Heat treatment
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/90—Coating; Surface treatment
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/95—Preventing corrosion
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/611—Coating

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

IT96TO000265A 1996-04-05 1996-04-05 Rotore di pompa turbomolecolare IT1296155B1 (it)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
IT96TO000265A IT1296155B1 (it)	1996-04-05	1996-04-05	Rotore di pompa turbomolecolare
EP96202468A EP0799999B1 (en)	1996-04-05	1996-09-05	A rotor for turbomolecular pump
DE1996625893 DE69625893T2 (de)	1996-04-05	1996-09-05	Rotor für Turbomolekularpumpe
US08/844,505 US5904469A (en)	1996-04-05	1997-04-18	Rotor for turbomolecular pump
JP9118649A JPH10299687A (ja)	1996-04-05	1997-04-23	ターボ分子ポンプ用のローター

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
IT96TO000265A IT1296155B1 (it)	1996-04-05	1996-04-05	Rotore di pompa turbomolecolare
US08/844,505 US5904469A (en)	1996-04-05	1997-04-18	Rotor for turbomolecular pump
JP9118649A JPH10299687A (ja)	1996-04-05	1997-04-23	ターボ分子ポンプ用のローター

Publications (3)

Publication Number	Publication Date
ITTO960265A0 ITTO960265A0 (it)	1996-04-05
ITTO960265A1 ITTO960265A1 (it)	1997-10-05
IT1296155B1 true IT1296155B1 (it)	1999-06-09

Family

ID=27274184

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT96TO000265A IT1296155B1 (it)	1996-04-05	1996-04-05	Rotore di pompa turbomolecolare

Country Status (4)

Country	Link
US (1)	US5904469A (it)
EP (1)	EP0799999B1 (it)
JP (1)	JPH10299687A (it)
IT (1)	IT1296155B1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6596123B1 (en) *	2000-01-28	2003-07-22	Applied Materials, Inc.	Method and apparatus for cleaning a semiconductor wafer processing system
JP4657463B2 (ja) *	2001-02-01	2011-03-23	エドワーズ株式会社	真空ポンプ
DE10113329A1 (de) *	2001-03-20	2002-09-26	Leybold Vakuum Gmbh	Turbomolekularpumpe
JP2003021092A (ja) *	2001-07-03	2003-01-24	Boc Edwards Technologies Ltd	真空ポンプ
JP2003021093A (ja) *	2001-07-05	2003-01-24	Boc Edwards Technologies Ltd	真空ポンプ
JP3974772B2 (ja)	2001-11-16	2007-09-12	Ｂｏｃエドワーズ株式会社	真空ポンプ
DE102005040648A1 (de) *	2005-08-27	2007-03-01	Leybold Vacuum Gmbh	Beschichtete Gegenstände
JP5718907B2 (ja) *	2009-05-20	2015-05-13	エドワーズリミテッド	軸方向力均衡手段を有する再生式真空ポンプ
GB2498816A (en) *	2012-01-27	2013-07-31	Edwards Ltd	Vacuum pump
DE102013207059A1 (de)	2013-04-18	2014-10-23	Agilent Technologies, Inc. - A Delaware Corporation -	Turbomolekularpumpe mit Stator- und/oder Rotorelementen mit Metalloxid-Oberfläche mit hohem Strahlungsvermögen
JP6124688B2 (ja) *	2013-05-31	2017-05-10	株式会社荏原製作所	モータ、ポンプ
DE102014203172A1 (de)	2014-02-21	2015-08-27	Oerlikon Leybold Vacuum Gmbh	Beschichtete CFK Oberflächen von Turbomolekularpumpen
GB2557679A (en) *	2016-12-15	2018-06-27	Edwards Ltd	Stator blade unit for a turbomolecular pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6054112B2 (ja) *	1982-02-03	1985-11-28	工業技術院長	滴状凝縮面の形成方法
JPS5941699A (ja) *	1982-08-31	1984-03-07	Shimadzu Corp	改良されたタ−ボ式真空ポンプ
DE3613344A1 (de) *	1986-04-19	1987-10-22	Pfeiffer Vakuumtechnik	Turbomolekular-vakuumpumpe fuer hoeheren druck
US5154978A (en) *	1989-03-22	1992-10-13	Tdk Corporation	Highly corrosion-resistant rare-earth-iron magnets
DE4239391C2 (de) *	1991-11-27	1996-11-21	Electro Chem Eng Gmbh	Gegenstände aus Aluminium, Magnesium oder Titan mit einer mit Fluorpolymeren gefüllten Oxidkeramikschicht und Verfahren zu ihrer Herstellung
JP2527398B2 (ja) *	1992-06-05	1996-08-21	財団法人真空科学研究所	タ―ボ分子ポンプ
US5395221A (en) *	1993-03-18	1995-03-07	Praxair S.T. Technology, Inc.	Carbide or boride coated rotor for a positive displacement motor or pump
DE4410656A1 (de) *	1994-03-26	1995-09-28	Balzers Pfeiffer Gmbh	Reibungspumpe
JP3430686B2 (ja) *	1994-12-15	2003-07-28	住友特殊金属株式会社	高耐食性ボンド磁石用コンパウンド及びボンド磁石とそれらの製造方法

1996
- 1996-04-05 IT IT96TO000265A patent/IT1296155B1/it active IP Right Grant
- 1996-09-05 EP EP96202468A patent/EP0799999B1/en not_active Expired - Lifetime
1997
- 1997-04-18 US US08/844,505 patent/US5904469A/en not_active Expired - Fee Related
- 1997-04-23 JP JP9118649A patent/JPH10299687A/ja active Pending

Also Published As

Publication number	Publication date
EP0799999B1 (en)	2003-01-22
EP0799999A3 (en)	1998-04-22
US5904469A (en)	1999-05-18
ITTO960265A0 (it)	1996-04-05
JPH10299687A (ja)	1998-11-10
EP0799999A2 (en)	1997-10-08
ITTO960265A1 (it)	1997-10-05

Publication	Publication Date	Title
DE19781894T1 (de)	1999-09-02	Selbstansaugende Kreiselpumpe
DE59712162D1 (de)	2005-02-17	Zentrifugalpumpe
EE9800324A (et)	1999-08-16	Pumbarootor
DE69928866D1 (de)	2006-01-19	Turbomolekularpumpe
DE69827553D1 (de)	2004-12-23	Turbomolekularpumpe
IT1281025B1 (it)	1998-02-11	Pompa turbomolecolare.
IT9067113A0 (it)	1990-02-16	Statore per pompa turbomolecolare.
DK1073847T3 (da)	2003-07-14	Halvaksial centrifugalpumpe
IT1293407B1 (it)	1999-03-01	Pompa
EE9800325A (et)	1999-08-16	Pumbarootor
IT1275286B (it)	1997-08-05	Pompa centrifuga
ID27608A (id)	2001-04-12	Rakitan pompa atau motor
IT1296155B1 (it)	1999-06-09	Rotore di pompa turbomolecolare
DE69822730D1 (de)	2004-05-06	Turbomolekularpumpe
DE69734030D1 (de)	2005-09-22	Saugrotor
ITMI991726A0 (it)	1999-08-02	Pompa sottovuoto
DK0803258T3 (da)	2003-03-03	Udsugningspumpe
DE69508163D1 (de)	1999-04-15	Turbomolekular-Vakuumpumpe
DE69823933D1 (de)	2004-06-24	Turbomolekularpumpe
FR2776029B1 (fr)	2000-06-23	Pompe turbomoleculaire
DE69823932D1 (de)	2004-06-24	Turbomolekularpumpe
DE69726630D1 (de)	2004-01-22	Vakuumpumpen
DE59712067D1 (de)	2004-12-09	Vakuumpumpe
ITPR960017A1 (it)	1997-10-06	Pompa epitrocoidale
DE59812247D1 (de)	2004-12-16	Mehrstufige Zentrifugalpumpe

Legal Events

Date	Code	Title	Description
1999-06-09	0001	Granted