IT1281025B1 - Pompa turbomolecolare. - Google Patents

Pompa turbomolecolare.

Info

Publication number: IT1281025B1
Authority: IT; Italy
Prior art keywords: turbomolecular pump; turbomolecular; pump
Prior art date: 1995-11-10

Application number

IT95TO000911A

Other languages

English (en)

Inventor

Roberto Cerruti

Giampaolo Levi

Original Assignee

Varian Spa

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-11-10

Filing date

1995-11-10

Publication date

1998-02-11

1995-11-10 Application filed by Varian Spa filed Critical Varian Spa

1995-11-10 Priority to IT95TO000911A priority Critical patent/IT1281025B1/it

1995-11-10 Publication of ITTO950911A0 publication Critical patent/ITTO950911A0/it

1996-01-24 Priority to DE0773367T priority patent/DE773367T1/de

1996-01-24 Priority to DE69600306T priority patent/DE69600306T2/de

1996-01-24 Priority to EP96200164A priority patent/EP0773367B1/en

1996-11-08 Priority to US08/748,526 priority patent/US5688106A/en

1996-11-11 Priority to JP8312612A priority patent/JPH09170589A/ja

1997-05-10 Publication of ITTO950911A1 publication Critical patent/ITTO950911A1/it

1998-02-11 Application granted granted Critical

1998-02-11 Publication of IT1281025B1 publication Critical patent/IT1281025B1/it

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

IT95TO000911A 1995-11-10 1995-11-10 Pompa turbomolecolare. IT1281025B1 (it)

Priority Applications (6)

Application Number	Priority Date	Filing Date	Title
IT95TO000911A IT1281025B1 (it)	1995-11-10	1995-11-10	Pompa turbomolecolare.
DE0773367T DE773367T1 (de)	1995-11-10	1996-01-24	Turbomolekularpumpe
DE69600306T DE69600306T2 (de)	1995-11-10	1996-01-24	Turbomolekularpumpe
EP96200164A EP0773367B1 (en)	1995-11-10	1996-01-24	Turbo-molecular pump
US08/748,526 US5688106A (en)	1995-11-10	1996-11-08	Turbomolecular pump
JP8312612A JPH09170589A (ja)	1995-11-10	1996-11-11	ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
IT95TO000911A IT1281025B1 (it)	1995-11-10	1995-11-10	Pompa turbomolecolare.

Publications (3)

Publication Number	Publication Date
ITTO950911A0 ITTO950911A0 (it)	1995-11-10
ITTO950911A1 ITTO950911A1 (it)	1997-05-10
IT1281025B1 true IT1281025B1 (it)	1998-02-11

Family

ID=11413956

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT95TO000911A IT1281025B1 (it)	1995-11-10	1995-11-10	Pompa turbomolecolare.

Country Status (5)

Country	Link
US (1)	US5688106A (it)
EP (1)	EP0773367B1 (it)
JP (1)	JPH09170589A (it)
DE (2)	DE69600306T2 (it)
IT (1)	IT1281025B1 (it)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB9609281D0 (en) *	1996-05-03	1996-07-10	Boc Group Plc	Improved vacuum pumps
JP3079367B2 (ja) *	1997-10-03	2000-08-21	セイコー精機株式会社	ターボ分子ポンプ
TW504548B (en) *	1998-06-30	2002-10-01	Ebara Corp	Turbo molecular pump
FR2783883B1 (fr) *	1998-09-10	2000-11-10	Cit Alcatel	Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP2000183037A (ja)	1998-12-11	2000-06-30	Tokyo Electron Ltd	真空処理装置
US6328527B1 (en) *	1999-01-08	2001-12-11	Fantom Technologies Inc.	Prandtl layer turbine
JP3788558B2 (ja) *	1999-03-23	2006-06-21	株式会社荏原製作所	ターボ分子ポンプ
JP4104098B2 (ja) *	1999-03-31	2008-06-18	エドワーズ株式会社	真空ポンプ
US6412173B1 (en)	1999-07-26	2002-07-02	Phoenix Analysis And Design Technologies, Inc.	Miniature turbomolecular pump
GB9921983D0 (en) *	1999-09-16	1999-11-17	Boc Group Plc	Improvements in vacuum pumps
US6508631B1 (en)	1999-11-18	2003-01-21	Mks Instruments, Inc.	Radial flow turbomolecular vacuum pump
JP3777498B2 (ja) *	2000-06-23	2006-05-24	株式会社荏原製作所	ターボ分子ポンプ
DE602004025916D1 (de) *	2004-07-20	2010-04-22	Varian Spa	Rotationsvakuumpumpe und ihr Auswuchtverfahren
US20080056886A1 (en) *	2006-08-31	2008-03-06	Varian, S.P.A.	Vacuum pumps with improved pumping channel cross sections
GB0618745D0 (en) *	2006-09-22	2006-11-01	Boc Group Plc	Molecular drag pumping mechanism
EP2096317B1 (en)	2008-02-27	2012-08-15	Agilent Technologies, Inc.	Method for manufacturing the rotor assembly of a rotating vacuum pump
US8152442B2 (en) *	2008-12-24	2012-04-10	Agilent Technologies, Inc.	Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) *	2008-12-24	2011-12-06	Agilent Technologies, Inc.	Spiral pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en)	2012-01-27	2013-07-31	Edwards Ltd	Vacuum pump
EP2757265B1 (en) *	2013-01-22	2016-05-18	Agilent Technologies, Inc.	Spiral pumping stage and vacuum pump incorporating such pumping stage.
DE102013213815A1 (de) *	2013-07-15	2015-01-15	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE102013220879A1 (de) *	2013-10-15	2015-04-16	Pfeiffer Vacuum Gmbh	Vakuumpumpe
IT201700075054A1 (it) *	2017-07-04	2017-10-04	Agilent Tech Inc A Delaware Corporation	Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare
CN109441875A (zh) *	2018-12-25	2019-03-08	大连金刚科技有限责任公司	叶轮及气体泵

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3969039A (en) *	1974-08-01	1976-07-13	American Optical Corporation	Vacuum pump
JPS60139098U (ja) *	1984-02-24	1985-09-13	セイコ−精機株式会社	組合せ型軸流分子ポンプ
US4732529A (en) *	1984-02-29	1988-03-22	Shimadzu Corporation	Turbomolecular pump
JPS63255596A (ja) *	1987-04-13	1988-10-21	Ebara Corp	タ−ボ分子ポンプ
EP0408791B1 (de) *	1989-07-20	1994-03-16	Leybold Aktiengesellschaft	Reibungspumpe mit glockenförmigem Rotor
US5238362A (en) *	1990-03-09	1993-08-24	Varian Associates, Inc.	Turbomolecular pump
US5358373A (en) *	1992-04-29	1994-10-25	Varian Associates, Inc.	High performance turbomolecular vacuum pumps
DE4314418A1 (de) *	1993-05-03	1994-11-10	Leybold Ag	Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE4410656A1 (de) *	1994-03-26	1995-09-28	Balzers Pfeiffer Gmbh	Reibungspumpe

1995
- 1995-11-10 IT IT95TO000911A patent/IT1281025B1/it active IP Right Grant
1996
- 1996-01-24 DE DE69600306T patent/DE69600306T2/de not_active Expired - Lifetime
- 1996-01-24 DE DE0773367T patent/DE773367T1/de active Pending
- 1996-01-24 EP EP96200164A patent/EP0773367B1/en not_active Expired - Lifetime
- 1996-11-08 US US08/748,526 patent/US5688106A/en not_active Expired - Fee Related
- 1996-11-11 JP JP8312612A patent/JPH09170589A/ja active Pending

Also Published As

Publication number	Publication date
DE69600306T2 (de)	1998-09-10
ITTO950911A1 (it)	1997-05-10
DE773367T1 (de)	1997-09-11
EP0773367A1 (en)	1997-05-14
EP0773367B1 (en)	1998-05-20
JPH09170589A (ja)	1997-06-30
ITTO950911A0 (it)	1995-11-10
DE69600306D1 (de)	1998-06-25
US5688106A (en)	1997-11-18

Publication	Publication Date	Title
IT1281025B1 (it)	1998-02-11	Pompa turbomolecolare.
DE69616336D1 (de)	2001-11-29	Peristaltikpumpe
DE69109398D1 (de)	1995-06-08	Turbomolekularpumpe.
NL1003571A1 (nl)	1997-01-14	Pompstelsel.
DE69625401D1 (de)	2003-01-30	Vakuumpumpe
DE69609666D1 (de)	2000-09-14	Kreiselpumpe
IT9067113A0 (it)	1990-02-16	Statore per pompa turbomolecolare.
DE19681677T1 (de)	1998-10-29	Kreiselpumpe
DE69519570D1 (de)	2001-01-11	Doppel-laufradpumpe
IT9067163A0 (it)	1990-03-09	Pompa turbomolecolare perfezionata.
IT1293407B1 (it)	1999-03-01	Pompa
FR2735535B1 (fr)	1997-07-11	Pompe turbomoleculaire
DE59300398D1 (de)	1995-08-31	Schlauchpumpe.
DE69610352D1 (de)	2000-10-26	Mehrstufige Verdrängungsvakuumpumpe
DE69409555D1 (de)	1998-05-20	Turbomolekularpumpe
DE59508322D1 (de)	2000-06-15	Pumpenlaufrad
IT1313281B1 (it)	2002-07-17	Pompa sottovuoto.
DE69508163D1 (de)	1999-04-15	Turbomolekular-Vakuumpumpe
DE59708643D1 (de)	2002-12-12	Absaugpumpe
IT1283456B1 (it)	1998-04-21	Pompa del combustibile
FR2736103B1 (fr)	1997-08-08	Pompe turbomoleculaire
IT1297347B1 (it)	1999-09-01	Pompa da vuoto.
ITPR960017A1 (it)	1997-10-06	Pompa epitrocoidale
DE59608719D1 (de)	2002-03-21	Vakuumpumpe
DE59604148D1 (de)	2000-02-17	Kreiselpumpe

Legal Events

Date	Code	Title	Description
1998-02-11	0001	Granted