IT1175541B - Procedimento per la connessione a terra di dispositivi planari e circuiti integrati e prodotti cosi' ottenuti - Google Patents
Procedimento per la connessione a terra di dispositivi planari e circuiti integrati e prodotti cosi' ottenutiInfo
- Publication number
- IT1175541B IT1175541B IT21553/84A IT2155384A IT1175541B IT 1175541 B IT1175541 B IT 1175541B IT 21553/84 A IT21553/84 A IT 21553/84A IT 2155384 A IT2155384 A IT 2155384A IT 1175541 B IT1175541 B IT 1175541B
- Authority
- IT
- Italy
- Prior art keywords
- integrated circuits
- contacts
- procedure
- products
- earth connection
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 2
- 229910000510 noble metal Inorganic materials 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/746—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts for AIII-BV integrated circuits
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT21553/84A IT1175541B (it) | 1984-06-22 | 1984-06-22 | Procedimento per la connessione a terra di dispositivi planari e circuiti integrati e prodotti cosi' ottenuti |
US06/742,520 US4700467A (en) | 1984-06-22 | 1985-06-07 | Process for grounding flat devices and integrated circuits |
GB08515479A GB2161650B (en) | 1984-06-22 | 1985-06-19 | Process for providing electrical connections to and packaging of planar semiconductor devices and integrated circuits, and products so obtained |
FR858509392A FR2566581B1 (fr) | 1984-06-22 | 1985-06-20 | Procede de mise a la masse de dispositifs semi-conducteurs plans et de circuits integres, et produits ainsi obtenus |
DE3522168A DE3522168C2 (de) | 1984-06-22 | 1985-06-21 | Verfahren zum Masseverbinden von planaren Bauelementen und integrierten Schaltkreisen |
JP60134413A JPS61111582A (ja) | 1984-06-22 | 1985-06-21 | 平面デバイスと集積回路の接地工程及び得られた製品 |
ES544404A ES8609818A1 (es) | 1984-06-22 | 1985-06-21 | Procedimiento para la conexion a tierra de dispositivos de un solo plano y de circuitos integrados. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT21553/84A IT1175541B (it) | 1984-06-22 | 1984-06-22 | Procedimento per la connessione a terra di dispositivi planari e circuiti integrati e prodotti cosi' ottenuti |
Publications (3)
Publication Number | Publication Date |
---|---|
IT8421553A0 IT8421553A0 (it) | 1984-06-22 |
IT8421553A1 IT8421553A1 (it) | 1985-12-22 |
IT1175541B true IT1175541B (it) | 1987-07-01 |
Family
ID=11183509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT21553/84A IT1175541B (it) | 1984-06-22 | 1984-06-22 | Procedimento per la connessione a terra di dispositivi planari e circuiti integrati e prodotti cosi' ottenuti |
Country Status (7)
Country | Link |
---|---|
US (1) | US4700467A (it) |
JP (1) | JPS61111582A (it) |
DE (1) | DE3522168C2 (it) |
ES (1) | ES8609818A1 (it) |
FR (1) | FR2566581B1 (it) |
GB (1) | GB2161650B (it) |
IT (1) | IT1175541B (it) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2684801B1 (fr) * | 1991-12-06 | 1997-01-24 | Picogiga Sa | Procede de realisation de composants semiconducteurs, notamment sur gaas ou inp, avec recuperation du substrat par voie chimique. |
US5268065A (en) * | 1992-12-21 | 1993-12-07 | Motorola, Inc. | Method for thinning a semiconductor wafer |
JP3287279B2 (ja) | 1997-09-25 | 2002-06-04 | 日本電気株式会社 | 半導体チップ、および該半導体チップが実装された半導体装置 |
US6777312B2 (en) * | 2000-11-02 | 2004-08-17 | California Institute Of Technology | Wafer-level transfer of membranes in semiconductor processing |
US7268081B2 (en) * | 2000-11-02 | 2007-09-11 | California Institute Of Technology | Wafer-level transfer of membranes with gas-phase etching and wet etching methods |
KR100407472B1 (ko) * | 2001-06-29 | 2003-11-28 | 삼성전자주식회사 | 트렌치가 형성된 상부 칩을 구비하는 칩 적층형 패키지소자 및 그 제조 방법 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1933731C3 (de) * | 1968-07-05 | 1982-03-25 | Honeywell Information Systems Italia S.p.A., Caluso, Torino | Verfahren zum Herstellen einer integrierten Halbleiterschaltung |
US3771219A (en) * | 1970-02-05 | 1973-11-13 | Sharp Kk | Method for manufacturing semiconductor device |
GB1602498A (en) * | 1978-05-31 | 1981-11-11 | Secr Defence | Fet devices and their fabrication |
GB1601059A (en) * | 1978-05-31 | 1981-10-21 | Secr Defence | Fet devices and their fabrication |
JPS55545A (en) * | 1979-02-13 | 1980-01-05 | Canon Inc | Production of electrophotographic photoreceptor |
IT8048031A0 (it) * | 1979-04-09 | 1980-02-28 | Raytheon Co | Perfezionamento nei dispositivi a semiconduttore ad effetto di campo |
JPS5749252A (en) * | 1980-09-09 | 1982-03-23 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS5817626A (ja) * | 1981-07-13 | 1983-02-01 | フエアチアイルド・カメラ・アンド・インストルメント・コ−ポレ−シヨン | 低温度ダイ取り付け方法 |
-
1984
- 1984-06-22 IT IT21553/84A patent/IT1175541B/it active
-
1985
- 1985-06-07 US US06/742,520 patent/US4700467A/en not_active Expired - Fee Related
- 1985-06-19 GB GB08515479A patent/GB2161650B/en not_active Expired
- 1985-06-20 FR FR858509392A patent/FR2566581B1/fr not_active Expired
- 1985-06-21 ES ES544404A patent/ES8609818A1/es not_active Expired
- 1985-06-21 JP JP60134413A patent/JPS61111582A/ja active Pending
- 1985-06-21 DE DE3522168A patent/DE3522168C2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2566581A1 (fr) | 1985-12-27 |
GB8515479D0 (en) | 1985-07-24 |
ES8609818A1 (es) | 1986-09-01 |
GB2161650B (en) | 1988-07-13 |
DE3522168C2 (de) | 1994-05-11 |
DE3522168A1 (de) | 1986-01-16 |
US4700467A (en) | 1987-10-20 |
GB2161650A (en) | 1986-01-15 |
FR2566581B1 (fr) | 1989-12-29 |
IT8421553A0 (it) | 1984-06-22 |
IT8421553A1 (it) | 1985-12-22 |
JPS61111582A (ja) | 1986-05-29 |
ES544404A0 (es) | 1986-09-01 |
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