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IT1109832B - Apparecchiatura interferometrica per la misura della velocita'di attacco di superfici opache - Google Patents

Apparecchiatura interferometrica per la misura della velocita'di attacco di superfici opache

Info

Publication number
IT1109832B
IT1109832B IT23826/78A IT2382678A IT1109832B IT 1109832 B IT1109832 B IT 1109832B IT 23826/78 A IT23826/78 A IT 23826/78A IT 2382678 A IT2382678 A IT 2382678A IT 1109832 B IT1109832 B IT 1109832B
Authority
IT
Italy
Prior art keywords
attachment
measuring
speed
opaque surfaces
interferometric
Prior art date
Application number
IT23826/78A
Other languages
English (en)
Other versions
IT7823826A0 (it
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT7823826A0 publication Critical patent/IT7823826A0/it
Application granted granted Critical
Publication of IT1109832B publication Critical patent/IT1109832B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Ecology (AREA)
  • Biochemistry (AREA)
  • Environmental Sciences (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Drying Of Semiconductors (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
IT23826/78A 1977-06-30 1978-05-26 Apparecchiatura interferometrica per la misura della velocita'di attacco di superfici opache IT1109832B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/811,741 US4147435A (en) 1977-06-30 1977-06-30 Interferometric process and apparatus for the measurement of the etch rate of opaque surfaces

Publications (2)

Publication Number Publication Date
IT7823826A0 IT7823826A0 (it) 1978-05-26
IT1109832B true IT1109832B (it) 1985-12-23

Family

ID=25207435

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23826/78A IT1109832B (it) 1977-06-30 1978-05-26 Apparecchiatura interferometrica per la misura della velocita'di attacco di superfici opache

Country Status (6)

Country Link
US (1) US4147435A (it)
JP (1) JPS5845643B2 (it)
DE (1) DE2828507C2 (it)
FR (1) FR2396286A1 (it)
GB (1) GB1570872A (it)
IT (1) IT1109832B (it)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2758149C2 (de) * 1977-12-27 1979-10-04 Ibm Deutschland Gmbh, 7000 Stuttgart Interferometrisches Verfahren mit λ /4-Auflösung zur Abstands-, Dicken- und/oder Ebenheitsmessung
US4260259A (en) * 1978-12-29 1981-04-07 International Business Machines Corporation Metal etch rate analyzer
DE3034175A1 (de) * 1980-09-11 1982-04-15 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung chemisch abscheidbarer, elektrisch leitfaehiger schichten
US4367044A (en) * 1980-12-31 1983-01-04 International Business Machines Corp. Situ rate and depth monitor for silicon etching
US4377343A (en) * 1981-07-10 1983-03-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Dual-beam skin friction interferometer
JPS58131557A (ja) * 1982-01-12 1983-08-05 Nippon Steel Corp 超音波の非接触測定法
US4462860A (en) * 1982-05-24 1984-07-31 At&T Bell Laboratories End point detection
US4593368A (en) * 1984-06-04 1986-06-03 Kollmorgen Technologies Corporation Technique for measuring very small spacings
DE3600346A1 (de) * 1986-01-08 1987-07-09 Fraunhofer Ges Forschung Verfahren zur abbildenden laserinterferometrie und laserinterferometer zur durchfuehrung des verfahrens
US5220405A (en) * 1991-12-20 1993-06-15 International Business Machines Corporation Interferometer for in situ measurement of thin film thickness changes
US5461007A (en) * 1994-06-02 1995-10-24 Motorola, Inc. Process for polishing and analyzing a layer over a patterned semiconductor substrate
US6535779B1 (en) 1998-03-06 2003-03-18 Applied Materials, Inc. Apparatus and method for endpoint control and plasma monitoring
US6081334A (en) 1998-04-17 2000-06-27 Applied Materials, Inc Endpoint detection for semiconductor processes
EP1125314A1 (en) 1998-07-10 2001-08-22 Applied Materials, Inc. Improved endpoint detection for substrate fabrication processes
US6449038B1 (en) 1999-12-13 2002-09-10 Applied Materials, Inc. Detecting a process endpoint from a change in reflectivity
US6824813B1 (en) 2000-04-06 2004-11-30 Applied Materials Inc Substrate monitoring method and apparatus
US7349090B2 (en) 2000-09-20 2008-03-25 Kla-Tencor Technologies Corp. Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography
US6946394B2 (en) 2000-09-20 2005-09-20 Kla-Tencor Technologies Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process
US6891627B1 (en) 2000-09-20 2005-05-10 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension and overlay of a specimen
US6593238B1 (en) 2000-11-27 2003-07-15 Motorola, Inc. Method for determining an endpoint and semiconductor wafer
US7399711B2 (en) * 2002-08-13 2008-07-15 Lam Research Corporation Method for controlling a recess etch process
US7019844B2 (en) * 2002-08-13 2006-03-28 Lam Research Corporation Method for in-situ monitoring of patterned substrate processing using reflectometry.
US6979578B2 (en) 2002-08-13 2005-12-27 Lam Research Corporation Process endpoint detection method using broadband reflectometry
TWI303090B (en) * 2002-08-13 2008-11-11 Lam Res Corp Method for in-situ monitoring of patterned substrate processing using reflectometry
US6905624B2 (en) * 2003-07-07 2005-06-14 Applied Materials, Inc. Interferometric endpoint detection in a substrate etching process
JP4939304B2 (ja) * 2007-05-24 2012-05-23 東レエンジニアリング株式会社 透明膜の膜厚測定方法およびその装置
US9059038B2 (en) 2012-07-18 2015-06-16 Tokyo Electron Limited System for in-situ film stack measurement during etching and etch control method
CN104736744B (zh) 2012-10-17 2017-06-06 东京毅力科创株式会社 使用多变量分析的等离子体蚀刻终点检测
KR20180073700A (ko) 2015-11-16 2018-07-02 도쿄엘렉트론가부시키가이샤 진보된 광학 센서 및 플라즈마 챔버용 방법
SG11201808603VA (en) 2016-03-31 2018-10-30 Tokyo Electron Ltd Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
US10453653B2 (en) 2016-09-02 2019-10-22 Tokyo Electron Limited Endpoint detection algorithm for atomic layer etching (ALE)
US10436717B2 (en) 2016-11-18 2019-10-08 Tokyo Electron Limited Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process
US10446453B2 (en) 2017-03-17 2019-10-15 Tokyo Electron Limited Surface modification control for etch metric enhancement
US10978278B2 (en) 2018-07-31 2021-04-13 Tokyo Electron Limited Normal-incident in-situ process monitor sensor
JP2022533246A (ja) 2019-05-23 2022-07-21 東京エレクトロン株式会社 ハイパースペクトルイメージングを使用する半導体プロセスの光学的診断
US10910201B1 (en) 2019-08-22 2021-02-02 Tokyo Electron Limited Synthetic wavelengths for endpoint detection in plasma etching
US12158374B2 (en) 2022-10-25 2024-12-03 Tokyo Electron Limited Time-resolved OES data collection

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH269550A (de) * 1948-05-31 1950-07-15 Staub Hans Dr Prof Verfahren und Vorrichtung zur Bestimmung des örtlichen Verlaufes des Brechungsindexes eines in einer Zelle befindlichen Mediums.
US3612692A (en) * 1968-11-21 1971-10-12 Ibm Dielectric film thickness monitoring and control system and method
FR2076237A5 (it) * 1970-01-07 1971-10-15 Thomson Csf
FR2198636A5 (it) * 1972-09-06 1974-03-29 France Etat
US3788746A (en) * 1972-10-02 1974-01-29 Hewlett Packard Co Optical dilatometer

Also Published As

Publication number Publication date
DE2828507A1 (de) 1979-01-11
FR2396286B1 (it) 1981-11-20
FR2396286A1 (fr) 1979-01-26
JPS5413365A (en) 1979-01-31
IT7823826A0 (it) 1978-05-26
JPS5845643B2 (ja) 1983-10-12
GB1570872A (en) 1980-07-09
US4147435A (en) 1979-04-03
DE2828507C2 (de) 1986-05-07

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