[go: up one dir, main page]

IT1119514B - Dispositivo interferometrico per la misurazione di distanze e di variazioni di distanza - Google Patents

Dispositivo interferometrico per la misurazione di distanze e di variazioni di distanza

Info

Publication number
IT1119514B
IT1119514B IT69294/79A IT6929479A IT1119514B IT 1119514 B IT1119514 B IT 1119514B IT 69294/79 A IT69294/79 A IT 69294/79A IT 6929479 A IT6929479 A IT 6929479A IT 1119514 B IT1119514 B IT 1119514B
Authority
IT
Italy
Prior art keywords
distances
variations
measurement
distance
interferometric device
Prior art date
Application number
IT69294/79A
Other languages
English (en)
Other versions
IT7969294A0 (it
Inventor
Werner Krieg
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Publication of IT7969294A0 publication Critical patent/IT7969294A0/it
Application granted granted Critical
Publication of IT1119514B publication Critical patent/IT1119514B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02045—Interferometers characterised by particular imaging or detection techniques using the Doppler effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)
IT69294/79A 1978-11-27 1979-11-27 Dispositivo interferometrico per la misurazione di distanze e di variazioni di distanza IT1119514B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD20932678A DD139760B1 (de) 1978-11-27 1978-11-27 Interferometrische einrichtung zum messen von abstaenden und abstandsaenderungen

Publications (2)

Publication Number Publication Date
IT7969294A0 IT7969294A0 (it) 1979-11-27
IT1119514B true IT1119514B (it) 1986-03-10

Family

ID=5515499

Family Applications (1)

Application Number Title Priority Date Filing Date
IT69294/79A IT1119514B (it) 1978-11-27 1979-11-27 Dispositivo interferometrico per la misurazione di distanze e di variazioni di distanza

Country Status (4)

Country Link
DD (1) DD139760B1 (it)
DE (1) DE2938079A1 (it)
IT (1) IT1119514B (it)
SU (1) SU1037063A1 (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8005258A (nl) * 1980-09-22 1982-04-16 Philips Nv Interferometer.
AT399222B (de) * 1992-10-19 1995-04-25 Tabarelli Werner Interferometrische einrichtung zur messung der lage eines reflektierenden objektes
DE102016013550B3 (de) 2016-11-08 2018-04-19 Rolf Klöden Profilmesssystem für eine Rauheits- und Konturmessung an einer Oberfläche eines Werkstücks

Also Published As

Publication number Publication date
SU1037063A1 (ru) 1983-08-23
DD139760B1 (de) 1980-12-10
DE2938079A1 (de) 1980-06-04
DD139760A1 (de) 1980-01-16
IT7969294A0 (it) 1979-11-27

Similar Documents

Publication Publication Date Title
IT7968814A0 (it) Dispositivo misuratore ottico per la misura di grandezze fisiche
IT7927150A0 (it) Apparecchiatura di misurazione interferometrica.
IT1123147B (it) Dispositivo di misurazione
IT7869669A0 (it) Dispositivo ottico per la misura di grandezze fisiche
IT1118707B (it) Dispositivo ottico di misura
IT1111703B (it) Dispositivo di precisione per la misura di oggetti cilindrici
AT382965B (de) Laengenmesseinrichtung
IT1095140B (it) Dispositivo per la misurazione di distanze o di spessori senza contatto con l'oggetto
IT1124190B (it) Dispositivo per misure lineari e goniometriche
AT382237B (de) Praezisions-laengenmesseinrichtung
IT1133499B (it) Dispositivo di misurazione
IT1083652B (it) Apparecchio di misura ad ultrasuoni
JPS54133370A (en) Distance measuring device of object
IT1120878B (it) Dispositivo per la esecuzione di misurazioni lineari in due dimensioni
IT1166064B (it) Dispositivo di misura
DK200479A (da) Ultralydmaaleanlaeg
IT1124174B (it) Dispositivo di misura per superfici interrotte
IT1119514B (it) Dispositivo interferometrico per la misurazione di distanze e di variazioni di distanza
IT7948960A0 (it) Dispositivo misuratore di frequenza
IT1110277B (it) Dispositivo per la misurazione elettromeccanica di distanze
IT1116765B (it) Tastatore di misura
SE7902183L (sv) Vermemengdsmetare
PL207999A1 (pl) Czujnik do pomiaru odksztalcen
IT1084768B (it) Dispositivo per la misura precisa di lunghezze
PL210070A1 (pl) Urzadzenie do pomiaru przemieszczania sie obiektow