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IT1020326B - SYSTEM AND EQUIPMENT TO CONTROL THE MOVEMENT OF A VEHICLE SUCH AS A BUNDLE OF ELECTRONS - Google Patents

SYSTEM AND EQUIPMENT TO CONTROL THE MOVEMENT OF A VEHICLE SUCH AS A BUNDLE OF ELECTRONS

Info

Publication number
IT1020326B
IT1020326B IT26771/74A IT2677174A IT1020326B IT 1020326 B IT1020326 B IT 1020326B IT 26771/74 A IT26771/74 A IT 26771/74A IT 2677174 A IT2677174 A IT 2677174A IT 1020326 B IT1020326 B IT 1020326B
Authority
IT
Italy
Prior art keywords
bundle
electrons
vehicle
movement
equipment
Prior art date
Application number
IT26771/74A
Other languages
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1020326B publication Critical patent/IT1020326B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
IT26771/74A 1973-09-19 1974-08-30 SYSTEM AND EQUIPMENT TO CONTROL THE MOVEMENT OF A VEHICLE SUCH AS A BUNDLE OF ELECTRONS IT1020326B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US398734A US3866013A (en) 1973-09-19 1973-09-19 Method and apparatus for controlling movable means such as an electron beam

Publications (1)

Publication Number Publication Date
IT1020326B true IT1020326B (en) 1977-12-20

Family

ID=23576583

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26771/74A IT1020326B (en) 1973-09-19 1974-08-30 SYSTEM AND EQUIPMENT TO CONTROL THE MOVEMENT OF A VEHICLE SUCH AS A BUNDLE OF ELECTRONS

Country Status (7)

Country Link
US (1) US3866013A (en)
JP (2) JPS5248061B2 (en)
CA (1) CA1013074A (en)
DE (1) DE2443625C2 (en)
FR (1) FR2244202B1 (en)
GB (1) GB1438737A (en)
IT (1) IT1020326B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2294489A1 (en) * 1974-12-13 1976-07-09 Thomson Csf DEVICE FOR THE PROGRAM TRACE OF DRAWINGS BY PARTICLE BOMBARDING
US4056730A (en) * 1976-07-12 1977-11-01 International Business Machines Corporation Apparatus for detecting registration marks on a target such as a semiconductor wafer
US4099062A (en) * 1976-12-27 1978-07-04 International Business Machines Corporation Electron beam lithography process
US4147937A (en) * 1977-11-01 1979-04-03 Fujitsu Limited Electron beam exposure system method and apparatus
JPS5511303A (en) * 1978-07-10 1980-01-26 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron-beam exposure device
JPS5521156A (en) * 1978-08-02 1980-02-15 Fujitsu Ltd Electronic beam exposing system
JPS5778814U (en) * 1980-10-31 1982-05-15
DE102014105452B3 (en) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Arrangement for deflecting an electron beam generated by means of an electron beam gun, method for generating a deflection signal and method for operating an electron beam gun
DE102014105451B3 (en) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Arrangement for deflecting an electron beam generated by means of an electron beam gun, method for generating a deflection signal and method for operating an electron beam gun

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam
US3789185A (en) * 1969-12-15 1974-01-29 Ibm Electron beam deflection control apparatus

Also Published As

Publication number Publication date
JPS5328749B2 (en) 1978-08-16
JPS5248061B2 (en) 1977-12-07
US3866013A (en) 1975-02-11
GB1438737A (en) 1976-06-09
FR2244202A1 (en) 1975-04-11
FR2244202B1 (en) 1976-10-22
CA1013074A (en) 1977-06-28
DE2443625A1 (en) 1975-03-20
JPS5058986A (en) 1975-05-22
DE2443625C2 (en) 1983-10-27
JPS5333584A (en) 1978-03-29

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