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GB1438737A - Method and apparatus for positioning movable means - Google Patents

Method and apparatus for positioning movable means

Info

Publication number
GB1438737A
GB1438737A GB3634674A GB3634674A GB1438737A GB 1438737 A GB1438737 A GB 1438737A GB 3634674 A GB3634674 A GB 3634674A GB 3634674 A GB3634674 A GB 3634674A GB 1438737 A GB1438737 A GB 1438737A
Authority
GB
United Kingdom
Prior art keywords
line
memory
exposure
predetermined position
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3634674A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1438737A publication Critical patent/GB1438737A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

1438737 Automatic control systems INTERNATIONAL BUSINESS MACHINES CORP 19 Aug 1974 [19 Sept 1973] 36346/74 Heading G3N A line by line scan is controlled by a memory and, at a predetermined position on a line, a function of the scan at that predetermined position and at the same position in the next line is determined, and the memory control for the next line updated if these functions differ. In the embodiment, an electron beam forms a desired pattern on a semi-conductor chip with line by line control of the beam exposure and position by a memory fed from a computer. The beam is moved to a predetermined position on a line and the desired exposure given. Then the memory is examined to determine the exposure and position offset required at the same predetermined position on the next line, and if a difference is found the memory is updated. The beam is then moved to the next desired position and the exposure/offset control (and updating if necessary) is repeated. Since.the memory updating is limited, faster writing of the pattern on the semi-conductor chip can be achieved. The apparatus is similar to that disclosed in Specification 1329559 and the digital exposure/offset control is described with reference to Figs. 2A and 2B (not shown).
GB3634674A 1973-09-19 1974-08-19 Method and apparatus for positioning movable means Expired GB1438737A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US398734A US3866013A (en) 1973-09-19 1973-09-19 Method and apparatus for controlling movable means such as an electron beam

Publications (1)

Publication Number Publication Date
GB1438737A true GB1438737A (en) 1976-06-09

Family

ID=23576583

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3634674A Expired GB1438737A (en) 1973-09-19 1974-08-19 Method and apparatus for positioning movable means

Country Status (7)

Country Link
US (1) US3866013A (en)
JP (2) JPS5248061B2 (en)
CA (1) CA1013074A (en)
DE (1) DE2443625C2 (en)
FR (1) FR2244202B1 (en)
GB (1) GB1438737A (en)
IT (1) IT1020326B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2294489A1 (en) * 1974-12-13 1976-07-09 Thomson Csf DEVICE FOR THE PROGRAM TRACE OF DRAWINGS BY PARTICLE BOMBARDING
US4056730A (en) * 1976-07-12 1977-11-01 International Business Machines Corporation Apparatus for detecting registration marks on a target such as a semiconductor wafer
US4099062A (en) * 1976-12-27 1978-07-04 International Business Machines Corporation Electron beam lithography process
US4147937A (en) * 1977-11-01 1979-04-03 Fujitsu Limited Electron beam exposure system method and apparatus
JPS5511303A (en) * 1978-07-10 1980-01-26 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron-beam exposure device
JPS5521156A (en) * 1978-08-02 1980-02-15 Fujitsu Ltd Electronic beam exposing system
JPS5778814U (en) * 1980-10-31 1982-05-15
DE102014105452B3 (en) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Arrangement for deflecting an electron beam generated by means of an electron beam gun, method for generating a deflection signal and method for operating an electron beam gun
DE102014105451B3 (en) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Arrangement for deflecting an electron beam generated by means of an electron beam gun, method for generating a deflection signal and method for operating an electron beam gun

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam
US3789185A (en) * 1969-12-15 1974-01-29 Ibm Electron beam deflection control apparatus

Also Published As

Publication number Publication date
JPS5328749B2 (en) 1978-08-16
JPS5248061B2 (en) 1977-12-07
US3866013A (en) 1975-02-11
FR2244202A1 (en) 1975-04-11
FR2244202B1 (en) 1976-10-22
CA1013074A (en) 1977-06-28
IT1020326B (en) 1977-12-20
DE2443625A1 (en) 1975-03-20
JPS5058986A (en) 1975-05-22
DE2443625C2 (en) 1983-10-27
JPS5333584A (en) 1978-03-29

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930819