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IN2013DN06279A - - Google Patents

Info

Publication number
IN2013DN06279A
IN2013DN06279A IN6279DEN2013A IN2013DN06279A IN 2013DN06279 A IN2013DN06279 A IN 2013DN06279A IN 6279DEN2013 A IN6279DEN2013 A IN 6279DEN2013A IN 2013DN06279 A IN2013DN06279 A IN 2013DN06279A
Authority
IN
India
Prior art keywords
evaporation crucible
metal
feeding
furnace
duct
Prior art date
Application number
Inventor
Pierre Banaszak
Didier Marneffe
Bruno Schmitz
Eric Silberberg
Luc Vanhee
Original Assignee
Arcelormittal Investigacion Y Desarrollo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arcelormittal Investigacion Y Desarrollo filed Critical Arcelormittal Investigacion Y Desarrollo
Publication of IN2013DN06279A publication Critical patent/IN2013DN06279A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54Apparatus specially adapted for continuous coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/246Replenishment of source material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)

Abstract

The present invention relates to a plant for the continuous vacuum deposition of a metal coating on a moving substrate including a vacuum deposition housing (24) at least one sonic vapor jet coating head (25, 26) connected to an evaporation crucible (9) for containing the coating metal in the form of a liquid (11) via a vapor feeding duct (20) provided with a dispensing valve (19) and a furnace (1) for melting said metal wherein said furnace (1) remains at atmospheric pressure while being arranged underneath the lowest portion of the evaporation crucible (9) and connected to the evaporation crucible (9) by at least one automatic feeding duct (8) of the evaporation crucible (9) provided with a feeding pump (6) and by at least one return duct (8A, 18) for the liquid metal which is optionally provided with a valve (16, 17) a means for adjusting the feeding pump (6) also being provided for adjusting a predetermined liquid metal level in the evaporation crucible (9) characterized in that the plant comprises in each of said feeding and return ducts (8A, 18) a so called thermal valve area (7, 13, 15) provided with a heating device and a cooling device in order to obtain a controlled temperature that is independent from that of the melting furnace (1) as well as from that of the remaining portion of said ducts (8; 8A, 18) and of the evaporation crucible (9) in order to melt or solidify the metal at this location.
IN6279DEN2013 2011-01-14 2012-01-12 IN2013DN06279A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP11151004 2011-01-14
PCT/EP2012/050432 WO2012095489A1 (en) 2011-01-14 2012-01-12 Automatic feeding device for an industrial metal-vapor generator

Publications (1)

Publication Number Publication Date
IN2013DN06279A true IN2013DN06279A (en) 2015-08-14

Family

ID=43711015

Family Applications (1)

Application Number Title Priority Date Filing Date
IN6279DEN2013 IN2013DN06279A (en) 2011-01-14 2012-01-12

Country Status (17)

Country Link
US (1) US10011905B2 (en)
EP (1) EP2663665B1 (en)
JP (1) JP6046051B2 (en)
KR (1) KR101786160B1 (en)
CN (1) CN103328680B (en)
AU (1) AU2012206581B2 (en)
BR (1) BR112013018030B1 (en)
CA (1) CA2824248C (en)
ES (1) ES2538661T3 (en)
HU (1) HUE026398T2 (en)
IN (1) IN2013DN06279A (en)
MX (1) MX342299B (en)
PL (1) PL2663665T3 (en)
RU (1) RU2584369C2 (en)
UA (1) UA111602C2 (en)
WO (1) WO2012095489A1 (en)
ZA (1) ZA201305032B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2206575B (en) 1987-07-09 1992-01-02 Glaverbel Spherulizing furnace and process of manufacturing vitreous beads
KR101461738B1 (en) 2012-12-21 2014-11-14 주식회사 포스코 Apparatus for heating materials and coatting system having the same
US9240584B1 (en) 2012-12-27 2016-01-19 Sakti3, Inc. Phase change material source for physical vapor deposition
US10131983B2 (en) * 2013-11-05 2018-11-20 Tata Steel Nederland Technology B.V. Method and apparatus for controlling the composition of liquid metal in an evaporator device
KR102357447B1 (en) * 2016-05-03 2022-01-28 타타 스틸 네덜란드 테크날러지 베.뷔. Device for supplying liquid metal to the evaporation device
WO2018020296A1 (en) 2016-07-27 2018-02-01 Arcelormittal Apparatus and method for vacuum deposition
EP3735996B1 (en) * 2019-05-07 2023-09-27 Free Life Medical GmbH Bi-directional perfusion cannula
CN112505286B (en) * 2019-09-16 2023-08-11 中国科学院上海光学精密机械研究所 A detection device and method for zinc-induced liquid metal crack formation conditions
CN113930738B (en) * 2020-06-29 2023-09-12 宝山钢铁股份有限公司 Metal vapor modulation device for vacuum coating and modulation method thereof
CN113957389B (en) * 2020-07-21 2023-08-11 宝山钢铁股份有限公司 Vacuum coating device with porous noise reduction and uniform distribution of metal vapor
US20220090256A1 (en) * 2020-09-18 2022-03-24 Applied Materials, Inc. Evaporation apparatus, vapor deposition apparatus, and evaporation method
CN114029001B (en) * 2021-12-03 2023-11-24 上海镁源动力科技有限公司 Device and method for automatically feeding liquid metal raw materials
EP4446459A1 (en) * 2023-04-11 2024-10-16 NEOVAC GmbH Evaporation crucible and evaporation unit

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1505064A2 (en) * 1987-08-04 1994-12-15 Специализированное конструкторско-технологическое бюро с опытным производством Института электроники им.У.А.Арифова Electric-arc evaporator
US5356673A (en) * 1991-03-18 1994-10-18 Jet Process Corporation Evaporation system and method for gas jet deposition of thin film materials
BE1010351A6 (en) 1996-06-13 1998-06-02 Centre Rech Metallurgique Method and device for coating continuous substrate in motion with a metal vapor.
JP3901773B2 (en) * 1996-11-26 2007-04-04 三菱重工業株式会社 Vacuum deposition equipment
LV13383B (en) * 2004-05-27 2006-02-20 Sidrabe As Method and device for vacuum vaporization metals or alloys
EP1972699A1 (en) * 2007-03-20 2008-09-24 ArcelorMittal France Method of coating a substrate under vacuum
EP2048261A1 (en) * 2007-10-12 2009-04-15 ArcelorMittal France Industrial steam generator for depositing an alloy coating on a metal band
EP2199425A1 (en) * 2008-12-18 2010-06-23 ArcelorMittal France Industrial steam generator for depositing any alloy coating on a metal band (II)

Also Published As

Publication number Publication date
CN103328680B (en) 2015-05-20
MX2013008174A (en) 2013-12-02
ES2538661T3 (en) 2015-06-23
US10011905B2 (en) 2018-07-03
ZA201305032B (en) 2014-07-30
CN103328680A (en) 2013-09-25
CA2824248A1 (en) 2012-07-19
KR101786160B1 (en) 2017-10-17
MX342299B (en) 2016-09-23
PL2663665T3 (en) 2015-08-31
AU2012206581B2 (en) 2017-03-30
RU2013137228A (en) 2015-02-20
KR20140041436A (en) 2014-04-04
JP6046051B2 (en) 2016-12-14
JP2014505794A (en) 2014-03-06
BR112013018030A2 (en) 2020-10-27
EP2663665A1 (en) 2013-11-20
RU2584369C2 (en) 2016-05-20
BR112013018030B1 (en) 2021-05-18
HUE026398T2 (en) 2016-06-28
CA2824248C (en) 2019-11-05
WO2012095489A1 (en) 2012-07-19
EP2663665B1 (en) 2015-03-11
UA111602C2 (en) 2016-05-25
US20140127406A1 (en) 2014-05-08

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