HUP9801148A3 - Thin film actuated mirror array having dielectric layers - Google Patents

Thin film actuated mirror array having dielectric layers

Info

Publication number: HUP9801148A3
Authority: HU; Hungary
Prior art keywords: thin film; dielectric layers; mirror array; actuated mirror; film actuated
Prior art date: 1996-01-31

Application number

HU9801148A

Other languages

English (en)

Original Assignee

Daewoo Electronics Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-01-31

Filing date

1996-04-08

Publication date

2002-07-29

1996-04-08 Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd

1998-08-28 Publication of HUP9801148A2 publication Critical patent/HUP9801148A2/hu

2002-07-29 Publication of HUP9801148A3 publication Critical patent/HUP9801148A3/hu

Classifications

- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Nonlinear Science (AREA)
Mechanical Light Control Or Optical Switches (AREA)
Optical Elements Other Than Lenses (AREA)
Transforming Electric Information Into Light Information (AREA)
Video Image Reproduction Devices For Color Tv Systems (AREA)
Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Liquid Crystal (AREA)
Projection Apparatus (AREA)

HU9801148A 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers HUP9801148A3 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
KR1019960002315A KR100229790B1 (ko)	1996-01-31	1996-01-31	유전층을 갖는 박막형광로 조절장치

Publications (2)

Publication Number	Publication Date
HUP9801148A2 HUP9801148A2 (hu)	1998-08-28
HUP9801148A3 true HUP9801148A3 (en)	2002-07-29

Family

ID=36955865

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
HU9801148A HUP9801148A3 (en)	1996-01-31	1996-04-08	Thin film actuated mirror array having dielectric layers

Country Status (14)

Country	Link
JP (1)	JP4152437B2 (hu)
KR (1)	KR100229790B1 (hu)
CN (1)	CN1104815C (hu)
AR (1)	AR001149A1 (hu)
AU (1)	AU724477B2 (hu)
BR (1)	BR9607803A (hu)
CA (1)	CA2216557A1 (hu)
CZ (1)	CZ304197A3 (hu)
HU (1)	HUP9801148A3 (hu)
PE (1)	PE47197A1 (hu)
PL (1)	PL179839B1 (hu)
TW (1)	TW348324B (hu)
UY (1)	UY24186A1 (hu)
WO (1)	WO1997028653A1 (hu)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4582380B2 (ja) *	2001-05-11	2010-11-17	ソニー株式会社	光変調素子とそれを用いた光学装置、および光変調素子の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5260798A (en) *	1989-11-01	1993-11-09	Aura Systems, Inc.	Pixel intensity modulator
US5247222A (en) *	1991-11-04	1993-09-21	Engle Craig D	Constrained shear mode modulator
BR9407923A (pt) *	1993-10-29	1996-11-26	Daewoo Electronics Co Ltd	Conjunto de M x N espelhos atuados de filme fino sistema de projeçao ótico e processo para fabricaçao de um conjunto de M x N espelhos atuados de filme fino
JP3165444B2 (ja) *	1993-11-09	2001-05-14	テーウーエレクトロニクスカンパニーリミテッド	Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法
US5355008A (en) *	1993-11-19	1994-10-11	Micrel, Inc.	Diamond shaped gate mesh for cellular MOS transistor array

1996
- 1996-01-04 TW TW085100044A patent/TW348324B/zh active
- 1996-01-31 KR KR1019960002315A patent/KR100229790B1/ko not_active Expired - Fee Related
- 1996-03-04 AR AR33563296A patent/AR001149A1/es unknown
- 1996-03-20 PE PE1996000192A patent/PE47197A1/es not_active Application Discontinuation
- 1996-03-22 UY UY24186A patent/UY24186A1/es not_active IP Right Cessation
- 1996-04-08 CA CA002216557A patent/CA2216557A1/en not_active Abandoned
- 1996-04-08 JP JP52750197A patent/JP4152437B2/ja not_active Expired - Fee Related
- 1996-04-08 BR BR9607803A patent/BR9607803A/pt not_active Application Discontinuation
- 1996-04-08 AU AU52899/96A patent/AU724477B2/en not_active Ceased
- 1996-04-08 PL PL96322490A patent/PL179839B1/pl unknown
- 1996-04-08 WO PCT/KR1996/000048 patent/WO1997028653A1/en not_active Application Discontinuation
- 1996-04-08 HU HU9801148A patent/HUP9801148A3/hu unknown
- 1996-04-08 CZ CZ973041A patent/CZ304197A3/cs unknown
- 1996-04-08 CN CN96192838A patent/CN1104815C/zh not_active Expired - Fee Related

Also Published As

Publication number	Publication date
PL322490A1 (en)	1998-02-02
AU724477B2 (en)	2000-09-21
PL179839B1 (pl)	2000-11-30
MX9707476A (es)	1997-11-29
PE47197A1 (es)	1998-02-06
KR970060514A (ko)	1997-08-12
TW348324B (en)	1998-12-21
CN1104815C (zh)	2003-04-02
BR9607803A (pt)	1998-07-07
HUP9801148A2 (hu)	1998-08-28
WO1997028653A1 (en)	1997-08-07
CN1179871A (zh)	1998-04-22
CZ304197A3 (cs)	1998-04-15
UY24186A1 (es)	1996-06-21
AR001149A1 (es)	1997-09-24
KR100229790B1 (ko)	1999-11-15
JPH11503538A (ja)	1999-03-26
AU5289996A (en)	1997-08-22
JP4152437B2 (ja)	2008-09-17
CA2216557A1 (en)	1997-08-07

Publication	Publication Date	Title
EP0749590A4 (en)	1998-07-29	THIN-LAYER CONTROLLED MIRROR ARRAY
AU698972C (en)	2002-02-07	Multilayer film
AU2316097A (en)	1997-09-22	Multilayer polyester film
AU4524296A (en)	1996-07-10	Multilayered optical film
AU9670398A (en)	1999-04-12	Ordered mesoporous thin films
AU3778897A (en)	1998-03-06	Polyester film
AU7572494A (en)	1995-06-08	Porous film manufacturing apparatus
AU1077097A (en)	1997-06-05	Multilayer hydrodisintegratable film
AU1213897A (en)	1997-07-28	Optical memory element
AU7419296A (en)	1997-06-12	Laminated film
AU6167796A (en)	1996-12-30	Debossable films
IL127454A0 (en)	1999-10-28	Multilayer film
AU7371898A (en)	1998-11-27	Low density film for low dielectric constant applications
AU6709194A (en)	1994-11-08	Multilayer film structure
AU2203097A (en)	1997-10-01	Metallized film structure
AU6301198A (en)	1998-09-09	Thin films
EP0733473A3 (en)	1997-12-17	Multi-layered film
EP0887693A4 (en)	1999-06-16	DEVICE FOR FORMING THIN FILMS
GB2304918A8 (en)	1997-06-02	Thin film actuated mirror
EP0998828A4 (en)	2001-03-29	THIN FILM ACTIVATED MIRROR NETWORK AND MANUFACTURING METHOD
AU2314497A (en)	1997-10-10	An optical element
GB2316757B (en)	2000-02-23	Method for the manufacture of a thin film actuated mirror array
AU1371297A (en)	1997-07-14	Multilayer thermoshrinkable films
AU2652797A (en)	1998-12-08	Dielectric thin film element and method for manufacturing the same
HUP9801148A3 (en)	2002-07-29	Thin film actuated mirror array having dielectric layers