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HK1051061B - 泵及其製造方法 - Google Patents

泵及其製造方法

Info

Publication number
HK1051061B
HK1051061B HK03101906.8A HK03101906A HK1051061B HK 1051061 B HK1051061 B HK 1051061B HK 03101906 A HK03101906 A HK 03101906A HK 1051061 B HK1051061 B HK 1051061B
Authority
HK
Hong Kong
Prior art keywords
pump
manufacturing same
manufacturing
same
Prior art date
Application number
HK03101906.8A
Other languages
English (en)
Other versions
HK1051061A1 (en
Inventor
Yoji Urano
Tatsuji Kawaguchi
Harunori Kitahara
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of HK1051061A1 publication Critical patent/HK1051061A1/xx
Publication of HK1051061B publication Critical patent/HK1051061B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1062—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at two or more points at its periphery

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
HK03101906.8A 2001-04-24 2003-03-14 泵及其製造方法 HK1051061B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001125904 2001-04-24

Publications (2)

Publication Number Publication Date
HK1051061A1 HK1051061A1 (en) 2003-07-18
HK1051061B true HK1051061B (zh) 2006-08-25

Family

ID=18975035

Family Applications (1)

Application Number Title Priority Date Filing Date
HK03101906.8A HK1051061B (zh) 2001-04-24 2003-03-14 泵及其製造方法

Country Status (7)

Country Link
US (1) US20030002995A1 (zh)
EP (1) EP1253320B1 (zh)
KR (1) KR100494262B1 (zh)
CN (1) CN1212476C (zh)
DE (1) DE60209054T2 (zh)
HK (1) HK1051061B (zh)
TW (1) TW561223B (zh)

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DE10242110A1 (de) * 2002-09-11 2004-03-25 Thinxxs Gmbh Mikropumpe und Verfahren zu ihrer Herstellung
US6986649B2 (en) * 2003-04-09 2006-01-17 Motorola, Inc. Micropump with integrated pressure sensor
DE102004002078A1 (de) 2004-01-15 2005-08-18 Knf Flodos Ag Ventil
WO2005075093A1 (en) * 2004-02-09 2005-08-18 Matsushita Electric Works, Ltd. Electrostatic spraying device
US7790325B2 (en) * 2004-03-31 2010-09-07 Canon Kabushiki Kaisha Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve
US7219848B2 (en) * 2004-11-03 2007-05-22 Meadwestvaco Corporation Fluid sprayer employing piezoelectric pump
CN100406731C (zh) * 2005-03-10 2008-07-30 张坤林 可防卡死的真空泵
US20080106071A1 (en) * 2006-11-03 2008-05-08 Chien-Tien Huang Air venting assembly of air pump
WO2008101196A1 (en) * 2007-02-15 2008-08-21 Osmetech Molecular Diagnostics Fluidics devices
CN101255858B (zh) * 2007-03-01 2010-05-26 讯凯国际股份有限公司 薄膜泵及具有薄膜泵的装置
TWI398577B (zh) * 2007-08-31 2013-06-11 Microjet Technology Co Ltd 大流體輸送裝置
US20090199904A1 (en) * 2008-02-13 2009-08-13 Babbitt Guy R Low shear pumps for use with bioreactors
CN101608610A (zh) * 2008-06-20 2009-12-23 微创医疗器械(上海)有限公司 一种微型泵
JP5853587B2 (ja) * 2011-10-26 2016-02-09 オムロンヘルスケア株式会社 電子血圧計
DE102012202103A1 (de) 2012-02-13 2013-08-14 Robert Bosch Gmbh Druckausgleichselement mit einer Membran, Gehäuse, Batteriezellenmodul sowie Kraftfahrzeug
TWI475180B (zh) * 2012-05-31 2015-03-01 Ind Tech Res Inst 合成噴流裝置
KR20140147345A (ko) * 2013-06-19 2014-12-30 삼성전기주식회사 마이크로 펌프 장치
US20150057594A1 (en) * 2013-08-24 2015-02-26 Alcon Research, Ltd. Bubble-free microfluidic valve systems and methods
JP2015117647A (ja) * 2013-12-19 2015-06-25 東芝テック株式会社 圧電ポンプおよび圧電ポンプを備えるインクジェット記録装置
JP6695154B2 (ja) * 2016-01-28 2020-05-20 東芝テック株式会社 インク循環装置及びプリンタ
EP3203079B1 (en) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelectric actuator
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203081B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Miniature fluid control device
EP3203078B1 (en) 2016-01-29 2021-05-26 Microjet Technology Co., Ltd Miniature pneumatic device
US9976673B2 (en) 2016-01-29 2018-05-22 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203080B1 (en) 2016-01-29 2021-09-22 Microjet Technology Co., Ltd Miniature pneumatic device
EP3203076B1 (en) 2016-01-29 2021-05-12 Microjet Technology Co., Ltd Miniature fluid control device
US10615329B2 (en) 2016-01-29 2020-04-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
TWI611107B (zh) * 2016-01-29 2018-01-11 研能科技股份有限公司 微型流體控制裝置
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
KR101910932B1 (ko) * 2016-08-31 2018-10-23 이오플로우(주) 전기 삼투 펌프
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
CN108071577B (zh) * 2016-11-10 2020-11-24 研能科技股份有限公司 微型流体控制装置
CN108071580A (zh) * 2016-11-10 2018-05-25 研能科技股份有限公司 微型气压动力装置
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
CN108071578A (zh) * 2016-11-10 2018-05-25 研能科技股份有限公司 微型气压动力装置
DE102018207858B4 (de) * 2018-05-18 2021-06-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor
WO2020062289A1 (zh) * 2018-09-30 2020-04-02 深圳市大疆软件科技有限公司 隔膜泵及具有其的农业植保机
CN208950820U (zh) * 2018-09-30 2019-06-07 深圳市大疆软件科技有限公司 隔膜泵及农业无人机
CN208950819U (zh) * 2018-09-30 2019-06-07 深圳市大疆软件科技有限公司 隔膜泵及农业无人机
CN110869613B (zh) * 2018-09-30 2022-08-19 深圳市大疆软件科技有限公司 隔膜泵及农业无人机
CN113944614B (zh) * 2018-09-30 2023-06-20 深圳市大疆软件科技有限公司 隔膜泵及农业无人机
CN216984886U (zh) * 2021-11-25 2022-07-19 华为技术有限公司 一种微型压电泵及电子设备

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US3107630A (en) * 1955-01-31 1963-10-22 Textron Inc Non-magnetic electro-hydraulic pump
US4519751A (en) * 1982-12-16 1985-05-28 The Abet Group Piezoelectric pump with internal load sensor
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
JPH01174278A (ja) * 1987-12-28 1989-07-10 Misuzu Erii:Kk インバータ
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JPH03134274A (ja) * 1989-10-17 1991-06-07 Seiko Epson Corp マイクロポンプの弁ユニット構造
KR910008284A (ko) * 1989-10-17 1991-05-31 야마무라 가쯔미 마이크로 펌프
SE508435C2 (sv) * 1993-02-23 1998-10-05 Erik Stemme Förträngningspump av membranpumptyp
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US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
JP3726285B2 (ja) * 1995-07-27 2005-12-14 セイコーエプソン株式会社 マイクロバルブ及びその製造方法、並びにこれを用いたマイクロポンプ及びその製造方法、このマイクロポンプを用いた装置
US5725017A (en) * 1997-01-27 1998-03-10 Medtronic, Inc. In-line pressure check valve for drug-delivery systems
JPH10213077A (ja) * 1997-01-30 1998-08-11 Kasei Optonix Co Ltd ポンプ用リード弁
DE19711270C2 (de) * 1997-03-18 2001-07-26 Schwerionenforsch Gmbh Mikropumpe für fluide Medien
DE19719861A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
DE19720482C5 (de) * 1997-05-16 2006-01-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikromembranpumpe
US6575715B1 (en) * 1997-09-19 2003-06-10 Omnitek Research & Development, Inc. Structural elements forming a pump
US6164933A (en) * 1998-04-27 2000-12-26 Matsushita Electric Works, Ltd. Method of measuring a pressure of a pressurized fluid fed through a diaphragm pump and accumulated in a vessel, and miniature pump system effecting the measurement
US6334761B1 (en) * 2000-03-02 2002-01-01 California Institute Of Technology Check-valved silicon diaphragm pump and method of fabricating the same
US6554591B1 (en) * 2001-11-26 2003-04-29 Motorola, Inc. Micropump including ball check valve utilizing ceramic technology and method of fabrication

Also Published As

Publication number Publication date
EP1253320B1 (en) 2006-02-08
HK1051061A1 (en) 2003-07-18
DE60209054T2 (de) 2006-08-31
EP1253320A3 (en) 2004-02-04
DE60209054D1 (de) 2006-04-20
US20030002995A1 (en) 2003-01-02
TW561223B (en) 2003-11-11
EP1253320A2 (en) 2002-10-30
KR100494262B1 (ko) 2005-06-13
CN1212476C (zh) 2005-07-27
KR20020082800A (ko) 2002-10-31
CN1382909A (zh) 2002-12-04

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20130423