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GB9912063D0 - Ion implantation apparatus - Google Patents

Ion implantation apparatus

Info

Publication number
GB9912063D0
GB9912063D0 GBGB9912063.6A GB9912063A GB9912063D0 GB 9912063 D0 GB9912063 D0 GB 9912063D0 GB 9912063 A GB9912063 A GB 9912063A GB 9912063 D0 GB9912063 D0 GB 9912063D0
Authority
GB
United Kingdom
Prior art keywords
ion implantation
implantation apparatus
ion
implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9912063.6A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to GBGB9912063.6A priority Critical patent/GB9912063D0/en
Publication of GB9912063D0 publication Critical patent/GB9912063D0/en
Priority to EP00303233A priority patent/EP1056114A3/en
Priority to US09/561,992 priority patent/US6627904B1/en
Priority to JP2000153477A priority patent/JP4777499B2/en
Ceased legal-status Critical Current

Links

GBGB9912063.6A 1999-05-24 1999-05-24 Ion implantation apparatus Ceased GB9912063D0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GBGB9912063.6A GB9912063D0 (en) 1999-05-24 1999-05-24 Ion implantation apparatus
EP00303233A EP1056114A3 (en) 1999-05-24 2000-04-17 Ion implantation apparatus
US09/561,992 US6627904B1 (en) 1999-05-24 2000-05-02 Ion implantation apparatus
JP2000153477A JP4777499B2 (en) 1999-05-24 2000-05-24 Ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9912063.6A GB9912063D0 (en) 1999-05-24 1999-05-24 Ion implantation apparatus

Publications (1)

Publication Number Publication Date
GB9912063D0 true GB9912063D0 (en) 1999-07-21

Family

ID=10854062

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9912063.6A Ceased GB9912063D0 (en) 1999-05-24 1999-05-24 Ion implantation apparatus

Country Status (1)

Country Link
GB (1) GB9912063D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)