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GB0005567D0 - Ion implantation aparatus - Google Patents

Ion implantation aparatus

Info

Publication number
GB0005567D0
GB0005567D0 GB0005567A GB0005567A GB0005567D0 GB 0005567 D0 GB0005567 D0 GB 0005567D0 GB 0005567 A GB0005567 A GB 0005567A GB 0005567 A GB0005567 A GB 0005567A GB 0005567 D0 GB0005567 D0 GB 0005567D0
Authority
GB
United Kingdom
Prior art keywords
aparatus
ion implantation
implantation
ion
implantation aparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0005567A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to GB0005567A priority Critical patent/GB0005567D0/en
Priority to EP00303233A priority patent/EP1056114A3/en
Priority to US09/561,992 priority patent/US6627904B1/en
Publication of GB0005567D0 publication Critical patent/GB0005567D0/en
Priority to JP2000153477A priority patent/JP4777499B2/en
Ceased legal-status Critical Current

Links

GB0005567A 1999-05-24 2000-03-08 Ion implantation aparatus Ceased GB0005567D0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB0005567A GB0005567D0 (en) 2000-03-08 2000-03-08 Ion implantation aparatus
EP00303233A EP1056114A3 (en) 1999-05-24 2000-04-17 Ion implantation apparatus
US09/561,992 US6627904B1 (en) 1999-05-24 2000-05-02 Ion implantation apparatus
JP2000153477A JP4777499B2 (en) 1999-05-24 2000-05-24 Ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0005567A GB0005567D0 (en) 2000-03-08 2000-03-08 Ion implantation aparatus

Publications (1)

Publication Number Publication Date
GB0005567D0 true GB0005567D0 (en) 2000-05-03

Family

ID=9887203

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0005567A Ceased GB0005567D0 (en) 1999-05-24 2000-03-08 Ion implantation aparatus

Country Status (1)

Country Link
GB (1) GB0005567D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)