[go: up one dir, main page]

GB9701923D0 - Capacitor structure for a semiconductor memory device - Google Patents

Capacitor structure for a semiconductor memory device

Info

Publication number
GB9701923D0
GB9701923D0 GBGB9701923.6A GB9701923A GB9701923D0 GB 9701923 D0 GB9701923 D0 GB 9701923D0 GB 9701923 A GB9701923 A GB 9701923A GB 9701923 D0 GB9701923 D0 GB 9701923D0
Authority
GB
United Kingdom
Prior art keywords
memory device
semiconductor memory
capacitor structure
capacitor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9701923.6A
Other versions
GB2321771A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United Microelectronics Corp
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW085110010A external-priority patent/TW308729B/en
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to GB9701923A priority Critical patent/GB2321771A/en
Publication of GB9701923D0 publication Critical patent/GB9701923D0/en
Priority to NL1005628A priority patent/NL1005628C2/en
Priority to FR9705115A priority patent/FR2752490B1/en
Priority to DE19720227A priority patent/DE19720227A1/en
Priority to JP9140458A priority patent/JPH10135428A/en
Publication of GB2321771A publication Critical patent/GB2321771A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H10B12/318—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor the storage electrode having multiple segments
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
GB9701923A 1996-08-16 1997-01-30 Stacked capacitor Withdrawn GB2321771A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB9701923A GB2321771A (en) 1996-08-16 1997-01-30 Stacked capacitor
NL1005628A NL1005628C2 (en) 1996-08-16 1997-03-25 A method of manufacturing a semiconductor memory device.
FR9705115A FR2752490B1 (en) 1996-08-16 1997-04-25 SEMICONDUCTOR MEMORY DEVICE AND CAPACITOR STRUCTURE FOR SUCH DEVICE
DE19720227A DE19720227A1 (en) 1996-08-16 1997-05-14 Semiconductor memory device with capacitor
JP9140458A JPH10135428A (en) 1996-08-16 1997-05-29 Capacitor configuration of semiconductor memory device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
TW085110010A TW308729B (en) 1996-08-16 1996-08-16 Semiconductor memory device with capacitor (3)
GB9701923A GB2321771A (en) 1996-08-16 1997-01-30 Stacked capacitor
NL1005628A NL1005628C2 (en) 1996-08-16 1997-03-25 A method of manufacturing a semiconductor memory device.

Publications (2)

Publication Number Publication Date
GB9701923D0 true GB9701923D0 (en) 1997-03-19
GB2321771A GB2321771A (en) 1998-08-05

Family

ID=27268699

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9701923A Withdrawn GB2321771A (en) 1996-08-16 1997-01-30 Stacked capacitor

Country Status (5)

Country Link
JP (1) JPH10135428A (en)
DE (1) DE19720227A1 (en)
FR (1) FR2752490B1 (en)
GB (1) GB2321771A (en)
NL (1) NL1005628C2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6025244A (en) * 1997-12-04 2000-02-15 Fujitsu Limited Self-aligned patterns by chemical-mechanical polishing particularly suited to the formation of MCM capacitors
GB2410374B (en) * 2002-06-27 2005-11-30 Samsung Electronics Co Ltd Methods for manufacturing semiconductor memory using sidewall spacers
KR100434506B1 (en) 2002-06-27 2004-06-05 삼성전자주식회사 Semiconductor memory device and method for manufacturing the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5164337A (en) * 1989-11-01 1992-11-17 Matsushita Electric Industrial Co., Ltd. Method of fabricating a semiconductor device having a capacitor in a stacked memory cell
JP2504606B2 (en) * 1990-05-18 1996-06-05 株式会社東芝 Semiconductor memory device and manufacturing method thereof
US5240871A (en) * 1991-09-06 1993-08-31 Micron Technology, Inc. Corrugated storage contact capacitor and method for forming a corrugated storage contact capacitor
US5145801A (en) * 1992-02-07 1992-09-08 Micron Technology, Inc. Method of increasing the surface area of a mini-stacked capacitor
JPH05308131A (en) * 1992-04-30 1993-11-19 Sanyo Electric Co Ltd Manufacture of semiconductor storage device
US5330928A (en) * 1992-09-28 1994-07-19 Industrial Technology Research Institute Method for fabricating stacked capacitors with increased capacitance in a DRAM cell
JP2953220B2 (en) * 1992-10-30 1999-09-27 日本電気株式会社 Method for manufacturing semiconductor device
JPH07249690A (en) * 1994-03-14 1995-09-26 Fujitsu Ltd Method for manufacturing semiconductor device
US5436188A (en) * 1994-04-26 1995-07-25 Industrial Technology Research Institute Dram cell process having elk horn shaped capacitor
KR0154161B1 (en) * 1994-06-30 1998-10-15 김주용 Capacitor Manufacturing Method of Semiconductor Device

Also Published As

Publication number Publication date
FR2752490A1 (en) 1998-02-20
JPH10135428A (en) 1998-05-22
NL1005628C2 (en) 1998-09-28
FR2752490B1 (en) 2001-05-25
GB2321771A (en) 1998-08-05
DE19720227A1 (en) 1998-02-19

Similar Documents

Publication Publication Date Title
GB2312989B (en) Semiconductor capacitor device
GB2320779B (en) Synchronous semiconductor memory device
GB9217743D0 (en) A semiconductor memory device
EP0739015A3 (en) Semiconductor memory device
GB2287112B (en) Auto-precharging semiconductor memory devices
GB2332292B (en) A semiconductor memory device
DE69617391D1 (en) A semiconductor memory device
TW422397U (en) Semiconductor memory device
GB9701850D0 (en) Semiconductor memory device having tree-type capacitor
GB2320778B (en) Semiconductor memory device
GB2308734B (en) Semiconductor memory device
GB2306028B (en) Semiconductor memory device
GB2322951B (en) A semiconductor memory device having a multibank
GB9701973D0 (en) Capacitor structure for a semiconductor memory device
GB2318896B (en) Semiconductor memory device
GB9701923D0 (en) Capacitor structure for a semiconductor memory device
GB9701849D0 (en) Semiconductor memory device having a tree-type capacitor
EP0717412A3 (en) Semiconductor memory device
GB9701964D0 (en) Method for fabricating a capacitor structure for a semiconductor memory device
GB9701848D0 (en) Method of fabricating a capacitor structure for a semiconductor memory device
GB9701965D0 (en) Method of fabricating a capacitor structure for a semiconductor memory device
DE69637074D1 (en) A semiconductor memory device
GB2308211B (en) Semiconductor memory device
GB9701974D0 (en) Semiconductor memory device having a capacitor
GB2286273B (en) Semiconductor memory device

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)