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GB9313950D0 - Electron spectroscopy apparatus - Google Patents

Electron spectroscopy apparatus

Info

Publication number
GB9313950D0
GB9313950D0 GB939313950A GB9313950A GB9313950D0 GB 9313950 D0 GB9313950 D0 GB 9313950D0 GB 939313950 A GB939313950 A GB 939313950A GB 9313950 A GB9313950 A GB 9313950A GB 9313950 D0 GB9313950 D0 GB 9313950D0
Authority
GB
United Kingdom
Prior art keywords
electron spectroscopy
spectroscopy apparatus
electron
spectroscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB939313950A
Other versions
GB2268802A (en
GB2268802B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Japan Technological Research Association of Artificial Photosynthetic Chemical Process
Original Assignee
Agency of Industrial Science and Technology
Japan Technological Research Association of Artificial Photosynthetic Chemical Process
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Japan Technological Research Association of Artificial Photosynthetic Chemical Process filed Critical Agency of Industrial Science and Technology
Publication of GB9313950D0 publication Critical patent/GB9313950D0/en
Publication of GB2268802A publication Critical patent/GB2268802A/en
Application granted granted Critical
Publication of GB2268802B publication Critical patent/GB2268802B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00Gamma- or X-ray microscopes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/085Investigating materials by wave or particle radiation secondary emission photo-electron spectrum [ESCA, XPS]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/20Sources of radiation
    • G01N2223/204Sources of radiation source created from radiated target

Landscapes

  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
GB9313950A 1992-07-09 1993-07-06 Electron spectroscopy apparatus Expired - Fee Related GB2268802B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4205954A JP2764505B2 (en) 1992-07-09 1992-07-09 Electron spectroscopy method and electron spectrometer using the same

Publications (3)

Publication Number Publication Date
GB9313950D0 true GB9313950D0 (en) 1993-08-18
GB2268802A GB2268802A (en) 1994-01-19
GB2268802B GB2268802B (en) 1995-12-20

Family

ID=16515457

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9313950A Expired - Fee Related GB2268802B (en) 1992-07-09 1993-07-06 Electron spectroscopy apparatus

Country Status (3)

Country Link
JP (1) JP2764505B2 (en)
DE (1) DE4322852C2 (en)
GB (1) GB2268802B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2752101B1 (en) * 1996-07-30 1998-10-09 Commissariat Energie Atomique DEVICE FOR GENERATING ULTRA-SHORT X-RAY PULSES
DE19924204A1 (en) * 1999-05-27 2000-11-30 Geesthacht Gkss Forschung Device and method for generating x-rays
US7391036B2 (en) 2002-04-17 2008-06-24 Ebara Corporation Sample surface inspection apparatus and method
JP5110812B2 (en) * 2006-07-14 2012-12-26 日本電子株式会社 Chemical state analysis method and apparatus by Auger electron spectroscopy
CN106198581B (en) * 2016-08-30 2023-04-07 中国工程物理研究院激光聚变研究中心 Ultrashort X-ray double-angle double-color backlight photographing system based on laser-driven solid target

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4435828A (en) * 1982-04-14 1984-03-06 Battelle Development Corporation Fluorescence laser EXAFS
JPH0225737A (en) * 1988-07-15 1990-01-29 Hitachi Ltd Surface analysis method and device
JPH0718960B2 (en) * 1989-08-25 1995-03-06 株式会社島津製作所 X-ray microscope
JP3152455B2 (en) * 1991-08-02 2001-04-03 浜松ホトニクス株式会社 Energy distribution measurement device for charged particles

Also Published As

Publication number Publication date
DE4322852A1 (en) 1994-01-13
JPH0627058A (en) 1994-02-04
JP2764505B2 (en) 1998-06-11
GB2268802A (en) 1994-01-19
DE4322852C2 (en) 1999-10-14
GB2268802B (en) 1995-12-20

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20110706