GB9212940D0 - Semiconductor deep cavity device - Google Patents
Semiconductor deep cavity deviceInfo
- Publication number
- GB9212940D0 GB9212940D0 GB929212940A GB9212940A GB9212940D0 GB 9212940 D0 GB9212940 D0 GB 9212940D0 GB 929212940 A GB929212940 A GB 929212940A GB 9212940 A GB9212940 A GB 9212940A GB 9212940 D0 GB9212940 D0 GB 9212940D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- cavity device
- deep cavity
- semiconductor deep
- semiconductor
- deep
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Recrystallisation Techniques (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9212940A GB2255230A (en) | 1989-12-28 | 1992-06-18 | Semiconductor deep cavity device |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB898929277A GB8929277D0 (en) | 1989-12-28 | 1989-12-28 | Semiconductor deep cavity device |
PCT/GB1990/002034 WO1991010119A2 (en) | 1989-12-28 | 1990-12-28 | Semiconductor deep cavity device |
GB9212940A GB2255230A (en) | 1989-12-28 | 1992-06-18 | Semiconductor deep cavity device |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9212940D0 true GB9212940D0 (en) | 1992-08-26 |
GB2255230A GB2255230A (en) | 1992-10-28 |
Family
ID=26296439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9212940A Withdrawn GB2255230A (en) | 1989-12-28 | 1992-06-18 | Semiconductor deep cavity device |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2255230A (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8506589D0 (en) * | 1985-03-14 | 1985-04-17 | Ici Plc | Pressure sensor |
GB2202936B (en) * | 1987-03-31 | 1990-11-14 | Plessey Co Plc | Improvements relating to optical pressure or displacement sensors |
-
1992
- 1992-06-18 GB GB9212940A patent/GB2255230A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
GB2255230A (en) | 1992-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |