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GB2255230A - Semiconductor deep cavity device - Google Patents

Semiconductor deep cavity device

Info

Publication number
GB2255230A
GB2255230A GB9212940A GB9212940A GB2255230A GB 2255230 A GB2255230 A GB 2255230A GB 9212940 A GB9212940 A GB 9212940A GB 9212940 A GB9212940 A GB 9212940A GB 2255230 A GB2255230 A GB 2255230A
Authority
GB
United Kingdom
Prior art keywords
wafer
substrate
aperture
bond
apertured sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9212940A
Other versions
GB9212940D0 (en
Inventor
Tony William James Rogers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
British Technology Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB898929277A external-priority patent/GB8929277D0/en
Application filed by British Technology Group Ltd filed Critical British Technology Group Ltd
Priority to GB9212940A priority Critical patent/GB2255230A/en
Publication of GB9212940D0 publication Critical patent/GB9212940D0/en
Publication of GB2255230A publication Critical patent/GB2255230A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Recrystallisation Techniques (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention provides, notably for optical addressability, a semiconductor deep cavity device comprising a relatively rigid optically transparent substrate bearing a semiconductor wafer, having interposed between the wafer and the substrate an apertured sheet of a glass, the aperture of which defines the device cavity. The invention also provides a method of making such a device, comprising placing the apertured sheet and the wafer in their relative positions and applying an electrostatic field between them sufficient to bond them, and (previously, simultaneously or subsequently) placing the substrate and the apertured sheet in their relative positions and applying an electrostatic field between them sufficient to bond them, the bonding being accomplished using field-assisted bonding at an elevated temperature. The wafer may be formed with an annular trench in its surface facing the substrate, with the boundary of the aperture of the interposed glass sheet substantially coinciding with that of the trench.
GB9212940A 1989-12-28 1992-06-18 Semiconductor deep cavity device Withdrawn GB2255230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9212940A GB2255230A (en) 1989-12-28 1992-06-18 Semiconductor deep cavity device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB898929277A GB8929277D0 (en) 1989-12-28 1989-12-28 Semiconductor deep cavity device
PCT/GB1990/002034 WO1991010119A2 (en) 1989-12-28 1990-12-28 Semiconductor deep cavity device
GB9212940A GB2255230A (en) 1989-12-28 1992-06-18 Semiconductor deep cavity device

Publications (2)

Publication Number Publication Date
GB9212940D0 GB9212940D0 (en) 1992-08-26
GB2255230A true GB2255230A (en) 1992-10-28

Family

ID=26296439

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9212940A Withdrawn GB2255230A (en) 1989-12-28 1992-06-18 Semiconductor deep cavity device

Country Status (1)

Country Link
GB (1) GB2255230A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0196784A2 (en) * 1985-03-14 1986-10-08 Imperial Chemical Industries Plc Fabry Perot pressure sensor with diaphragm
GB2202936A (en) * 1987-03-31 1988-10-05 Plessey Co Plc Optical fibre pressure or displacement sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0196784A2 (en) * 1985-03-14 1986-10-08 Imperial Chemical Industries Plc Fabry Perot pressure sensor with diaphragm
GB2202936A (en) * 1987-03-31 1988-10-05 Plessey Co Plc Optical fibre pressure or displacement sensor

Also Published As

Publication number Publication date
GB9212940D0 (en) 1992-08-26

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)