GB890075A - Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof - Google Patents
Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereofInfo
- Publication number
- GB890075A GB890075A GB2652957A GB2652957A GB890075A GB 890075 A GB890075 A GB 890075A GB 2652957 A GB2652957 A GB 2652957A GB 2652957 A GB2652957 A GB 2652957A GB 890075 A GB890075 A GB 890075A
- Authority
- GB
- United Kingdom
- Prior art keywords
- boiler
- refrigerant
- silane
- purified
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000001875 compounds Chemical class 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 5
- 239000003507 refrigerant Substances 0.000 abstract 3
- 229910000077 silane Inorganic materials 0.000 abstract 3
- 238000005194 fractionation Methods 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 238000004508 fractional distillation Methods 0.000 abstract 1
- 238000010992 reflux Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/046—Purification
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
Monosilane for the production of silicon is purified by fractional distillation using as refrigerant a substantially pure normally gaseous compound of silicon, preferably monosilane. As <PICT:0890075/III/1> shown, the silane to be purified is passed through a fractionation apparatus comprising boiler 4, reflux column 5, and condenser 7 from an inlet pipe 8 and the purified silane is removed through pipe 8a. The refrigerant silane is passed, from a compressor 1 via pipe 1a, successively through a water cooler 2, a heat exchanger 3, and boiler 4. From boiler 4 the refrigerant is passed successively through an expansion valve 6, condenser 7, and heat exchanger 3, whereafter it is recycled to compressor 1. Fractionation may be effected at a temperature within the range of -100 DEG - -125 DEG C. Specification 878,763 is referred to.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BE570575D BE570575A (en) | 1957-08-22 | ||
| NL108317D NL108317C (en) | 1957-08-22 | ||
| NL230691D NL230691A (en) | 1957-08-22 | ||
| GB2652957A GB890075A (en) | 1957-08-22 | 1957-08-22 | Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof |
| FR1201787D FR1201787A (en) | 1957-08-22 | 1958-08-21 | Manufacturing process of very pure materials usable in semiconductor devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2652957A GB890075A (en) | 1957-08-22 | 1957-08-22 | Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB890075A true GB890075A (en) | 1962-02-28 |
Family
ID=10245065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2652957A Expired GB890075A (en) | 1957-08-22 | 1957-08-22 | Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE570575A (en) |
| FR (1) | FR1201787A (en) |
| GB (1) | GB890075A (en) |
| NL (2) | NL108317C (en) |
-
0
- NL NL230691D patent/NL230691A/xx unknown
- NL NL108317D patent/NL108317C/xx active
- BE BE570575D patent/BE570575A/xx unknown
-
1957
- 1957-08-22 GB GB2652957A patent/GB890075A/en not_active Expired
-
1958
- 1958-08-21 FR FR1201787D patent/FR1201787A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL108317C (en) | |
| BE570575A (en) | |
| NL230691A (en) | |
| FR1201787A (en) | 1960-01-06 |
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