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GB808236A - Field emission ion source - Google Patents

Field emission ion source

Info

Publication number
GB808236A
GB808236A GB35873/56A GB3587356A GB808236A GB 808236 A GB808236 A GB 808236A GB 35873/56 A GB35873/56 A GB 35873/56A GB 3587356 A GB3587356 A GB 3587356A GB 808236 A GB808236 A GB 808236A
Authority
GB
United Kingdom
Prior art keywords
needle
hollow
gas
permeable
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB35873/56A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
High Voltage Engineering Corp
Original Assignee
High Voltage Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by High Voltage Engineering Corp filed Critical High Voltage Engineering Corp
Publication of GB808236A publication Critical patent/GB808236A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

808,236. Ion sources. HIGH VOLTAGE ENGINEERING CORPORATION. Nov. 23, 1956 [Jan. 27, 1956], No. 35873/56. Class 39(1). A field-emission ion source suitable for a particle accelerator consists of a hollow pointed member which is supplied with gas under pressure and which is permeable to the gas. The hollow members, may be a hollow tube 2, Fig. 1, which terminating in a hollow or solid needle 13 is permeable to the gas. The needle may be of palladium, iron or nickel and a suitable gas is hydrogen, deuterium or tritium. The needle may be tipped with tungsten. The needle may be soldered in a member which is fitted on to the end of the hollow member 2. The needle may be heated by a coil 16 which may be an emitter of electrons. Positive or negative ions may be produced depending on the radius of curvature of the needle tip and the magnitude of the applied voltage. The ions are accelerated through a diaphragm 18 and a unipotential lens 3, 4, 5. The insulating column 1 includes electrode discs 7 and external guard rings 9. In a modification for producing a pulsed ion beam, the needle 13, Fig. 6, is surrounded by an apertured plate 23 to which a pulsed control voltage is applied. The fine point at the tip of the needle may be produced by grinding, chemical or electrolytic etching, or oxidation in a flame. Iron points may be etched in a molar solution of potassium chlorate, dissolved in a 30 per cent. solution of hydrochloric acid.
GB35873/56A 1956-01-27 1956-11-23 Field emission ion source Expired GB808236A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US561818A US2809314A (en) 1956-01-27 1956-01-27 Field emission ion source

Publications (1)

Publication Number Publication Date
GB808236A true GB808236A (en) 1959-01-28

Family

ID=24243603

Family Applications (1)

Application Number Title Priority Date Filing Date
GB35873/56A Expired GB808236A (en) 1956-01-27 1956-11-23 Field emission ion source

Country Status (7)

Country Link
US (1) US2809314A (en)
BE (1) BE553596A (en)
CH (1) CH358515A (en)
DE (1) DE1044295B (en)
FR (1) FR1165210A (en)
GB (1) GB808236A (en)
NL (2) NL213062A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4638210A (en) * 1985-04-05 1987-01-20 Hughes Aircraft Company Liquid metal ion source

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3104322A (en) * 1958-02-10 1963-09-17 High Voltage Engineering Corp Compact neutron source
US3071705A (en) * 1958-10-06 1963-01-01 Grumman Aircraft Engineering C Electrostatic propulsion means
DE1244300B (en) * 1959-10-01 1967-07-13 Atomic Energy Commission Device for generating an ion beam
US3117416A (en) * 1960-06-10 1964-01-14 Itt Electronic fluid flow control valve
US3369148A (en) * 1961-07-05 1968-02-13 William J. Hitchcock System for mixing opposite polarity ions on magnetic field axis
US3398685A (en) * 1961-09-11 1968-08-27 Litton Systems Inc Ion drag pumps
US3286187A (en) * 1961-10-16 1966-11-15 Minnesota Mining & Mfg Ion source utilizing a spherically converging electric field
US3232046A (en) * 1962-06-06 1966-02-01 Aerospace Corp Plasma generator and propulsion exhaust system
GB1052902A (en) * 1963-02-19
US3239130A (en) * 1963-07-10 1966-03-08 Cons Vacuum Corp Gas pumping methods and apparatus
FR1454051A (en) * 1965-08-20 1966-07-22 Commissariat Energie Atomique Ion source
US3345820A (en) * 1965-10-19 1967-10-10 Hugh L Dryden Electron bombardment ion engine
US3405263A (en) * 1966-01-14 1968-10-08 Exxon Research Engineering Co Dual mass spectrometer ion source comprising field ionization and electron bombardment sources and the method of use
US3464207A (en) * 1966-10-10 1969-09-02 American Standard Inc Quasi-corona-aerodynamic vehicle
US3387176A (en) * 1967-01-05 1968-06-04 Hughes Aircraft Co Apparatus for passing charged particles through a field free region and neutralizingsaid particles during transit
US3530290A (en) * 1967-09-13 1970-09-22 Exxon Research Engineering Co Field emission ion source for a mass spectrometer having relatively movable anode and cathode electrodes
DE1900569C3 (en) * 1969-01-07 1976-01-08 Varian Mat Gmbh, 2800 Bremen Solid-state ion source
US3852595A (en) * 1972-09-21 1974-12-03 Stanford Research Inst Multipoint field ionization source
DE2333866A1 (en) * 1973-07-03 1975-01-23 Max Planck Gesellschaft FIELD DESORPTION ION SOURCE AND METHOD FOR MANUFACTURING IT
US3958848A (en) * 1973-07-03 1976-05-25 Heil Hans W Method of fabricating field desorption ion source
US4121128A (en) * 1976-03-22 1978-10-17 The United States Of America As Represented By The Secretary Of The Army Collective ion accelerator with foil-less beam extraction window
US4085330A (en) * 1976-07-08 1978-04-18 Burroughs Corporation Focused ion beam mask maker
DE2805273C3 (en) * 1978-02-08 1982-03-18 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Device for generating a beam of accelerated ions by contact ionization
US4328667A (en) * 1979-03-30 1982-05-11 The European Space Research Organisation Field-emission ion source and ion thruster apparatus comprising such sources
JPS6056342A (en) * 1983-09-08 1985-04-01 Anelva Corp Ion beam generating apparatus
JPH0831305B2 (en) * 1986-09-25 1996-03-27 ソニー株式会社 Ion beam device
US5397901A (en) * 1990-06-12 1995-03-14 American Technologies, Inc. Forming charges in a fluid and generation of a charged beam
US5231824A (en) * 1991-08-09 1993-08-03 Dick Robert C Van Ion beam and ion jet stream motor
US6145298A (en) * 1997-05-06 2000-11-14 Sky Station International, Inc. Atmospheric fueled ion engine
US6573642B1 (en) * 2000-01-26 2003-06-03 Motorola, Inc. Field emission device and method for the conditioning thereof
WO2002086489A1 (en) * 2001-04-20 2002-10-31 University Of British Columbia High throughput ion source with multiple ion sprayers and ion lenses
WO2010132265A2 (en) * 2009-05-12 2010-11-18 Carl Zeiss Nts, Llc. Gas delivery in a microscope system
CN110707535A (en) * 2019-11-19 2020-01-17 浙江亿东环保科技有限公司 Negative oxygen ion emission window

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2287620A (en) * 1939-06-09 1942-06-23 Kallmann Hartmut Israel Device for irradiating objects with neutrons, especially for depicting them by meansof neutron-radiation
GB697105A (en) * 1950-10-16 1953-09-16 Ass Elect Ind Improvements relating to high voltage electrostatic apparatus for accelerating charged particles

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4638210A (en) * 1985-04-05 1987-01-20 Hughes Aircraft Company Liquid metal ion source

Also Published As

Publication number Publication date
NL213062A (en)
NL102697C (en)
US2809314A (en) 1957-10-08
CH358515A (en) 1961-11-30
FR1165210A (en) 1958-10-20
DE1044295B (en) 1958-11-20
BE553596A (en)

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