GB987371A - Charged particle generator - Google Patents
Charged particle generatorInfo
- Publication number
- GB987371A GB987371A GB6095/63A GB609563A GB987371A GB 987371 A GB987371 A GB 987371A GB 6095/63 A GB6095/63 A GB 6095/63A GB 609563 A GB609563 A GB 609563A GB 987371 A GB987371 A GB 987371A
- Authority
- GB
- United Kingdom
- Prior art keywords
- box
- plasma
- arc
- generator
- charged particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 title abstract 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 238000010891 electric arc Methods 0.000 abstract 1
- 238000000605 extraction Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
987,371. Ion sources. KABUSHIKI KAISHA HITACHI SEISAKUSHO. Feb. 14, 1963 [Feb. 15, 1962], No. 6095/63. Heading H1D. A generator for either ions or electrons comprises a vacuum cleaner 1 having an axial magnetic field e.g. from electromagnets 3, 20, an arc discharge box 10 adjoining a plasma chamber 12, and means for making the plasma box positive, or negative, with respect to a collector or control electrode so as to extract ions, or electrons, from the plasma box. To support the discharge a gas, e.g. hydrogen or argon, may be admitted at 9, the chamber 1 being continuously evacuated. The plasma chamber may be electrically isolated from the arc box, or may be replaced by a long narrow hole in the head of the arc box. The generator may be used in an electron microscope or in a charged particle accelerator.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP520762 | 1962-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB987371A true GB987371A (en) | 1965-03-31 |
Family
ID=11604729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB6095/63A Expired GB987371A (en) | 1962-02-15 | 1963-02-14 | Charged particle generator |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3275867A (en) |
| GB (1) | GB987371A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2169131A (en) * | 1984-12-22 | 1986-07-02 | English Electric Valve Co Ltd | Gas discharge devices |
| GB2212655A (en) * | 1987-11-13 | 1989-07-26 | Vg Instr Group | Ion source for a high sensitivity mass spectrometor |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE26192C (en) * | 1964-10-14 | R. THIEL, Theilhaber der Firma tremser Eisenwerk, Carl Thiel & Co. in Lübeck | Heating and cooling device for liquids | |
| CH448303A (en) * | 1965-05-25 | 1967-12-15 | Asea Ab | Arrangement for generating a continuous flow of electrons between an anode and a cathode |
| US3500077A (en) * | 1967-12-19 | 1970-03-10 | Atomic Energy Commission | Method and apparatus for accelerating ions out of a hot plasma region |
| US4695773A (en) * | 1981-12-18 | 1987-09-22 | The Perkin-Elmer Corporation | Field emission gun electrode geometry for improved focus stability |
| US4471224A (en) * | 1982-03-08 | 1984-09-11 | International Business Machines Corporation | Apparatus and method for generating high current negative ions |
| GB2411763B (en) * | 2004-03-05 | 2009-02-18 | Thermo Electron Corp | Flood gun for charge neutralization |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2463545A (en) * | 1943-04-30 | 1949-03-08 | Cons Eng Corp | Mass spectrometry |
-
1963
- 1963-02-13 US US258249A patent/US3275867A/en not_active Expired - Lifetime
- 1963-02-14 GB GB6095/63A patent/GB987371A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2169131A (en) * | 1984-12-22 | 1986-07-02 | English Electric Valve Co Ltd | Gas discharge devices |
| US4758766A (en) * | 1984-12-22 | 1988-07-19 | English Electric Valve Company Limited | Gas discharge devices utilizing electron injection for gas ionization |
| GB2212655A (en) * | 1987-11-13 | 1989-07-26 | Vg Instr Group | Ion source for a high sensitivity mass spectrometor |
Also Published As
| Publication number | Publication date |
|---|---|
| US3275867A (en) | 1966-09-27 |
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