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GB804597A - Method and apparatus for treating surfaces in the presence of a glow discharge - Google Patents

Method and apparatus for treating surfaces in the presence of a glow discharge

Info

Publication number
GB804597A
GB804597A GB14437/56A GB1443756A GB804597A GB 804597 A GB804597 A GB 804597A GB 14437/56 A GB14437/56 A GB 14437/56A GB 1443756 A GB1443756 A GB 1443756A GB 804597 A GB804597 A GB 804597A
Authority
GB
United Kingdom
Prior art keywords
tubes
glow discharge
chamber
discharge
carburizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB14437/56A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dortmund Hoerder Huettenunion AG
Original Assignee
Dortmund Hoerder Huettenunion AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dortmund Hoerder Huettenunion AG filed Critical Dortmund Hoerder Huettenunion AG
Publication of GB804597A publication Critical patent/GB804597A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/10—Reduction of greenhouse gas [GHG] emissions
    • Y02P10/143—Reduction of greenhouse gas [GHG] emissions of methane [CH4]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

804,597. Cementation. DORTMUND-HORDER HUTTENUNION A.G. May 9, 1956 [May 10, 1955], No. 14437/56. Class 72 An apparatus for carburizing or nitriding the surface of a metal body in a gas under low pressure in the presence of a glow discharge comprises a vacuum chamber in which there is a support for the body, an anode, a cathode for connection to the body and a shield of electrically insulating material adjacent the support with a narrow gap between it and a cathode part to which the discharge extends for restricting the extent of the discharge, the shield being entirely within the chamber, and spaced from the wall thereof. The apparatus is shown generally in Fig. 1 and comprises vacuum chamber 10 inside which are mounted tubes 32 the inside walls of which are to be treated. The ends of tubes 32 are fixed in supporting devices 34 held in holes 27, 29 in walls 16, 17. Metal rods or tubes 35 are placed coaxially inside tubes 32 and held in insulating tubes 37, 38 so that in operation of the apparatus a glow discharge ignites between rods or tubes 35 as anodes and the inner surface of tubes 32 as cathodes, the chamber 10 being fed with methane for carburizing or ammonia for nitriding. As shown in Fig. 3, supporting device 34 comprises metal cylinder 64, the flanges 65 of which fit into hole 27 of wall 16 and the bottom part 66 of which serves as a stop for the upper end of tube 32; and sleeve 67 of insulating material. In operation, the glow discharge spreads to region 76 between rod or tube 35 and cylinder 64, but is prevented from spreading further by sleeve 67 in combination with narrow annular gap 74. Specification 716,869 is referred to.
GB14437/56A 1955-05-10 1956-05-09 Method and apparatus for treating surfaces in the presence of a glow discharge Expired GB804597A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE345662X 1955-05-10

Publications (1)

Publication Number Publication Date
GB804597A true GB804597A (en) 1958-11-19

Family

ID=6254753

Family Applications (1)

Application Number Title Priority Date Filing Date
GB14437/56A Expired GB804597A (en) 1955-05-10 1956-05-09 Method and apparatus for treating surfaces in the presence of a glow discharge

Country Status (5)

Country Link
BE (1) BE547667A (en)
CH (1) CH345662A (en)
FR (1) FR1152732A (en)
GB (1) GB804597A (en)
LU (1) LU34343A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097154A (en) * 1959-01-13 1963-07-09 Nuclear Materials & Equipment Apparatus for method for etching objects
US3282814A (en) * 1961-12-13 1966-11-01 Berghaus Elektrophysik Anst Method and device for carrying out gas discharge processes
JPS5278637A (en) * 1975-12-25 1977-07-02 Fuji Electronics Co Ltd Ion carburizing

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU45647A1 (en) * 1964-03-12 1965-09-13
DE2606454C2 (en) * 1976-02-18 1978-01-12 lonit Anstalt Bernhard Berghaus, Vaduz Thermocouple insert
FR2446327A1 (en) * 1979-01-09 1980-08-08 Fours Indls Cie Internal nitriding and/or carburising of gun or extruder barrels - by thermochemical ion bombardment after creating uniform electric field
FR2525636A1 (en) * 1982-04-23 1983-10-28 Creusot Loire Ionic nitriding of holes in steel - of length up to one metre and dia. below ten milli:metres

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097154A (en) * 1959-01-13 1963-07-09 Nuclear Materials & Equipment Apparatus for method for etching objects
US3282814A (en) * 1961-12-13 1966-11-01 Berghaus Elektrophysik Anst Method and device for carrying out gas discharge processes
JPS5278637A (en) * 1975-12-25 1977-07-02 Fuji Electronics Co Ltd Ion carburizing
JPS5439221B2 (en) * 1975-12-25 1979-11-27

Also Published As

Publication number Publication date
BE547667A (en) 1900-01-01
CH345662A (en) 1960-04-15
LU34343A1 (en)
FR1152732A (en) 1958-02-24

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