GB578273A - Improvements in electron optical systems - Google Patents
Improvements in electron optical systemsInfo
- Publication number
- GB578273A GB578273A GB3510/43A GB351043A GB578273A GB 578273 A GB578273 A GB 578273A GB 3510/43 A GB3510/43 A GB 3510/43A GB 351043 A GB351043 A GB 351043A GB 578273 A GB578273 A GB 578273A
- Authority
- GB
- United Kingdom
- Prior art keywords
- axis
- electrons
- lens
- region
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 title 1
- 230000004075 alteration Effects 0.000 abstract 5
- 238000009825 accumulation Methods 0.000 abstract 1
- 230000002301 combined effect Effects 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/145—Combinations of electrostatic and magnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electron Beam Exposure (AREA)
Abstract
578,273. Electron lenses. BRITISH THOMSON - HOUSTON CO., Ltd., and GABOR, D. March 3, 1943, No. 3510. [Class 39 (i)] A dispersing electron, lens for correcting spherical aberration consists of an axially symmetrical electronic space charge confined within a limited region by combined electric and magnetic fields. The electron beam to be focused travels along the axis 17, Fig. 4, and passes first through a convergent magnetic lens 2. It then passes into the region within magnetic coil 4 in which electrons supplied by annular auxiliary cathode 6 are confined within the space marked 7 by the combined effect of the magnetic field, the positive electrode 5 and negatively charged end electrodes which as shown are the ends of coil casing 3. It is shown that, provided the cathode 6 is situated on or near the line of field 8, Fig. 5, which cuts the axis 17, there will be set up two rotating streams of electrons travelling in opposite directions and forming a highly concentrated space charge which, near the axis, increases with radial distance from the axis. The potential at the axis falls to zero and in order to prevent hollowing out of the beam, and the accumulation of excess energy electrons, electrons are removed from the region at a controlled rate by slightly positive electrode 16; the charge density ultimately falls to zero at the edges of the region and no electrons are collected by anode 5. The magnetic fields of the rotating streams combine to oppose and weaken the field of coil 4 at the axis. As the lens has a negative spherical aberration, it combines with ordinary lenses having a positive aberration to produce a compound lens of low spherical aberration and short focal length, suitable for electron microscopes. The Provisional Specification states that chromatic aberration may also be corrected.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3510/43A GB578273A (en) | 1943-03-03 | 1943-03-03 | Improvements in electron optical systems |
US522138A US2426866A (en) | 1943-03-03 | 1944-02-12 | Electron optical system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3510/43A GB578273A (en) | 1943-03-03 | 1943-03-03 | Improvements in electron optical systems |
Publications (1)
Publication Number | Publication Date |
---|---|
GB578273A true GB578273A (en) | 1946-06-21 |
Family
ID=9759687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3510/43A Expired GB578273A (en) | 1943-03-03 | 1943-03-03 | Improvements in electron optical systems |
Country Status (2)
Country | Link |
---|---|
US (1) | US2426866A (en) |
GB (1) | GB578273A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3731094A (en) * | 1970-08-21 | 1973-05-01 | Philips Corp | Electron beam apparatus with means for generating a rotation-symmetrical magnetic field |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1941157A (en) * | 1928-12-05 | 1933-12-26 | Raytheon Mfg Co | Electron discharge apparatus |
DE906737C (en) * | 1931-05-31 | 1954-03-18 | Siemens Ag | Arrangement for enlarged imaging of objects by means of electron beams |
US2128597A (en) * | 1935-08-07 | 1938-08-30 | Firm Fernseh Ag | Braun tube |
US2119679A (en) * | 1936-05-29 | 1938-06-07 | Charles V Litton | X-ray tube |
US2266411A (en) * | 1938-05-27 | 1941-12-16 | Int Standard Electric Corp | Electron tube |
US2288402A (en) * | 1941-01-29 | 1942-06-30 | Rca Corp | Television transmitting tube |
-
1943
- 1943-03-03 GB GB3510/43A patent/GB578273A/en not_active Expired
-
1944
- 1944-02-12 US US522138A patent/US2426866A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3731094A (en) * | 1970-08-21 | 1973-05-01 | Philips Corp | Electron beam apparatus with means for generating a rotation-symmetrical magnetic field |
Also Published As
Publication number | Publication date |
---|---|
US2426866A (en) | 1947-09-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB698005A (en) | Improvements in or relating to electron discharge devices | |
US2452919A (en) | Electron optical system | |
GB930673A (en) | Improvements in methods and apparatus for generating, accelerating and focusing electron beams | |
US3100260A (en) | Electron lens for reduction of spherical aberration | |
US3028491A (en) | Apparatus for producing and shaping a beam of charged particles | |
GB1178406A (en) | Electron Gun Including an Ion Trap. | |
GB578273A (en) | Improvements in electron optical systems | |
GB761008A (en) | Improvements in or relating to cathode ray tubes | |
GB564003A (en) | Electron lens | |
GB609480A (en) | Improvements in or relating to a electron discharge apparatus in which a flattened or ribbon-shaped electron beam is employed | |
US2380225A (en) | Electron discharge device | |
GB561554A (en) | Improvements in and relating to electron lenses | |
US4468563A (en) | Electron lens | |
GB908590A (en) | Charged particle gun | |
GB962086A (en) | Energy-selecting electron microscopes | |
JPS56128551A (en) | Electron gun | |
GB1086578A (en) | A machining method and device using a corpuscular beam | |
US4201933A (en) | Electron gun structure for a pickup tube | |
GB921585A (en) | Improvements in or relating to the compensation of the apertural defect of electron optical lenses | |
SU670991A1 (en) | Spherical aberration-corrected optronic device | |
GB669034A (en) | Improvements in focusing devices for electron microscopes | |
US3863095A (en) | Electron gun device of field emission type | |
GB805691A (en) | Improvements in or relating to circuit arrangements embodying electron lenses | |
GB1237636A (en) | Improvements relating to the focusing of electron beams | |
GB1367360A (en) | Electron-optical apparatus |