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GB2344005B - Method of monitoring turbo pump operation in ion implantation apparatus for use in manufacturing semiconductors - Google Patents

Method of monitoring turbo pump operation in ion implantation apparatus for use in manufacturing semiconductors

Info

Publication number
GB2344005B
GB2344005B GB9825193A GB9825193A GB2344005B GB 2344005 B GB2344005 B GB 2344005B GB 9825193 A GB9825193 A GB 9825193A GB 9825193 A GB9825193 A GB 9825193A GB 2344005 B GB2344005 B GB 2344005B
Authority
GB
United Kingdom
Prior art keywords
ion implantation
pump operation
implantation apparatus
turbo pump
manufacturing semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9825193A
Other versions
GB2344005A (en
GB9825193D0 (en
Inventor
Sun-Bong Choi
Dong-Ha Lim
Hyo-Sang Jung
Sung-Kyu Han
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority to GB9825193A priority Critical patent/GB2344005B/en
Publication of GB9825193D0 publication Critical patent/GB9825193D0/en
Priority to US09/318,409 priority patent/US6462331B1/en
Publication of GB2344005A publication Critical patent/GB2344005A/en
Application granted granted Critical
Publication of GB2344005B publication Critical patent/GB2344005B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB9825193A 1998-11-17 1998-11-17 Method of monitoring turbo pump operation in ion implantation apparatus for use in manufacturing semiconductors Expired - Fee Related GB2344005B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9825193A GB2344005B (en) 1998-11-17 1998-11-17 Method of monitoring turbo pump operation in ion implantation apparatus for use in manufacturing semiconductors
US09/318,409 US6462331B1 (en) 1998-11-17 1999-05-25 Method for monitoring turbo pump operation in an ion implantation apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9825193A GB2344005B (en) 1998-11-17 1998-11-17 Method of monitoring turbo pump operation in ion implantation apparatus for use in manufacturing semiconductors
US09/318,409 US6462331B1 (en) 1998-11-17 1999-05-25 Method for monitoring turbo pump operation in an ion implantation apparatus

Publications (3)

Publication Number Publication Date
GB9825193D0 GB9825193D0 (en) 1999-01-13
GB2344005A GB2344005A (en) 2000-05-24
GB2344005B true GB2344005B (en) 2000-12-27

Family

ID=26314687

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9825193A Expired - Fee Related GB2344005B (en) 1998-11-17 1998-11-17 Method of monitoring turbo pump operation in ion implantation apparatus for use in manufacturing semiconductors

Country Status (2)

Country Link
US (1) US6462331B1 (en)
GB (1) GB2344005B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416811B1 (en) 2001-04-27 2004-01-31 삼성전자주식회사 High energy ion implanter for semiconductor device manufacture
US6661017B1 (en) * 2002-05-29 2003-12-09 Ibis Technology Corporation Ion implantation system having an energy probe
KR100485385B1 (en) * 2002-12-17 2005-04-27 삼성전자주식회사 Charge exchanger and ion implanter having the same
KR100533568B1 (en) * 2004-07-15 2005-12-06 삼성전자주식회사 High energy ion implanter having monitoring function about charge exchanging gas
US8035080B2 (en) * 2009-10-30 2011-10-11 Axcelis Technologies, Inc. Method and system for increasing beam current above a maximum energy for a charge state
CN105097398A (en) * 2015-08-26 2015-11-25 成都森蓝光学仪器有限公司 Water cooling manner adopting annular hot cathode ion source neutralizer
US20230139138A1 (en) * 2021-10-29 2023-05-04 Axcelis Technologies, Inc. Charge filter magnet with variable achromaticity

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1108216A (en) * 1965-09-30 1968-04-03 Borg Warner Control system for power units such as electric motors and the like
US5300891A (en) * 1992-05-01 1994-04-05 Genus, Inc. Ion accelerator
US5598312A (en) * 1993-06-01 1997-01-28 Aerospatiale Societe Nationale Industrielle Device for controlling a mechanism driven by a lens one electric motor
GB2319909A (en) * 1996-11-28 1998-06-03 Gec Marconi Aerospace Limited Monitoring operation of a three phase electric motor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3353107A (en) 1959-10-06 1967-11-14 High Voltage Engineering Corp High voltage particle accelerators using charge transfer processes
US4018241A (en) * 1974-09-23 1977-04-19 The Regents Of The University Of Colorado Method and inlet control system for controlling a gas flow sample to an evacuated chamber
US4980556A (en) 1988-04-29 1990-12-25 Ionex/Hei Corporation Apparatus for generating high currents of negative ions
US5672882A (en) * 1995-12-29 1997-09-30 Advanced Micro Devices, Inc. Ion implantation device with a closed-loop process chamber pressure control system
JP3129226B2 (en) * 1997-03-25 2001-01-29 日本電気株式会社 Method of manufacturing field emission type cold cathode mounted device
US6110322A (en) * 1998-03-06 2000-08-29 Applied Materials, Inc. Prevention of ground fault interrupts in a semiconductor processing system
US5959305A (en) * 1998-06-19 1999-09-28 Eaton Corporation Method and apparatus for monitoring charge neutralization operation

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1108216A (en) * 1965-09-30 1968-04-03 Borg Warner Control system for power units such as electric motors and the like
US5300891A (en) * 1992-05-01 1994-04-05 Genus, Inc. Ion accelerator
US5598312A (en) * 1993-06-01 1997-01-28 Aerospatiale Societe Nationale Industrielle Device for controlling a mechanism driven by a lens one electric motor
GB2319909A (en) * 1996-11-28 1998-06-03 Gec Marconi Aerospace Limited Monitoring operation of a three phase electric motor

Also Published As

Publication number Publication date
GB2344005A (en) 2000-05-24
US6462331B1 (en) 2002-10-08
GB9825193D0 (en) 1999-01-13

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20091117