GB2319890B - Semiconductor device having a reduced leakage current transistor and method of manufacturing the same - Google Patents
Semiconductor device having a reduced leakage current transistor and method of manufacturing the sameInfo
- Publication number
- GB2319890B GB2319890B GB9725023A GB9725023A GB2319890B GB 2319890 B GB2319890 B GB 2319890B GB 9725023 A GB9725023 A GB 9725023A GB 9725023 A GB9725023 A GB 9725023A GB 2319890 B GB2319890 B GB 2319890B
- Authority
- GB
- United Kingdom
- Prior art keywords
- manufacturing
- semiconductor device
- same
- leakage current
- current transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
- H10D62/149—Source or drain regions of field-effect devices
- H10D62/151—Source or drain regions of field-effect devices of IGFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/112—Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
- H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
- H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
- H10D84/013—Manufacturing their source or drain regions, e.g. silicided source or drain regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Semiconductor Memories (AREA)
- Formation Of Insulating Films (AREA)
- Element Separation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP08315115A JP3123937B2 (en) | 1996-11-26 | 1996-11-26 | Semiconductor device and method of manufacturing the same |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9725023D0 GB9725023D0 (en) | 1998-01-28 |
GB2319890A GB2319890A (en) | 1998-06-03 |
GB2319890B true GB2319890B (en) | 1998-12-09 |
Family
ID=18061598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9725023A Expired - Fee Related GB2319890B (en) | 1996-11-26 | 1997-11-26 | Semiconductor device having a reduced leakage current transistor and method of manufacturing the same |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP3123937B2 (en) |
KR (1) | KR100305625B1 (en) |
CN (1) | CN1185661A (en) |
GB (1) | GB2319890B (en) |
TW (1) | TW351838B (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3912558A (en) * | 1974-05-03 | 1975-10-14 | Fairchild Camera Instr Co | Method of MOS circuit fabrication |
US4030952A (en) * | 1974-04-18 | 1977-06-21 | Fairchild Camera And Instrument Corporation | Method of MOS circuit fabrication |
EP0218408A2 (en) * | 1985-09-25 | 1987-04-15 | Hewlett-Packard Company | Process for forming lightly-doped-grain (LDD) structure in integrated circuits |
EP0339586A2 (en) * | 1988-04-25 | 1989-11-02 | Nec Corporation | Semiconductor device having improved gate capacitance and manufacturing method therefor |
US5472890A (en) * | 1994-04-28 | 1995-12-05 | Nec Corporation | Method for fabricating an insulating gate field effect transistor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07297397A (en) * | 1994-04-23 | 1995-11-10 | Nec Corp | Manufacture of semiconductor device |
-
1996
- 1996-11-26 JP JP08315115A patent/JP3123937B2/en not_active Expired - Fee Related
-
1997
- 1997-11-25 TW TW086117887A patent/TW351838B/en not_active IP Right Cessation
- 1997-11-26 KR KR1019970063231A patent/KR100305625B1/en not_active IP Right Cessation
- 1997-11-26 CN CN97121689A patent/CN1185661A/en active Pending
- 1997-11-26 GB GB9725023A patent/GB2319890B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4030952A (en) * | 1974-04-18 | 1977-06-21 | Fairchild Camera And Instrument Corporation | Method of MOS circuit fabrication |
US3912558A (en) * | 1974-05-03 | 1975-10-14 | Fairchild Camera Instr Co | Method of MOS circuit fabrication |
EP0218408A2 (en) * | 1985-09-25 | 1987-04-15 | Hewlett-Packard Company | Process for forming lightly-doped-grain (LDD) structure in integrated circuits |
EP0339586A2 (en) * | 1988-04-25 | 1989-11-02 | Nec Corporation | Semiconductor device having improved gate capacitance and manufacturing method therefor |
US5472890A (en) * | 1994-04-28 | 1995-12-05 | Nec Corporation | Method for fabricating an insulating gate field effect transistor |
Also Published As
Publication number | Publication date |
---|---|
TW351838B (en) | 1999-02-01 |
GB2319890A (en) | 1998-06-03 |
JP3123937B2 (en) | 2001-01-15 |
CN1185661A (en) | 1998-06-24 |
JPH10163480A (en) | 1998-06-19 |
GB9725023D0 (en) | 1998-01-28 |
KR100305625B1 (en) | 2001-10-19 |
KR19980042797A (en) | 1998-08-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) |
Free format text: REGISTERED BETWEEN 20141212 AND 20141217 |
|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20141126 |