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GB2199594B - Vapor deposition growth of group ii-vi semiconductor materials - Google Patents

Vapor deposition growth of group ii-vi semiconductor materials

Info

Publication number
GB2199594B
GB2199594B GB8729380A GB8729380A GB2199594B GB 2199594 B GB2199594 B GB 2199594B GB 8729380 A GB8729380 A GB 8729380A GB 8729380 A GB8729380 A GB 8729380A GB 2199594 B GB2199594 B GB 2199594B
Authority
GB
United Kingdom
Prior art keywords
group
vapor deposition
semiconductor materials
deposition growth
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8729380A
Other versions
GB2199594A (en
GB8729380D0 (en
Inventor
William E Hoke
Lindley T Specht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Publication of GB8729380D0 publication Critical patent/GB8729380D0/en
Publication of GB2199594A publication Critical patent/GB2199594A/en
Application granted granted Critical
Publication of GB2199594B publication Critical patent/GB2199594B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
    • C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Led Devices (AREA)
GB8729380A 1986-12-18 1987-12-16 Vapor deposition growth of group ii-vi semiconductor materials Expired - Fee Related GB2199594B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US94323886A 1986-12-18 1986-12-18

Publications (3)

Publication Number Publication Date
GB8729380D0 GB8729380D0 (en) 1988-01-27
GB2199594A GB2199594A (en) 1988-07-13
GB2199594B true GB2199594B (en) 1991-08-07

Family

ID=25479292

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8729380A Expired - Fee Related GB2199594B (en) 1986-12-18 1987-12-16 Vapor deposition growth of group ii-vi semiconductor materials

Country Status (5)

Country Link
JP (1) JPS63198336A (en)
CA (1) CA1319587C (en)
DE (1) DE3743132A1 (en)
FR (1) FR2608637A1 (en)
GB (1) GB2199594B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2078695A (en) * 1980-05-27 1982-01-13 Secr Defence Cadmium Mercury Telluride Deposition
GB2130189A (en) * 1982-10-19 1984-05-31 Secr Defence Vapour deposition of films
GB2146663A (en) * 1983-09-13 1985-04-24 Secr Defence Manufacture of cadmium mercury telluride
GB2193228A (en) * 1986-06-20 1988-02-03 Raytheon Co Low temperature metalorganic chemical vapor deposition growth of group ii-vi semiconductor materials

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3168017D1 (en) * 1980-05-27 1985-02-14 Secr Defence Brit Manufacture of cadmium mercury telluride

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2078695A (en) * 1980-05-27 1982-01-13 Secr Defence Cadmium Mercury Telluride Deposition
GB2130189A (en) * 1982-10-19 1984-05-31 Secr Defence Vapour deposition of films
GB2146663A (en) * 1983-09-13 1985-04-24 Secr Defence Manufacture of cadmium mercury telluride
GB2193228A (en) * 1986-06-20 1988-02-03 Raytheon Co Low temperature metalorganic chemical vapor deposition growth of group ii-vi semiconductor materials

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Appl. Phys. Lett. 46(4)15th. Feb 1985 p *
Appl. Phys. Lett. 48(24)16th. June 1986, *
p. 398-400 *
pp. 1669-1671 *

Also Published As

Publication number Publication date
GB2199594A (en) 1988-07-13
GB8729380D0 (en) 1988-01-27
JPS63198336A (en) 1988-08-17
CA1319587C (en) 1993-06-29
DE3743132A1 (en) 1988-07-21
FR2608637A1 (en) 1988-06-24

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19931216