GB2101331A - Capacitive differential pressure transducer - Google Patents
Capacitive differential pressure transducer Download PDFInfo
- Publication number
- GB2101331A GB2101331A GB8216477A GB8216477A GB2101331A GB 2101331 A GB2101331 A GB 2101331A GB 8216477 A GB8216477 A GB 8216477A GB 8216477 A GB8216477 A GB 8216477A GB 2101331 A GB2101331 A GB 2101331A
- Authority
- GB
- United Kingdom
- Prior art keywords
- diaphragms
- pressure
- central member
- transducer
- capacitors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000003990 capacitor Substances 0.000 claims abstract description 55
- 238000006073 displacement reaction Methods 0.000 claims abstract description 11
- 230000004044 response Effects 0.000 claims abstract description 9
- 239000002775 capsule Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 241001463139 Vitta Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
- G01L13/026—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms involving double diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US27880981A | 1981-06-29 | 1981-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB2101331A true GB2101331A (en) | 1983-01-12 |
Family
ID=23066457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB8216477A Withdrawn GB2101331A (en) | 1981-06-29 | 1982-06-07 | Capacitive differential pressure transducer |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5844324A (de) |
| DE (1) | DE3223248A1 (de) |
| FR (1) | FR2508641A1 (de) |
| GB (1) | GB2101331A (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0744603A1 (de) * | 1995-05-26 | 1996-11-27 | Omron Corporation | Linearen kapazitiven Wandler durch Membranmittenfestlegung |
| US6252759B1 (en) * | 1994-03-18 | 2001-06-26 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensors or capacitive differential pressure sensors |
| RU2237874C2 (ru) * | 2001-10-18 | 2004-10-10 | Открытое акционерное общество Энгельсское опытно-конструкторское бюро "Сигнал" им.А.И.Глухарева | Емкостный датчик разности давлений |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4333753A1 (de) * | 1993-10-04 | 1994-05-11 | Bosch Gmbh Robert | Kapazitiver Differenzdrucksensor |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1396745A (fr) * | 1964-05-22 | 1965-04-23 | Ultra Electronics Ltd | Transducteur électromécanique |
| US3691842A (en) * | 1970-09-08 | 1972-09-19 | Beckman Instruments Inc | Differential pressure transducer |
| SE412956B (sv) * | 1974-04-04 | 1980-03-24 | Rosemount Inc | Kapacitiv avkenningsanordning |
| US3965746A (en) * | 1974-11-04 | 1976-06-29 | Teledyne Industries, Inc. | Pressure transducer |
| US4336567A (en) * | 1980-06-30 | 1982-06-22 | The Bendix Corporation | Differential pressure transducer |
-
1982
- 1982-06-07 GB GB8216477A patent/GB2101331A/en not_active Withdrawn
- 1982-06-22 DE DE19823223248 patent/DE3223248A1/de not_active Withdrawn
- 1982-06-28 FR FR8211275A patent/FR2508641A1/fr not_active Withdrawn
- 1982-06-29 JP JP11088682A patent/JPS5844324A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6252759B1 (en) * | 1994-03-18 | 2001-06-26 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensors or capacitive differential pressure sensors |
| EP0744603A1 (de) * | 1995-05-26 | 1996-11-27 | Omron Corporation | Linearen kapazitiven Wandler durch Membranmittenfestlegung |
| US5801313A (en) * | 1995-05-26 | 1998-09-01 | Omron Corporation | Capacitive sensor |
| CN1085485C (zh) * | 1995-05-26 | 2002-05-22 | 欧姆龙株式会社 | 静电电容式传感器 |
| RU2237874C2 (ru) * | 2001-10-18 | 2004-10-10 | Открытое акционерное общество Энгельсское опытно-конструкторское бюро "Сигнал" им.А.И.Глухарева | Емкостный датчик разности давлений |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3223248A1 (de) | 1983-01-13 |
| JPS5844324A (ja) | 1983-03-15 |
| FR2508641A1 (fr) | 1982-12-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |