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GB202305643D0 - Ruthenium complexes and process for producing ruthenium film - Google Patents

Ruthenium complexes and process for producing ruthenium film

Info

Publication number
GB202305643D0
GB202305643D0 GBGB2305643.5A GB202305643A GB202305643D0 GB 202305643 D0 GB202305643 D0 GB 202305643D0 GB 202305643 A GB202305643 A GB 202305643A GB 202305643 D0 GB202305643 D0 GB 202305643D0
Authority
GB
United Kingdom
Prior art keywords
ruthenium
producing
complexes
film
ruthenium film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2305643.5A
Other versions
GB2629153A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Johnson Matthey PLC
Original Assignee
Johnson Matthey PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Johnson Matthey PLC filed Critical Johnson Matthey PLC
Priority to GB2305643.5A priority Critical patent/GB2629153A/en
Publication of GB202305643D0 publication Critical patent/GB202305643D0/en
Priority to TW113111397A priority patent/TWI888075B/en
Priority to PCT/GB2024/050908 priority patent/WO2024218468A1/en
Publication of GB2629153A publication Critical patent/GB2629153A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
    • C07F15/0006—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table compounds of the platinum group
    • C07F15/0046—Ruthenium compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
GB2305643.5A 2023-04-18 2023-04-18 Ruthenium complexes and process for producing ruthenium film Pending GB2629153A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB2305643.5A GB2629153A (en) 2023-04-18 2023-04-18 Ruthenium complexes and process for producing ruthenium film
TW113111397A TWI888075B (en) 2023-04-18 2024-03-27 Ruthenium complexes and process for producing ruthenium film
PCT/GB2024/050908 WO2024218468A1 (en) 2023-04-18 2024-04-03 Ruthenium complexes and process for producing ruthenium film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2305643.5A GB2629153A (en) 2023-04-18 2023-04-18 Ruthenium complexes and process for producing ruthenium film

Publications (2)

Publication Number Publication Date
GB202305643D0 true GB202305643D0 (en) 2023-05-31
GB2629153A GB2629153A (en) 2024-10-23

Family

ID=86497227

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2305643.5A Pending GB2629153A (en) 2023-04-18 2023-04-18 Ruthenium complexes and process for producing ruthenium film

Country Status (2)

Country Link
GB (1) GB2629153A (en)
WO (1) WO2024218468A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US884044A (en) 1907-08-16 1908-04-07 William T Rice Device for cleaning combs.
US5352488A (en) * 1993-05-14 1994-10-04 Syracuse University Chemical vapor deposition process employing metal pentadienyl complexes
EP2107065A1 (en) 2008-04-01 2009-10-07 Umicore AG & Co. KG Ruthenium complexes with (P-P)-coordinated di-phosphor donor ligands and method for production of same
TWI610932B (en) 2012-12-07 2018-01-11 東曹股份有限公司 Ruthenium complex and method for producing the same, cationic tris(nitrile) complex and method for producing the same, and method for producing ruthenium-containing film
JPWO2021187485A1 (en) * 2020-03-18 2021-09-23

Also Published As

Publication number Publication date
TW202444732A (en) 2024-11-16
GB2629153A (en) 2024-10-23
WO2024218468A1 (en) 2024-10-24

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