GB1511153A - Charged particle microprobe systems - Google Patents
Charged particle microprobe systemsInfo
- Publication number
- GB1511153A GB1511153A GB1711875A GB1711875A GB1511153A GB 1511153 A GB1511153 A GB 1511153A GB 1711875 A GB1711875 A GB 1711875A GB 1711875 A GB1711875 A GB 1711875A GB 1511153 A GB1511153 A GB 1511153A
- Authority
- GB
- United Kingdom
- Prior art keywords
- per cent
- amount
- charged particle
- moo
- bao
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 title abstract 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- 239000004615 ingredient Substances 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Glass Compositions (AREA)
Abstract
1511153 Glass composition AMERICAN OPTICAL CORP 24 April 1975 [24 April 1974 (3)] 17118/75 Heading C1M [Also in Division H1] A shielding tube in a charged particle microprobe system is of resistance 10<SP>3</SP> to 10<SP>9</SP> ohms, and may be a semiconducting glass of 70 to 90 wt. per cent of the essential ingredients V 2 O 5 , MoO 3 and P 2 O 5 with the V 2 O 5 being in amount 25 to 50 wt per cent of the essential ingredients, MoO 3 in amount 35 to 65 wt per cent and P 2 O 5 in amount 10 to 29 wt per cent, together with 2 to 10 wt per cent of Fe 3 O 4 and/or CO 3 O 4 , the Fe 3 O 4 being in amount 0 to 10 wt per cent and the CO 3 O 4 in amount 0 to 4 wt per cent, and together with 3 to 20 wt per cent of BaO, Al 2 O 3 and /or CaO, the BaO being in amount 0 to 15 wt per cent, the Al 2 O 3 being in amount 0 to 5 wt per cent and CaO in amount 0 to 2 wt per cent. Table I lists particular compositions, and characteristics are discussed w.r.t. Figs. 3 to 5 (not shown).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/463,628 US3950176A (en) | 1974-04-24 | 1974-04-24 | Semiconducting glasses and the method of preparation thereof |
| US463630A US3927321A (en) | 1974-04-24 | 1974-04-24 | Electron microscope beam tube |
| US05/463,629 US3959651A (en) | 1974-04-24 | 1974-04-24 | Electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1511153A true GB1511153A (en) | 1978-05-17 |
Family
ID=27412902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1711875A Expired GB1511153A (en) | 1974-04-24 | 1975-04-24 | Charged particle microprobe systems |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1511153A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2140196A (en) * | 1983-05-05 | 1984-11-21 | Cambridge Instr Ltd | Particle beam lenses |
-
1975
- 1975-04-24 GB GB1711875A patent/GB1511153A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2140196A (en) * | 1983-05-05 | 1984-11-21 | Cambridge Instr Ltd | Particle beam lenses |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| 732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
| PCNP | Patent ceased through non-payment of renewal fee |