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GB1499549A - Deposition of ruthenium - Google Patents

Deposition of ruthenium

Info

Publication number
GB1499549A
GB1499549A GB21497/75A GB2149775A GB1499549A GB 1499549 A GB1499549 A GB 1499549A GB 21497/75 A GB21497/75 A GB 21497/75A GB 2149775 A GB2149775 A GB 2149775A GB 1499549 A GB1499549 A GB 1499549A
Authority
GB
United Kingdom
Prior art keywords
substrate
complex
acetylacetone
alkyl
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB21497/75A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inco Europe Ltd
Original Assignee
Inco Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inco Europe Ltd filed Critical Inco Europe Ltd
Priority to GB21497/75A priority Critical patent/GB1499549A/en
Priority to ZA762641A priority patent/ZA762641B/xx
Priority to AU13695/76A priority patent/AU1369576A/en
Priority to CA252,239A priority patent/CA1087040A/en
Priority to NL7605002A priority patent/NL7605002A/xx
Priority to CH594476A priority patent/CH603809A5/xx
Priority to ES448043A priority patent/ES448043A1/es
Priority to FR7614916A priority patent/FR2311859A1/fr
Priority to DE19762622181 priority patent/DE2622181A1/de
Priority to SE7605668A priority patent/SE7605668L/xx
Priority to AT763662A priority patent/ATA366276A/de
Priority to DK220776A priority patent/DK220776A/da
Priority to BE167182A priority patent/BE842027A/xx
Priority to JP51057340A priority patent/JPS51141738A/ja
Publication of GB1499549A publication Critical patent/GB1499549A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Contacts (AREA)
GB21497/75A 1975-05-20 1975-05-20 Deposition of ruthenium Expired GB1499549A (en)

Priority Applications (14)

Application Number Priority Date Filing Date Title
GB21497/75A GB1499549A (en) 1975-05-20 1975-05-20 Deposition of ruthenium
ZA762641A ZA762641B (en) 1975-05-20 1976-05-03 Deposition of ruthenium
AU13695/76A AU1369576A (en) 1975-05-20 1976-05-06 Gas plated ruthenium coating
CA252,239A CA1087040A (en) 1975-05-20 1976-05-11 Chemical vapor deposition
NL7605002A NL7605002A (nl) 1975-05-20 1976-05-11 Werkwijze voor het afzetten van ruthenium op een heet substraat.
CH594476A CH603809A5 (xx) 1975-05-20 1976-05-12
ES448043A ES448043A1 (es) 1975-05-20 1976-05-18 Un procedimiento de deposicion de rutenio metalico sobre un sustrato caliente.
FR7614916A FR2311859A1 (fr) 1975-05-20 1976-05-18 Depot de ruthenium
DE19762622181 DE2622181A1 (de) 1975-05-20 1976-05-19 Verfahren zum vakuum-aufdampfen von ruthenium
SE7605668A SE7605668L (sv) 1975-05-20 1976-05-19 Sett att framstella ett ytoverdrag av metalliskt rutenium
AT763662A ATA366276A (de) 1975-05-20 1976-05-19 Verfahren zur abscheidung von metallischem ruthenium
DK220776A DK220776A (da) 1975-05-20 1976-05-19 Fremgangsmade til udfeldning af metallisk ruthenium
BE167182A BE842027A (fr) 1975-05-20 1976-05-20 Perfectionnements au depot de ruthenium
JP51057340A JPS51141738A (en) 1975-05-20 1976-05-20 Method of depositing luthenium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB21497/75A GB1499549A (en) 1975-05-20 1975-05-20 Deposition of ruthenium

Publications (1)

Publication Number Publication Date
GB1499549A true GB1499549A (en) 1978-02-01

Family

ID=10163942

Family Applications (1)

Application Number Title Priority Date Filing Date
GB21497/75A Expired GB1499549A (en) 1975-05-20 1975-05-20 Deposition of ruthenium

Country Status (14)

Country Link
JP (1) JPS51141738A (xx)
AT (1) ATA366276A (xx)
AU (1) AU1369576A (xx)
BE (1) BE842027A (xx)
CA (1) CA1087040A (xx)
CH (1) CH603809A5 (xx)
DE (1) DE2622181A1 (xx)
DK (1) DK220776A (xx)
ES (1) ES448043A1 (xx)
FR (1) FR2311859A1 (xx)
GB (1) GB1499549A (xx)
NL (1) NL7605002A (xx)
SE (1) SE7605668L (xx)
ZA (1) ZA762641B (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9725794B2 (en) 2014-12-17 2017-08-08 Kennametal Inc. Cemented carbide articles and applications thereof

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301865A (ja) * 1988-05-30 1989-12-06 Nippon Telegr & Teleph Corp <Ntt> 薄膜成長方法および薄膜成長装置
JP2799763B2 (ja) * 1990-07-11 1998-09-21 同和鉱業株式会社 有機金属錯体を用いる薄膜の製造法
JP2802676B2 (ja) * 1990-07-13 1998-09-24 同和鉱業株式会社 １，３―ジケトン系有機金属錯体を用いる薄膜の製造方法
AT410757B (de) * 1993-12-10 2003-07-25 Tyrolia Freizeitgeraete Skibremse
JP5792438B2 (ja) * 2010-08-12 2015-10-14 東京エレクトロン株式会社 成膜装置及び成膜方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9725794B2 (en) 2014-12-17 2017-08-08 Kennametal Inc. Cemented carbide articles and applications thereof

Also Published As

Publication number Publication date
CA1087040A (en) 1980-10-07
FR2311859A1 (fr) 1976-12-17
AU1369576A (en) 1977-11-10
JPS51141738A (en) 1976-12-06
CH603809A5 (xx) 1978-08-31
SE7605668L (sv) 1976-11-21
ATA366276A (de) 1977-12-15
BE842027A (fr) 1976-11-22
NL7605002A (nl) 1976-11-23
DE2622181A1 (de) 1976-12-09
ZA762641B (en) 1977-04-27
DK220776A (da) 1976-11-21
ES448043A1 (es) 1977-07-01

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Legal Events

Date Code Title Description
CSNS Application of which complete specification have been accepted and published, but patent is not sealed