GB1497913A - Ion source - Google Patents
Ion sourceInfo
- Publication number
- GB1497913A GB1497913A GB44801/75A GB4480175A GB1497913A GB 1497913 A GB1497913 A GB 1497913A GB 44801/75 A GB44801/75 A GB 44801/75A GB 4480175 A GB4480175 A GB 4480175A GB 1497913 A GB1497913 A GB 1497913A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chamber
- filament
- reactive substance
- ion source
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 abstract 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052787 antimony Inorganic materials 0.000 abstract 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 229910052785 arsenic Inorganic materials 0.000 abstract 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 238000011109 contamination Methods 0.000 abstract 1
- 238000000605 extraction Methods 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 239000001307 helium Substances 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 abstract 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
- H01J27/14—Other arc discharge ion sources using an applied magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Abstract
1497913 Ion sources INTERNATIONAL BUSINESS MACHINES CO 30 Oct 1975 [29 Nov 1974] 44801/75 Heading H1D An ion source comprises a first chamber 12 and a second chamber 26 separated by an apertured wall 28, the first chamber 12 containing an inert gas, e.g. argon, helium or hydrogen which is ionised by an arc between a thermionic filament and the wall of the chamber, electrons from the first chamber passing into the second chamber 26 where a reactive substance, such as boron, phosphorus, arsenic or antimony, is ionized by a separate arc, the ions being extracted via aperture 38 and there being a magnetic field along the axes of the two chambers provided by a coil 48. The separation of the two chambers is said to prevent contamination of the filament by the reactive substance. The first chamber is cooled by fluid passing through conduits 18 and channels 18. Voltages are supplied along leads 70 and 72 to the respective chamber walls and along leads 22 to the filament 20. In Fig. 2 (not shown) a further potential is applied to the extraction aperture.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US528312A US3924134A (en) | 1974-11-29 | 1974-11-29 | Double chamber ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1497913A true GB1497913A (en) | 1978-01-12 |
Family
ID=24105152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB44801/75A Expired GB1497913A (en) | 1974-11-29 | 1975-10-30 | Ion source |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3924134A (en) |
| JP (1) | JPS5318677B2 (en) |
| BR (1) | BR7507901A (en) |
| CA (1) | CA1039860A (en) |
| CH (1) | CH587562A5 (en) |
| DE (1) | DE2552783B2 (en) |
| ES (1) | ES443060A1 (en) |
| FR (1) | FR2293055A1 (en) |
| GB (1) | GB1497913A (en) |
| IT (1) | IT1042770B (en) |
| NL (1) | NL7513431A (en) |
| SE (1) | SE402672B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2212655A (en) * | 1987-11-13 | 1989-07-26 | Vg Instr Group | Ion source for a high sensitivity mass spectrometor |
| CN112086330A (en) * | 2020-10-10 | 2020-12-15 | 大连交通大学 | High energy ion source |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4045677A (en) * | 1976-06-11 | 1977-08-30 | Cornell Research Foundation, Inc. | Intense ion beam generator |
| US4105916A (en) * | 1977-02-28 | 1978-08-08 | Extranuclear Laboratories, Inc. | Methods and apparatus for simultaneously producing and electronically separating the chemical ionization mass spectrum and the electron impact ionization mass spectrum of the same sample material |
| US4175234A (en) * | 1977-08-05 | 1979-11-20 | University Of Virginia | Apparatus for producing ions of thermally labile or nonvolatile solids |
| US4206383A (en) * | 1978-09-11 | 1980-06-03 | California Institute Of Technology | Miniature cyclotron resonance ion source using small permanent magnet |
| US4301391A (en) * | 1979-04-26 | 1981-11-17 | Hughes Aircraft Company | Dual discharge plasma device |
| FR2550681B1 (en) * | 1983-08-12 | 1985-12-06 | Centre Nat Rech Scient | ION SOURCE HAS AT LEAST TWO IONIZATION CHAMBERS, PARTICULARLY FOR THE FORMATION OF CHEMICALLY REACTIVE ION BEAMS |
| FR2595868B1 (en) * | 1986-03-13 | 1988-05-13 | Commissariat Energie Atomique | ION SOURCE WITH ELECTRONIC CYCLOTRON RESONANCE WITH COAXIAL INJECTION OF ELECTROMAGNETIC WAVES |
| KR900003310B1 (en) * | 1986-05-27 | 1990-05-14 | 리가가구 겡큐소 | Ion generator |
| US4841197A (en) * | 1986-05-28 | 1989-06-20 | Nihon Shinku Gijutsu Kabushiki Kaisha | Double-chamber ion source |
| JP2530434B2 (en) * | 1986-08-13 | 1996-09-04 | 日本テキサス・インスツルメンツ株式会社 | Ion generator |
| GB2230644B (en) * | 1989-02-16 | 1994-03-23 | Tokyo Electron Ltd | Electron beam excitation ion source |
| JP2873693B2 (en) * | 1989-05-25 | 1999-03-24 | 東京エレクトロン株式会社 | Ion source |
| RU2084085C1 (en) * | 1995-07-14 | 1997-07-10 | Центральный научно-исследовательский институт машиностроения | Closed electron drift accelerator |
| US5962858A (en) * | 1997-07-10 | 1999-10-05 | Eaton Corporation | Method of implanting low doses of ions into a substrate |
| US6452338B1 (en) * | 1999-12-13 | 2002-09-17 | Semequip, Inc. | Electron beam ion source with integral low-temperature vaporizer |
| US6642641B2 (en) * | 2001-04-19 | 2003-11-04 | Inficon, Inc. | Apparatus for measuring total pressure and partial pressure with common electron beam |
| CN103887132B (en) * | 2012-12-20 | 2016-12-28 | 中芯国际集成电路制造(上海)有限公司 | The ion source of injection device and ion injection method |
| US20140374583A1 (en) * | 2013-06-24 | 2014-12-25 | Agilent Technologies, Inc. | Electron ionization (ei) utilizing different ei energies |
| US9117617B2 (en) * | 2013-06-24 | 2015-08-25 | Agilent Technologies, Inc. | Axial magnetic ion source and related ionization methods |
| US9711318B2 (en) | 2013-12-20 | 2017-07-18 | Nicholas R. White | Ribbon beam ion source of arbitrary length |
| US10176977B2 (en) | 2014-12-12 | 2019-01-08 | Agilent Technologies, Inc. | Ion source for soft electron ionization and related systems and methods |
| DE112019002405B4 (en) * | 2018-05-11 | 2023-02-23 | Leco Corporation | Two-stage ion source, having closed and open ion volumes |
| CN113709959A (en) * | 2020-05-22 | 2021-11-26 | 江苏鲁汶仪器有限公司 | Breakdown-preventing ion source discharge device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL285354A (en) * | 1961-12-11 | |||
| GB1252569A (en) * | 1968-12-17 | 1971-11-10 | ||
| FR2061809A5 (en) * | 1969-04-04 | 1971-06-25 | Commissariat Energie Atomique |
-
1974
- 1974-11-29 US US528312A patent/US3924134A/en not_active Expired - Lifetime
-
1975
- 1975-09-23 IT IT27524/75A patent/IT1042770B/en active
- 1975-09-26 JP JP11571375A patent/JPS5318677B2/ja not_active Expired
- 1975-10-06 FR FR7531451A patent/FR2293055A1/en active Granted
- 1975-10-21 SE SE7511786A patent/SE402672B/en unknown
- 1975-10-27 CA CA238,428A patent/CA1039860A/en not_active Expired
- 1975-10-30 GB GB44801/75A patent/GB1497913A/en not_active Expired
- 1975-11-18 NL NL7513431A patent/NL7513431A/en not_active Application Discontinuation
- 1975-11-25 DE DE19752552783 patent/DE2552783B2/en not_active Ceased
- 1975-11-26 CH CH1532075A patent/CH587562A5/xx not_active IP Right Cessation
- 1975-11-27 BR BR7507901*A patent/BR7507901A/en unknown
- 1975-11-28 ES ES443060A patent/ES443060A1/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2212655A (en) * | 1987-11-13 | 1989-07-26 | Vg Instr Group | Ion source for a high sensitivity mass spectrometor |
| CN112086330A (en) * | 2020-10-10 | 2020-12-15 | 大连交通大学 | High energy ion source |
Also Published As
| Publication number | Publication date |
|---|---|
| US3924134A (en) | 1975-12-02 |
| FR2293055B1 (en) | 1978-04-07 |
| CA1039860A (en) | 1978-10-03 |
| DE2552783B2 (en) | 1977-04-28 |
| JPS5165299A (en) | 1976-06-05 |
| FR2293055A1 (en) | 1976-06-25 |
| BR7507901A (en) | 1976-08-10 |
| SE402672B (en) | 1978-07-10 |
| ES443060A1 (en) | 1977-04-01 |
| JPS5318677B2 (en) | 1978-06-16 |
| IT1042770B (en) | 1980-01-30 |
| CH587562A5 (en) | 1977-05-13 |
| SE7511786L (en) | 1976-05-31 |
| NL7513431A (en) | 1976-06-01 |
| DE2552783A1 (en) | 1976-08-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |