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GB1242237A - Improvements in and relating to roller arrangements - Google Patents

Improvements in and relating to roller arrangements

Info

Publication number
GB1242237A
GB1242237A GB5679268A GB5679268A GB1242237A GB 1242237 A GB1242237 A GB 1242237A GB 5679268 A GB5679268 A GB 5679268A GB 5679268 A GB5679268 A GB 5679268A GB 1242237 A GB1242237 A GB 1242237A
Authority
GB
United Kingdom
Prior art keywords
semi
roller
rollers
wafer
working roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5679268A
Inventor
Kenneth Hobbs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASSOCIATED SEMICONDUCTOR MFT
Original Assignee
ASSOCIATED SEMICONDUCTOR MFT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASSOCIATED SEMICONDUCTOR MFT filed Critical ASSOCIATED SEMICONDUCTOR MFT
Priority to GB5679268A priority Critical patent/GB1242237A/en
Priority to DE19691957569 priority patent/DE1957569A1/en
Priority to US3626492D priority patent/US3626492A/en
Priority to NL6917697A priority patent/NL6917697A/xx
Priority to JP9459469A priority patent/JPS4923952B1/ja
Priority to FR6941119A priority patent/FR2024549A1/fr
Publication of GB1242237A publication Critical patent/GB1242237A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
    • B28D5/0029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rotating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S100/00—Presses
    • Y10S100/917—Magnetic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y10T225/307—Combined with preliminary weakener or with nonbreaking cutter
    • Y10T225/321—Preliminary weakener
    • Y10T225/325—With means to apply moment of force to weakened work
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y10T225/371—Movable breaking tool

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Rolling Contact Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

1,242,237. Splitting semi-conductor material. ASSOCIATED SEMICONDUCTOR MFGS. Ltd. 29 Nov., 1968, No. 56792/68. Heading B5E. [Also in Divisions B2A, F2A and H1K] A scored semi-conductor wafer 11 is broken into dice by means of a roller arrangement comprising a working roller 3 of a magnetic material, e.g. hardened steel, magnetically suspended in rolling contact with two larger diameter backing rollers 1, 2. In the arrangement shown the backing rollers, which are also of hardened steel, are journalled into a brass housing from which the lower part 4 of the working roller 3 extends and which also encloses two parallel permanent magnets 5. An electromagnet may alternatively be used, and in a further modification the backing rollers 1, 2 are themselves suspended magnetically in rolling contact with three further such rollers. The semi-conductor wafer 11 is mounted on an elastic electrically insulating synthetic resin sheet 12 by electro-static attraction and is scored by a diamond scriber in two mutually orthogonal directions. The score lines 14 may be spaced by as little as 350Á if a 2 mm. diameter working roller 3 is used. A resilient pad 16 supports the wafer 11 while the roller arrangement traverses it in the two orthogonal directions. Finally, the sheet 12 may be stretched so as to space the separated dice to facilitate inspection and removal.
GB5679268A 1968-11-29 1968-11-29 Improvements in and relating to roller arrangements Expired GB1242237A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB5679268A GB1242237A (en) 1968-11-29 1968-11-29 Improvements in and relating to roller arrangements
DE19691957569 DE1957569A1 (en) 1968-11-29 1969-11-19 Apparatus and method for breaking a sheet of material such as a semiconductor wafer
US3626492D US3626492A (en) 1968-11-29 1969-11-25 Means for fracturing a plate of material
NL6917697A NL6917697A (en) 1968-11-29 1969-11-25
JP9459469A JPS4923952B1 (en) 1968-11-29 1969-11-26
FR6941119A FR2024549A1 (en) 1968-11-29 1969-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5679268A GB1242237A (en) 1968-11-29 1968-11-29 Improvements in and relating to roller arrangements

Publications (1)

Publication Number Publication Date
GB1242237A true GB1242237A (en) 1971-08-11

Family

ID=10477558

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5679268A Expired GB1242237A (en) 1968-11-29 1968-11-29 Improvements in and relating to roller arrangements

Country Status (6)

Country Link
US (1) US3626492A (en)
JP (1) JPS4923952B1 (en)
DE (1) DE1957569A1 (en)
FR (1) FR2024549A1 (en)
GB (1) GB1242237A (en)
NL (1) NL6917697A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4109841A (en) * 1976-05-26 1978-08-29 Ppg Industries, Inc. Apparatus for opening score lines in glass sheets

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1614424A (en) * 1925-09-28 1927-01-11 American Brass Co Rolling mill
US2851869A (en) * 1955-01-17 1958-09-16 Quoos Kurt Squeeze roll apparatus
US3413915A (en) * 1965-06-10 1968-12-03 Du Pont Magnetically biased pressure application to running length materials
US3526058A (en) * 1967-06-28 1970-09-01 Litton Industries Inc Diamond roller dresser

Also Published As

Publication number Publication date
DE1957569A1 (en) 1970-06-11
FR2024549A1 (en) 1970-08-28
US3626492A (en) 1971-12-07
JPS4923952B1 (en) 1974-06-19
NL6917697A (en) 1970-06-02

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