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GB1223455A - Improvements in or relating to induction plasma generators - Google Patents

Improvements in or relating to induction plasma generators

Info

Publication number
GB1223455A
GB1223455A GB2773168A GB2773168A GB1223455A GB 1223455 A GB1223455 A GB 1223455A GB 2773168 A GB2773168 A GB 2773168A GB 2773168 A GB2773168 A GB 2773168A GB 1223455 A GB1223455 A GB 1223455A
Authority
GB
United Kingdom
Prior art keywords
gas
channel
apertures
radial
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2773168A
Inventor
Merle Lee Thorpe
Kent William Harrington
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Humphreys Corp
Original Assignee
Humphreys Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Humphreys Corp filed Critical Humphreys Corp
Priority to GB2773168A priority Critical patent/GB1223455A/en
Priority to DE19681764479 priority patent/DE1764479B1/en
Publication of GB1223455A publication Critical patent/GB1223455A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/30Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

1,223,455. Induction plasma torch. HUMPHREYS CORP. 11 June, 1968, No. 27731/68. Heading H5H. In order that an induction plasma torch may be used for monatomic and diatomic gases, the gas is caused to flow through induction chamber 30 as an annular sheath engaging the chamber wall and means is provided to control independently a tangential swirl stabilization component and a radial component of said gas flow. The gas injector structure 32 is spaced from the wall of chamber 30 to define a cylindrical passage 152 which is supplied with gas through a circular array of radial apertures 118 and through a circular array of tangential swirl stabilizing apertures 120. A circular array of axial apertures 114 is also provided for gas supply. Radial apertures 118 are supplied from conduit 142 via passages 138; tangential apertures 120 are supplied from conduit 150 via a radial passage 148 an annular passage 102, and an axial passage; and axial apertures 114 are supplied from conduit 130 via passages 128, 126. The induction coil 12 is wound on a quartz tube 22 coated internally at 24 with gold to reflect heat. Tube 22 is resiliently supported by O-ring seals 26 at both ends. Coolant flows from coil terminal 62 through channel 64 to an annular groove 100 in injector 32, thence through a channel 66 to a cylindrical channel 68 containing the coil. A parallel flow path exists direct from channel 64 to channel 68. Coolant flows from channel 68 to chamber 70 to cool nozzle 40 and emerges via passage 74 from the other coil terminal 76. A metal probe 42 through which material can be injected into the plasma passes through injector 32 and has a double annular wall supplied with coolant from conduits 48, 50. The nozzle 40 may be provided with copper inserts for different functions. One such nozzle insert has an annular coolant chamber and another may have radial ports for introducing material to be spheroidized. The plasma may be initiated by sparking at conductive lining 24 of quartz tube 22, by a temporary graphite rod, by earthing either nozzle 40 or injector end plate 38, or by an auxiliary D.C. arc. Monatomic e.g. argon is introduced through axial inlet 130, no gas is introduced through radial inlet 142, and argon is introduced through tangential inlet 150. Once a plasma has been established the generator may be switched to diatomic gas e.g. nitrogen or oxygen by supplying the diatomic gas to inlets 142 and 150. Thereupon the argon supplies are cut off and the power supply increased. The torch is used for metal working, for working refractories or carrying out chemical reactions.
GB2773168A 1968-06-11 1968-06-11 Improvements in or relating to induction plasma generators Expired GB1223455A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2773168A GB1223455A (en) 1968-06-11 1968-06-11 Improvements in or relating to induction plasma generators
DE19681764479 DE1764479B1 (en) 1968-06-11 1968-06-12 HIGH FREQUENCY PLASMA GENERATOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2773168A GB1223455A (en) 1968-06-11 1968-06-11 Improvements in or relating to induction plasma generators

Publications (1)

Publication Number Publication Date
GB1223455A true GB1223455A (en) 1971-02-24

Family

ID=10264345

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2773168A Expired GB1223455A (en) 1968-06-11 1968-06-11 Improvements in or relating to induction plasma generators

Country Status (2)

Country Link
DE (1) DE1764479B1 (en)
GB (1) GB1223455A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107969061A (en) * 2017-12-23 2018-04-27 四川大学 A kind of air inductively coupled plasma generator for processing silica-base material
WO2020118873A1 (en) * 2018-12-13 2020-06-18 深圳市捷佳伟创新能源装备股份有限公司 Reaction chamber structure of plasma deposition furnace

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6412703A (en) * 1964-10-31 1966-05-02
GB1091498A (en) * 1965-06-02 1967-11-15 British Titan Products Gas heating apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107969061A (en) * 2017-12-23 2018-04-27 四川大学 A kind of air inductively coupled plasma generator for processing silica-base material
CN107969061B (en) * 2017-12-23 2023-09-19 四川大学 An atmospheric induction coupled plasma generator for processing silicon-based materials
WO2020118873A1 (en) * 2018-12-13 2020-06-18 深圳市捷佳伟创新能源装备股份有限公司 Reaction chamber structure of plasma deposition furnace

Also Published As

Publication number Publication date
DE1764479B1 (en) 1972-03-09

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