GB1115884A - Method for depositing on a substrate coherent solid layers - Google Patents
Method for depositing on a substrate coherent solid layersInfo
- Publication number
- GB1115884A GB1115884A GB1327966A GB1327966A GB1115884A GB 1115884 A GB1115884 A GB 1115884A GB 1327966 A GB1327966 A GB 1327966A GB 1327966 A GB1327966 A GB 1327966A GB 1115884 A GB1115884 A GB 1115884A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- polythene
- carbonyl
- molybdenum
- tetrafluoroethylene
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/029—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/52—Polymerisation initiated by wave energy or particle radiation by electric discharge, e.g. voltolisation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
A substrate, which may be continuously moved, is coated with at least two layers by the chemical reaction of a plasma the constituents of which are changed during deposition. Examples are (a) tetrafluoroethylene changing to silicon tetrafluoride and then nickel carbonyl, and (b) ethylene, silane and molybdenum carbonyl, to give (a) Ni on p.t.f.e., and (b) polythene on a polythene cable, followed by silicon carbide, molybdenum silicide, and finally Mo.ALSO:A substrate, which may be continuously moved, is coated with at least two layer by the chemical reaction of a plasma the constituents of which are changed during deposition. Examples are (a) tetrafluoroethylene changing to silicon tetrafluoride and then nickel carbonyl and (b) ethylene, silane and molybdenum carbonyl, to give (a) Ni on p.t.f.e., and (b) polythene on a polythene cable, followed by silicon carbide, molybdenum silicide and finally Mo. missing page 184ALSO:A substrate, which may be continuously moved, is coated with at least two layers by the chemical reaction of a plasma the constituents of which are changed during deposition. Examples are (a) tetrafluoroethylene changing to silicon tetrafluoride and then nickel carbonyl and (b) ethylene, silane and molybdenum carbonyl, to give (a) Ni on p.t.f.e., and (b) polythene on a polythene cable, followed by silicon carbide, molybdenum silicide, and finally Mo.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1327966A GB1115884A (en) | 1966-03-25 | 1966-03-25 | Method for depositing on a substrate coherent solid layers |
DE19671621225 DE1621225A1 (en) | 1966-03-25 | 1967-03-23 | Method of depositing a cohesive layer of solid material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1327966A GB1115884A (en) | 1966-03-25 | 1966-03-25 | Method for depositing on a substrate coherent solid layers |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1115884A true GB1115884A (en) | 1968-05-29 |
Family
ID=10020085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1327966A Expired GB1115884A (en) | 1966-03-25 | 1966-03-25 | Method for depositing on a substrate coherent solid layers |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE1621225A1 (en) |
GB (1) | GB1115884A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2419335A1 (en) * | 1978-03-08 | 1979-10-05 | Gordon Roy Gerald | PROCESS FOR DEPOSITING A COATING ON GLASS |
EP0154482A2 (en) * | 1984-03-03 | 1985-09-11 | Stc Plc | Coating process |
-
1966
- 1966-03-25 GB GB1327966A patent/GB1115884A/en not_active Expired
-
1967
- 1967-03-23 DE DE19671621225 patent/DE1621225A1/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2419335A1 (en) * | 1978-03-08 | 1979-10-05 | Gordon Roy Gerald | PROCESS FOR DEPOSITING A COATING ON GLASS |
EP0154482A2 (en) * | 1984-03-03 | 1985-09-11 | Stc Plc | Coating process |
EP0154482A3 (en) * | 1984-03-03 | 1988-03-23 | Stc Plc | Coating process |
Also Published As
Publication number | Publication date |
---|---|
DE1621225A1 (en) | 1972-01-27 |
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