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FR2953018B1 - Transducteur de pression en resistance electrique, capteur de pression et accelerometre incorporant ce transducteur - Google Patents

Transducteur de pression en resistance electrique, capteur de pression et accelerometre incorporant ce transducteur

Info

Publication number
FR2953018B1
FR2953018B1 FR0958344A FR0958344A FR2953018B1 FR 2953018 B1 FR2953018 B1 FR 2953018B1 FR 0958344 A FR0958344 A FR 0958344A FR 0958344 A FR0958344 A FR 0958344A FR 2953018 B1 FR2953018 B1 FR 2953018B1
Authority
FR
France
Prior art keywords
transducer
pressure
electric resistance
pressure sensor
accelerometer incorporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0958344A
Other languages
English (en)
Other versions
FR2953018A1 (fr
Inventor
Miguel Alfonso San
Anthony Ayari
Christophe Caillier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Claude Bernard Lyon 1 filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0958344A priority Critical patent/FR2953018B1/fr
Priority to PCT/EP2010/068160 priority patent/WO2011064273A1/fr
Publication of FR2953018A1 publication Critical patent/FR2953018A1/fr
Application granted granted Critical
Publication of FR2953018B1 publication Critical patent/FR2953018B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR0958344A 2009-11-25 2009-11-25 Transducteur de pression en resistance electrique, capteur de pression et accelerometre incorporant ce transducteur Expired - Fee Related FR2953018B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0958344A FR2953018B1 (fr) 2009-11-25 2009-11-25 Transducteur de pression en resistance electrique, capteur de pression et accelerometre incorporant ce transducteur
PCT/EP2010/068160 WO2011064273A1 (fr) 2009-11-25 2010-11-24 Transducteur de pression en resistance electrique,capteur de pression et accelerometre incorporant ce transducteur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0958344A FR2953018B1 (fr) 2009-11-25 2009-11-25 Transducteur de pression en resistance electrique, capteur de pression et accelerometre incorporant ce transducteur

Publications (2)

Publication Number Publication Date
FR2953018A1 FR2953018A1 (fr) 2011-05-27
FR2953018B1 true FR2953018B1 (fr) 2011-12-30

Family

ID=42238811

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0958344A Expired - Fee Related FR2953018B1 (fr) 2009-11-25 2009-11-25 Transducteur de pression en resistance electrique, capteur de pression et accelerometre incorporant ce transducteur

Country Status (2)

Country Link
FR (1) FR2953018B1 (fr)
WO (1) WO2011064273A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4569242B2 (ja) 2004-09-22 2010-10-27 パナソニック電工株式会社 物理量センサ
JP4356754B2 (ja) 2007-02-26 2009-11-04 パナソニック電工株式会社 機械的変形量検出センサ
CN101344447A (zh) * 2007-07-13 2009-01-14 清华大学 微机电压力传感器

Also Published As

Publication number Publication date
FR2953018A1 (fr) 2011-05-27
WO2011064273A1 (fr) 2011-06-03

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20140731