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FR2936605B1 - Dispositif d'analyse de la surface d'un substrat - Google Patents

Dispositif d'analyse de la surface d'un substrat

Info

Publication number
FR2936605B1
FR2936605B1 FR0856628A FR0856628A FR2936605B1 FR 2936605 B1 FR2936605 B1 FR 2936605B1 FR 0856628 A FR0856628 A FR 0856628A FR 0856628 A FR0856628 A FR 0856628A FR 2936605 B1 FR2936605 B1 FR 2936605B1
Authority
FR
France
Prior art keywords
analyzing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0856628A
Other languages
English (en)
Other versions
FR2936605A1 (fr
Inventor
Michel Pichon
Franc Davenne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0856628A priority Critical patent/FR2936605B1/fr
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Priority to US13/122,091 priority patent/US9030554B2/en
Priority to JP2011529600A priority patent/JP2012504757A/ja
Priority to EA201170517A priority patent/EA026373B1/ru
Priority to KR1020117007422A priority patent/KR101916961B1/ko
Priority to MX2011003405A priority patent/MX2011003405A/es
Priority to PCT/FR2009/051838 priority patent/WO2010037958A1/fr
Priority to CN200980139156.5A priority patent/CN102171554B/zh
Priority to BRPI0919419A priority patent/BRPI0919419A2/pt
Priority to KR1020167021636A priority patent/KR20160098529A/ko
Priority to EP09752424A priority patent/EP2335056A1/fr
Publication of FR2936605A1 publication Critical patent/FR2936605A1/fr
Priority to ZA2011/02979A priority patent/ZA201102979B/en
Application granted granted Critical
Publication of FR2936605B1 publication Critical patent/FR2936605B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G01N2021/9586—Windscreens

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
FR0856628A 2008-10-01 2008-10-01 Dispositif d'analyse de la surface d'un substrat Active FR2936605B1 (fr)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR0856628A FR2936605B1 (fr) 2008-10-01 2008-10-01 Dispositif d'analyse de la surface d'un substrat
BRPI0919419A BRPI0919419A2 (pt) 2008-10-01 2009-09-29 dispositivo de análise da superfície de um substrato
EA201170517A EA026373B1 (ru) 2008-10-01 2009-09-29 Устройство и способ для контроля дефектности прозрачной или зеркальной подложки по ее оптическим свойствам в проходящем или отраженном свете соответственно
KR1020117007422A KR101916961B1 (ko) 2008-10-01 2009-09-29 기판의 표면을 분석하기 위한 장치
MX2011003405A MX2011003405A (es) 2008-10-01 2009-09-29 Dispositivo para analizar la superficie de un sustrato.
PCT/FR2009/051838 WO2010037958A1 (fr) 2008-10-01 2009-09-29 Dispositif d'analyse de la surface d'un substrat
US13/122,091 US9030554B2 (en) 2008-10-01 2009-09-29 Device for analysing the surface of a substrate
JP2011529600A JP2012504757A (ja) 2008-10-01 2009-09-29 基板表面の分析装置
KR1020167021636A KR20160098529A (ko) 2008-10-01 2009-09-29 기판의 표면을 분석하기 위한 장치
EP09752424A EP2335056A1 (fr) 2008-10-01 2009-09-29 Dispositif d'analyse de la surface d'un substrat
CN200980139156.5A CN102171554B (zh) 2008-10-01 2009-09-29 用于分析基底的表面的装置
ZA2011/02979A ZA201102979B (en) 2008-10-01 2011-04-20 Device for analysing the suface of a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0856628A FR2936605B1 (fr) 2008-10-01 2008-10-01 Dispositif d'analyse de la surface d'un substrat

Publications (2)

Publication Number Publication Date
FR2936605A1 FR2936605A1 (fr) 2010-04-02
FR2936605B1 true FR2936605B1 (fr) 2014-10-31

Family

ID=40568511

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0856628A Active FR2936605B1 (fr) 2008-10-01 2008-10-01 Dispositif d'analyse de la surface d'un substrat

Country Status (11)

Country Link
US (1) US9030554B2 (fr)
EP (1) EP2335056A1 (fr)
JP (1) JP2012504757A (fr)
KR (2) KR20160098529A (fr)
CN (1) CN102171554B (fr)
BR (1) BRPI0919419A2 (fr)
EA (1) EA026373B1 (fr)
FR (1) FR2936605B1 (fr)
MX (1) MX2011003405A (fr)
WO (1) WO2010037958A1 (fr)
ZA (1) ZA201102979B (fr)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2958404B1 (fr) 2010-04-01 2012-04-27 Saint Gobain Procede et dispositif d'analyse de la qualite optique d'un substrat transparent
FR2965045A1 (fr) * 2010-09-17 2012-03-23 Saint Gobain Dispositif de mesure de la forme d'un miroir ou d'une surface speculaire
US20120098959A1 (en) * 2010-10-20 2012-04-26 Glasstech, Inc. Method and apparatus for measuring transmitted optical distortion in glass sheets
DE102011050024A1 (de) * 2011-04-29 2012-10-31 Hamilton Bonaduz Ag Analysevorrichtung für eine berührungslose Analyse der Ausformung eines transparenten Körpers und Verfahren zur Durchführung der berührungslosen Analyse
DE102011109793B4 (de) * 2011-08-08 2014-12-04 Grenzbach Maschinenbau Gmbh Verfahren und Vorrichtung zur sicheren Detektion von Materialfehlern in transparenten Werkstoffen
FR2983583B1 (fr) * 2011-12-02 2013-11-15 Saint Gobain Dispositif d'analyse des defauts d'aspect d'un substrat transparent
CN102495081B (zh) * 2011-12-26 2013-06-26 海南中航特玻材料有限公司 一种在线式玻筋检测仪
US20140002642A1 (en) * 2012-06-15 2014-01-02 Elmar SWIEGOT Absolute position detection
JP2014103385A (ja) * 2012-10-26 2014-06-05 Canon Inc 検出装置、リソグラフィ装置、物品の製造方法及び検出方法
FR3005042B1 (fr) * 2013-04-26 2016-01-01 Snecma Machine a tisser ou enrouler une texture fibreuse permettant un controle d'anomalies par analyse d'images
GB201309549D0 (en) * 2013-05-29 2013-07-10 Pilkington Group Ltd Glazing
DE102013105570A1 (de) * 2013-05-29 2014-12-04 Isra Surface Vision Gmbh Verfahren zur Bestimmung der Brechkraft eines transparenten Objekts sowie entsprechende Vorrichtung
FR3015033B1 (fr) * 2013-12-13 2015-12-04 Saint Gobain Procede et dispositif d'analyse de la surface d'un substrat
GB2526270B (en) * 2014-05-16 2018-08-22 Pre Chasm Res Ltd Examining vehicle glass defects
CN104819985A (zh) * 2015-03-30 2015-08-05 智机科技（深圳）有限公司 用于检测可透光材质表面图像的方法及检测设备
US9952037B2 (en) * 2015-06-26 2018-04-24 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured sheet
US9952039B2 (en) 2015-06-26 2018-04-24 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured panels having specular surfaces
US9933251B2 (en) 2015-06-26 2018-04-03 Glasstech, Inc. Non-contact gaging system and method for contoured glass sheets
US9851200B2 (en) 2015-06-26 2017-12-26 Glasstech, Inc. Non-contact gaging system and method for contoured panels having specular surfaces
US9470641B1 (en) * 2015-06-26 2016-10-18 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured glass sheets
US9841276B2 (en) 2015-06-26 2017-12-12 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured glass sheet
DE102016220757A1 (de) * 2016-10-21 2018-04-26 Texmag Gmbh Vertriebsgesellschaft Verfahren und Vorrichtung zur Materialbahnbeobachtung und Materialbahninspektion
KR101759470B1 (ko) * 2016-11-23 2017-07-19 주식회사 디이엔티 패널 점등 검사 장치
US10289930B2 (en) * 2017-02-09 2019-05-14 Glasstech, Inc. System and associated for online measurement of the optical characteristics of a glass sheet
US10267750B2 (en) * 2017-02-09 2019-04-23 Glasstech, Inc. System and associated method for online detection of small defects on/in a glass sheet
KR102579457B1 (ko) 2017-02-24 2023-09-14 삼성전자주식회사 이미지 보정 방법 및 장치
FR3078161B1 (fr) * 2018-02-22 2020-03-27 Saint-Gobain Glass France Methode de simulation de la puissance optique d'un verre feuillete
CN110057841A (zh) * 2019-05-05 2019-07-26 电子科技大学 一种基于透射结构光的缺陷检测方法
FR3101420B1 (fr) * 2019-09-30 2023-12-29 Saint Gobain Méthode d’évaluation de la qualité optique d’une zone délimitée d’un vitrage
EP4170327A1 (fr) * 2021-10-22 2023-04-26 Saint-Gobain Glass France Procédé et système de détection des défauts optiques dans un pare-brise en verre

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261041A (ja) * 1986-05-06 1987-11-13 Nippon Soken Inc 塗装面測定装置
JPH0726838B2 (ja) * 1986-11-05 1995-03-29 株式会社日本自動車部品総合研究所 塗装面測定装置
CH677972A5 (fr) * 1989-01-17 1991-07-15 Kern & Co Ag
US5471307A (en) * 1992-09-21 1995-11-28 Phase Shift Technology, Inc. Sheet flatness measurement system and method
US5471297A (en) * 1993-08-31 1995-11-28 Asahi Glass Company Ltd. Method of and apparatus for measuring optical distortion
JP3178644B2 (ja) 1995-02-10 2001-06-25 セントラル硝子株式会社 透明板状体の欠点検出方法
DE19639999C2 (de) 1996-09-18 1998-08-20 Omeca Messtechnik Gmbh Verfahren und Vorrichtung für die 3D-Messung
DE19643018B4 (de) * 1996-10-18 2010-06-17 Isra Surface Vision Gmbh Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen
US6208412B1 (en) * 1999-06-14 2001-03-27 Visteon Global Technologies, Inc. Method and apparatus for determining optical quality
US6100990A (en) * 1999-06-14 2000-08-08 Ford Motor Company Method and apparatus for determining reflective optical quality using gray-scale patterns
JP2001052989A (ja) * 1999-08-12 2001-02-23 Nikon Corp 荷電粒子ビーム露光方法、荷電粒子ビーム露光装置及びデバイス製造方法
US6889568B2 (en) * 2002-01-24 2005-05-10 Sensarray Corporation Process condition sensing wafer and data analysis system
JP2004012423A (ja) * 2002-06-11 2004-01-15 Dainippon Printing Co Ltd 光透過性対象物の検査方法及び装置
JP4072466B2 (ja) * 2002-12-27 2008-04-09 日本板硝子株式会社 板状体の光学的歪みを評価する装置および方法
US7154613B2 (en) 2004-03-15 2006-12-26 Northrop Grumman Corporation Color coded light for automated shape measurement using photogrammetry
US20080156780A1 (en) * 2006-12-29 2008-07-03 Sergei Voronov Substrate markings

Also Published As

Publication number Publication date
WO2010037958A1 (fr) 2010-04-08
FR2936605A1 (fr) 2010-04-02
MX2011003405A (es) 2011-04-26
JP2012504757A (ja) 2012-02-23
EP2335056A1 (fr) 2011-06-22
CN102171554B (zh) 2014-03-26
US9030554B2 (en) 2015-05-12
ZA201102979B (en) 2011-12-28
KR20160098529A (ko) 2016-08-18
BRPI0919419A2 (pt) 2015-12-15
CN102171554A (zh) 2011-08-31
KR20110081173A (ko) 2011-07-13
EA201170517A1 (ru) 2011-08-30
US20110187855A1 (en) 2011-08-04
KR101916961B1 (ko) 2018-11-08
EA026373B1 (ru) 2017-04-28

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