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FR2868411B1 - Membrane souple comportant des entailles - Google Patents

Membrane souple comportant des entailles

Info

Publication number
FR2868411B1
FR2868411B1 FR0403432A FR0403432A FR2868411B1 FR 2868411 B1 FR2868411 B1 FR 2868411B1 FR 0403432 A FR0403432 A FR 0403432A FR 0403432 A FR0403432 A FR 0403432A FR 2868411 B1 FR2868411 B1 FR 2868411B1
Authority
FR
France
Prior art keywords
details
flexible membrane
membrane
flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0403432A
Other languages
English (en)
Other versions
FR2868411A1 (fr
Inventor
Serge Gidon
Olivier Lemonnier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0403432A priority Critical patent/FR2868411B1/fr
Priority to PCT/FR2005/000716 priority patent/WO2005098845A1/fr
Priority to EP05744606A priority patent/EP1730738A1/fr
Priority to JP2007505577A priority patent/JP4762974B2/ja
Priority to US10/593,976 priority patent/US7505394B2/en
Publication of FR2868411A1 publication Critical patent/FR2868411A1/fr
Application granted granted Critical
Publication of FR2868411B1 publication Critical patent/FR2868411B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C23/00Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067Mechanical properties
    • B81B3/007For controlling stiffness, e.g. ribs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/01Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0323Grooves
    • B81B2203/0346Grooves not provided for in B81B2203/033 - B81B2203/0338
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0361Tips, pillars
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/05Type of movement
    • B81B2203/051Translation according to an axis parallel to the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/05Type of movement
    • B81B2203/058Rotation out of a plane parallel to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
FR0403432A 2004-04-01 2004-04-01 Membrane souple comportant des entailles Expired - Fee Related FR2868411B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0403432A FR2868411B1 (fr) 2004-04-01 2004-04-01 Membrane souple comportant des entailles
PCT/FR2005/000716 WO2005098845A1 (fr) 2004-04-01 2005-03-25 Membrane souple comportant des entailles
EP05744606A EP1730738A1 (fr) 2004-04-01 2005-03-25 Membrane souple comportant des entailles
JP2007505577A JP4762974B2 (ja) 2004-04-01 2005-03-25 ノッチを有するフレキシブル膜
US10/593,976 US7505394B2 (en) 2004-04-01 2005-03-25 Flexible membrane comprising notches

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0403432A FR2868411B1 (fr) 2004-04-01 2004-04-01 Membrane souple comportant des entailles

Publications (2)

Publication Number Publication Date
FR2868411A1 FR2868411A1 (fr) 2005-10-07
FR2868411B1 true FR2868411B1 (fr) 2006-06-16

Family

ID=34944625

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0403432A Expired - Fee Related FR2868411B1 (fr) 2004-04-01 2004-04-01 Membrane souple comportant des entailles

Country Status (5)

Country Link
US (1) US7505394B2 (fr)
EP (1) EP1730738A1 (fr)
JP (1) JP4762974B2 (fr)
FR (1) FR2868411B1 (fr)
WO (1) WO2005098845A1 (fr)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE463654B (sv) * 1988-03-11 1991-01-07 Nils Goeran Stemme Membranstruktur samt saett att framstaella densamma
US5216631A (en) * 1990-11-02 1993-06-01 Sliwa Jr John W Microvibratory memory device
JP3184619B2 (ja) * 1991-09-24 2001-07-09 キヤノン株式会社 平行平面保持機構及びそれを用いたメモリ装置及びstm装置
JPH06333276A (ja) * 1993-05-20 1994-12-02 Canon Inc 記録媒体及びその製造方法、及び該記録媒体を用いた情報処理装置
US6132278A (en) * 1996-06-25 2000-10-17 Vanderbilt University Mold method for forming vacuum field emitters and method for forming diamond emitters
JP3453526B2 (ja) * 1998-09-29 2003-10-06 株式会社日立製作所 半導体素子検査用ソケット、半導体装置、半導体装置の製造方法及び半導体装置の検査方法
US6522566B2 (en) * 2000-12-01 2003-02-18 Hewlett-Packard Company System modules with atomic resolution storage memory
JP2004061197A (ja) * 2002-07-26 2004-02-26 Nec Kansai Ltd 電気接続用配線基板
FR2845513B1 (fr) 2002-10-03 2006-08-11 Commissariat Energie Atomique Dispositif d'enregistrement de donnees comportant un support de memoire en forme de membrane

Also Published As

Publication number Publication date
US7505394B2 (en) 2009-03-17
US20070211612A1 (en) 2007-09-13
JP4762974B2 (ja) 2011-08-31
WO2005098845A1 (fr) 2005-10-20
EP1730738A1 (fr) 2006-12-13
FR2868411A1 (fr) 2005-10-07
JP2007531197A (ja) 2007-11-01

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20131231