FR2868411B1 - Membrane souple comportant des entailles - Google Patents
Membrane souple comportant des entaillesInfo
- Publication number
- FR2868411B1 FR2868411B1 FR0403432A FR0403432A FR2868411B1 FR 2868411 B1 FR2868411 B1 FR 2868411B1 FR 0403432 A FR0403432 A FR 0403432A FR 0403432 A FR0403432 A FR 0403432A FR 2868411 B1 FR2868411 B1 FR 2868411B1
- Authority
- FR
- France
- Prior art keywords
- details
- flexible membrane
- membrane
- flexible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/007—For controlling stiffness, e.g. ribs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0323—Grooves
- B81B2203/0346—Grooves not provided for in B81B2203/033 - B81B2203/0338
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0361—Tips, pillars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/051—Translation according to an axis parallel to the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0403432A FR2868411B1 (fr) | 2004-04-01 | 2004-04-01 | Membrane souple comportant des entailles |
PCT/FR2005/000716 WO2005098845A1 (fr) | 2004-04-01 | 2005-03-25 | Membrane souple comportant des entailles |
EP05744606A EP1730738A1 (fr) | 2004-04-01 | 2005-03-25 | Membrane souple comportant des entailles |
JP2007505577A JP4762974B2 (ja) | 2004-04-01 | 2005-03-25 | ノッチを有するフレキシブル膜 |
US10/593,976 US7505394B2 (en) | 2004-04-01 | 2005-03-25 | Flexible membrane comprising notches |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0403432A FR2868411B1 (fr) | 2004-04-01 | 2004-04-01 | Membrane souple comportant des entailles |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2868411A1 FR2868411A1 (fr) | 2005-10-07 |
FR2868411B1 true FR2868411B1 (fr) | 2006-06-16 |
Family
ID=34944625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0403432A Expired - Fee Related FR2868411B1 (fr) | 2004-04-01 | 2004-04-01 | Membrane souple comportant des entailles |
Country Status (5)
Country | Link |
---|---|
US (1) | US7505394B2 (fr) |
EP (1) | EP1730738A1 (fr) |
JP (1) | JP4762974B2 (fr) |
FR (1) | FR2868411B1 (fr) |
WO (1) | WO2005098845A1 (fr) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE463654B (sv) * | 1988-03-11 | 1991-01-07 | Nils Goeran Stemme | Membranstruktur samt saett att framstaella densamma |
US5216631A (en) * | 1990-11-02 | 1993-06-01 | Sliwa Jr John W | Microvibratory memory device |
JP3184619B2 (ja) * | 1991-09-24 | 2001-07-09 | キヤノン株式会社 | 平行平面保持機構及びそれを用いたメモリ装置及びstm装置 |
JPH06333276A (ja) * | 1993-05-20 | 1994-12-02 | Canon Inc | 記録媒体及びその製造方法、及び該記録媒体を用いた情報処理装置 |
US6132278A (en) * | 1996-06-25 | 2000-10-17 | Vanderbilt University | Mold method for forming vacuum field emitters and method for forming diamond emitters |
JP3453526B2 (ja) * | 1998-09-29 | 2003-10-06 | 株式会社日立製作所 | 半導体素子検査用ソケット、半導体装置、半導体装置の製造方法及び半導体装置の検査方法 |
US6522566B2 (en) * | 2000-12-01 | 2003-02-18 | Hewlett-Packard Company | System modules with atomic resolution storage memory |
JP2004061197A (ja) * | 2002-07-26 | 2004-02-26 | Nec Kansai Ltd | 電気接続用配線基板 |
FR2845513B1 (fr) | 2002-10-03 | 2006-08-11 | Commissariat Energie Atomique | Dispositif d'enregistrement de donnees comportant un support de memoire en forme de membrane |
-
2004
- 2004-04-01 FR FR0403432A patent/FR2868411B1/fr not_active Expired - Fee Related
-
2005
- 2005-03-25 JP JP2007505577A patent/JP4762974B2/ja not_active Expired - Fee Related
- 2005-03-25 US US10/593,976 patent/US7505394B2/en not_active Expired - Fee Related
- 2005-03-25 WO PCT/FR2005/000716 patent/WO2005098845A1/fr not_active Application Discontinuation
- 2005-03-25 EP EP05744606A patent/EP1730738A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US7505394B2 (en) | 2009-03-17 |
US20070211612A1 (en) | 2007-09-13 |
JP4762974B2 (ja) | 2011-08-31 |
WO2005098845A1 (fr) | 2005-10-20 |
EP1730738A1 (fr) | 2006-12-13 |
FR2868411A1 (fr) | 2005-10-07 |
JP2007531197A (ja) | 2007-11-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20131231 |