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FR2843827B1 - MECHANICAL RECYCLING OF A PLATE COMPRISING A STAMP LAYER AFTER SELECTING A THIN LAYER - Google Patents

MECHANICAL RECYCLING OF A PLATE COMPRISING A STAMP LAYER AFTER SELECTING A THIN LAYER

Info

Publication number
FR2843827B1
FR2843827B1 FR0210588A FR0210588A FR2843827B1 FR 2843827 B1 FR2843827 B1 FR 2843827B1 FR 0210588 A FR0210588 A FR 0210588A FR 0210588 A FR0210588 A FR 0210588A FR 2843827 B1 FR2843827 B1 FR 2843827B1
Authority
FR
France
Prior art keywords
layer
selecting
plate
stamp
mechanical recycling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0210588A
Other languages
French (fr)
Other versions
FR2843827A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to FR0210588A priority Critical patent/FR2843827B1/en
Priority to TW92123246A priority patent/TWI322481B/en
Priority to EP03792598A priority patent/EP1532676A2/en
Priority to CNB038200538A priority patent/CN100557785C/en
Priority to JP2005501224A priority patent/JP2005537685A/en
Priority to PCT/IB2003/004029 priority patent/WO2004019403A2/en
Priority to KR1020057003368A priority patent/KR100854856B1/en
Priority to US10/726,039 priority patent/US7033905B2/en
Publication of FR2843827A1 publication Critical patent/FR2843827A1/en
Application granted granted Critical
Publication of FR2843827B1 publication Critical patent/FR2843827B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02032—Preparing bulk and homogeneous wafers by reclaiming or re-processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76256—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques using silicon etch back techniques, e.g. BESOI, ELTRAN
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76259—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along a porous layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR0210588A 2002-08-26 2002-08-26 MECHANICAL RECYCLING OF A PLATE COMPRISING A STAMP LAYER AFTER SELECTING A THIN LAYER Expired - Lifetime FR2843827B1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0210588A FR2843827B1 (en) 2002-08-26 2002-08-26 MECHANICAL RECYCLING OF A PLATE COMPRISING A STAMP LAYER AFTER SELECTING A THIN LAYER
TW92123246A TWI322481B (en) 2002-08-26 2003-08-25 Mechanical recycling of a wafer comprising a buffer layer, after having taken a layer therefrom
CNB038200538A CN100557785C (en) 2002-08-26 2003-08-26 Recycling of wafers with buffer structures
JP2005501224A JP2005537685A (en) 2002-08-26 2003-08-26 Mechanical recycling of the wafer after removing the layer from the wafer containing the buffer layer
EP03792598A EP1532676A2 (en) 2002-08-26 2003-08-26 Mechanical recycling of a wafer comprising a buffer layer, after having taken a layer therefrom
PCT/IB2003/004029 WO2004019403A2 (en) 2002-08-26 2003-08-26 Mechanical recycling of a wafer comprising a buffer layer, after having taken a layer therefrom
KR1020057003368A KR100854856B1 (en) 2002-08-26 2003-08-26 Mechanical recycling of a wafer comprising a buffer layer, after having taken a layer therefrom
US10/726,039 US7033905B2 (en) 2002-08-26 2003-12-01 Recycling of a wafer comprising a buffer layer after having separated a thin layer therefrom by mechanical means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0210588A FR2843827B1 (en) 2002-08-26 2002-08-26 MECHANICAL RECYCLING OF A PLATE COMPRISING A STAMP LAYER AFTER SELECTING A THIN LAYER

Publications (2)

Publication Number Publication Date
FR2843827A1 FR2843827A1 (en) 2004-02-27
FR2843827B1 true FR2843827B1 (en) 2005-05-27

Family

ID=31198316

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0210588A Expired - Lifetime FR2843827B1 (en) 2002-08-26 2002-08-26 MECHANICAL RECYCLING OF A PLATE COMPRISING A STAMP LAYER AFTER SELECTING A THIN LAYER

Country Status (2)

Country Link
FR (1) FR2843827B1 (en)
TW (1) TWI322481B (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0926709A3 (en) * 1997-12-26 2000-08-30 Canon Kabushiki Kaisha Method of manufacturing an SOI structure
JP3500063B2 (en) * 1998-04-23 2004-02-23 信越半導体株式会社 Method for recycling peeled wafer and silicon wafer for reuse
US6468923B1 (en) * 1999-03-26 2002-10-22 Canon Kabushiki Kaisha Method of producing semiconductor member
US6326279B1 (en) * 1999-03-26 2001-12-04 Canon Kabushiki Kaisha Process for producing semiconductor article
EP1212787B1 (en) * 1999-08-10 2014-10-08 Silicon Genesis Corporation A cleaving process to fabricate multilayered substrates using low implantation doses
WO2002015244A2 (en) * 2000-08-16 2002-02-21 Massachusetts Institute Of Technology Process for producing semiconductor article using graded expitaxial growth

Also Published As

Publication number Publication date
FR2843827A1 (en) 2004-02-27
TW200411821A (en) 2004-07-01
TWI322481B (en) 2010-03-21

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Legal Events

Date Code Title Description
CD Change of name or company name

Owner name: SOITEC, FR

Effective date: 20120423

PLFP Fee payment

Year of fee payment: 15

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Year of fee payment: 16

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