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FR2705693B1 - Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide. - Google Patents

Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Info

Publication number
FR2705693B1
FR2705693B1 FR9306281A FR9306281A FR2705693B1 FR 2705693 B1 FR2705693 B1 FR 2705693B1 FR 9306281 A FR9306281 A FR 9306281A FR 9306281 A FR9306281 A FR 9306281A FR 2705693 B1 FR2705693 B1 FR 2705693B1
Authority
FR
France
Prior art keywords
fluid
piece
convey
contain
closing plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9306281A
Other languages
English (en)
Other versions
FR2705693A1 (fr
Inventor
De Rooij Nicolaas Frans
Gass Volker
Jeanneret Sylvain
Der Schoot Van Bart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Neuchatel
Original Assignee
Universite de Neuchatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9306281A priority Critical patent/FR2705693B1/fr
Application filed by Universite de Neuchatel filed Critical Universite de Neuchatel
Priority to JP12333394A priority patent/JP3651809B2/ja
Priority to AT94107419T priority patent/ATE146853T1/de
Priority to DK94107419.7T priority patent/DK0641934T3/da
Priority to SG1996003690A priority patent/SG47036A1/en
Priority to EP94107419A priority patent/EP0641934B1/fr
Priority to ES94107419T priority patent/ES2099991T3/es
Priority to DE69401250T priority patent/DE69401250T2/de
Priority to US08/247,550 priority patent/US5462839A/en
Publication of FR2705693A1 publication Critical patent/FR2705693A1/fr
Application granted granted Critical
Publication of FR2705693B1 publication Critical patent/FR2705693B1/fr
Priority to HK98106084A priority patent/HK1006739A1/xx
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • External Artificial Organs (AREA)
  • Weting (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Lubricants (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
FR9306281A 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide. Expired - Fee Related FR2705693B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FR9306281A FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.
DE69401250T DE69401250T2 (de) 1993-05-24 1994-05-13 Herstellungsverfahren einer Mikropumpe
DK94107419.7T DK0641934T3 (da) 1993-05-24 1994-05-13 Fremgangsmåde til fremstiling af en mikropumpe.
SG1996003690A SG47036A1 (en) 1993-05-24 1994-05-13 Process for the manufacture of a micromachines device to contain or convey a fluid
EP94107419A EP0641934B1 (fr) 1993-05-24 1994-05-13 Procédé de fabrication d'une micropompe
ES94107419T ES2099991T3 (es) 1993-05-24 1994-05-13 Procedimiento de fabricacion de una microbomba.
JP12333394A JP3651809B2 (ja) 1993-05-24 1994-05-13 流体を入れまたは運ぶための超小形装置の製造方法及びその方法により製造した装置
AT94107419T ATE146853T1 (de) 1993-05-24 1994-05-13 Herstellungsverfahren einer mikropumpe
US08/247,550 US5462839A (en) 1993-05-24 1994-05-23 Process for the manufacture of a micromachined device to contain or convey a fluid
HK98106084A HK1006739A1 (en) 1993-05-24 1998-06-23 Manufacturing process for a micropump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9306281A FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Publications (2)

Publication Number Publication Date
FR2705693A1 FR2705693A1 (fr) 1994-12-02
FR2705693B1 true FR2705693B1 (fr) 1995-07-28

Family

ID=9447460

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9306281A Expired - Fee Related FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Country Status (10)

Country Link
US (1) US5462839A (fr)
EP (1) EP0641934B1 (fr)
JP (1) JP3651809B2 (fr)
AT (1) ATE146853T1 (fr)
DE (1) DE69401250T2 (fr)
DK (1) DK0641934T3 (fr)
ES (1) ES2099991T3 (fr)
FR (1) FR2705693B1 (fr)
HK (1) HK1006739A1 (fr)
SG (1) SG47036A1 (fr)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6281560B1 (en) 1995-10-10 2001-08-28 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US6377155B1 (en) 1995-10-10 2002-04-23 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5879632A (en) * 1996-04-09 1999-03-09 Sarnoff Corporation Apportioning system
US6331275B1 (en) 1996-07-08 2001-12-18 Burstein Technologies, Inc. Spatially addressable, cleavable reflective signal elements, assay device and method
BR9710702A (pt) 1996-07-08 2000-01-11 Burstein Lab Inc Dispositivo de elemento de sinal clivável e método.
US20050214827A1 (en) * 1996-07-08 2005-09-29 Burstein Technologies, Inc. Assay device and method
US6342349B1 (en) 1996-07-08 2002-01-29 Burstein Technologies, Inc. Optical disk-based assay devices and methods
DE19705910C1 (de) * 1997-02-15 1998-06-18 Inst Physikalische Hochtech Ev Mikrokammerarray mit hoher Kammerdichte
DE19719862A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
DE1149602T1 (de) 1997-11-19 2002-04-04 Microflow Engineering S.A., Neuenburg/Neuchatel Sprühvorrichtung für einen für die Atemtherapie geeigneten Inhalator
AU5080699A (en) * 1998-07-21 2000-02-14 Burstein Laboratories, Inc. Optical disc-based assay devices and methods
EP1005917B1 (fr) 1998-12-01 2006-11-02 Microflow Engineering SA Inhalateur à atomiseur ultrasonique dont les orifices sont superposé aux amplitudes maximales d'une onde stationaire
US6410360B1 (en) 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
US6827866B1 (en) * 2000-05-24 2004-12-07 Active Optical Networks, Inc. Deep-well lithography process for forming micro-electro-mechanical structures
US6905614B1 (en) 2000-05-24 2005-06-14 Active Optical Networks, Inc. Pattern-transfer process for forming micro-electro-mechanical structures
AU2002227181A1 (en) * 2000-11-16 2002-05-27 Burstein Technologies, Inc. Optical biodiscs with reflective layers
WO2002044695A1 (fr) * 2000-11-16 2002-06-06 Burstein Technologies, Inc. Methodes et appareils destines a la detection et au denombrement de lymphocytes utilisant des biodisques optiques
US7026131B2 (en) * 2000-11-17 2006-04-11 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-discs
US7087203B2 (en) * 2000-11-17 2006-08-08 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-disc
EP1236517A1 (fr) * 2001-02-23 2002-09-04 Microflow Engineering SA Procédé de fabrication d'un nébuliseur de goutelettes et un tel nébuliseur
US7141416B2 (en) * 2001-07-12 2006-11-28 Burstein Technologies, Inc. Multi-purpose optical analysis optical bio-disc for conducting assays and various reporting agents for use therewith
US20030143637A1 (en) * 2001-08-31 2003-07-31 Selvan Gowri Pyapali Capture layer assemblies for cellular assays including related optical analysis discs and methods
US20030113925A1 (en) * 2001-09-07 2003-06-19 Gordon John Francis Nuclear morphology based identification and quantification of white blood cell types using optical bio-disc systems
US20050003459A1 (en) * 2002-01-30 2005-01-06 Krutzik Siegfried Richard Multi-purpose optical analysis disc for conducting assays and related methods for attaching capture agents
US20040241381A1 (en) * 2002-01-31 2004-12-02 Chen Yihfar Microfluidic structures with circumferential grooves for bonding adhesives and related optical analysis discs
US20050023765A1 (en) * 2002-01-31 2005-02-03 Coombs James Howard Bio-safety features for optical analysis disc and disc system including same
JP2007500351A (ja) * 2003-07-25 2007-01-11 長岡実業株式会社 バイオディスクを有するサンプル調製用流体回路及びそれに関連した方法
US7538473B2 (en) * 2004-02-03 2009-05-26 S.C. Johnson & Son, Inc. Drive circuits and methods for ultrasonic piezoelectric actuators
US7723899B2 (en) 2004-02-03 2010-05-25 S.C. Johnson & Son, Inc. Active material and light emitting device
EP1792662A1 (fr) 2005-11-30 2007-06-06 Microflow Engineering SA Appareil de distribution de gouttelettes
TWI580878B (zh) * 2016-07-19 2017-05-01 科際精密股份有限公司 單向閥組件
CN112016805B (zh) * 2020-07-23 2023-06-06 上海工程技术大学 一种磁流变液性能评价方法及系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
EP0429591B1 (fr) * 1989-06-14 1994-08-17 Westonbridge International Limited Micropompe perfectionnee
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
KR910012538A (ko) * 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
DE69106240T2 (de) * 1990-07-02 1995-05-11 Seiko Epson Corp Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.

Also Published As

Publication number Publication date
DK0641934T3 (da) 1997-10-13
DE69401250D1 (de) 1997-02-06
SG47036A1 (en) 1998-03-20
ES2099991T3 (es) 1997-06-01
EP0641934A1 (fr) 1995-03-08
DE69401250T2 (de) 1997-07-10
FR2705693A1 (fr) 1994-12-02
JPH0719170A (ja) 1995-01-20
EP0641934B1 (fr) 1996-12-27
JP3651809B2 (ja) 2005-05-25
HK1006739A1 (en) 1999-03-12
US5462839A (en) 1995-10-31
ATE146853T1 (de) 1997-01-15

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Legal Events

Date Code Title Description
TP Transmission of property
TP Transmission of property
ST Notification of lapse

Effective date: 20090119