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FR2454103A1 - Perfectionnements aux accelerometres pendulaires asservis - Google Patents

Perfectionnements aux accelerometres pendulaires asservis

Info

Publication number
FR2454103A1
FR2454103A1 FR7909213A FR7909213A FR2454103A1 FR 2454103 A1 FR2454103 A1 FR 2454103A1 FR 7909213 A FR7909213 A FR 7909213A FR 7909213 A FR7909213 A FR 7909213A FR 2454103 A1 FR2454103 A1 FR 2454103A1
Authority
FR
France
Prior art keywords
pendulum
stator
cavity
accelerometer
deliming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7909213A
Other languages
English (en)
Other versions
FR2454103B1 (fr
Inventor
Alain Deval
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR7909213A priority Critical patent/FR2454103A1/fr
Priority to US06/138,731 priority patent/US4345474A/en
Priority to IT21302/80A priority patent/IT1140852B/it
Priority to GB8011897A priority patent/GB2047902B/en
Priority to DE3014038A priority patent/DE3014038C2/de
Priority to CA349,629A priority patent/CA1131930A/fr
Publication of FR2454103A1 publication Critical patent/FR2454103A1/fr
Application granted granted Critical
Publication of FR2454103B1 publication Critical patent/FR2454103B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Pressure Sensors (AREA)

Abstract

ACCELEROMETRE PENDULAIRE ASSERVIE COMPRENANT UN STATOR DELIMITANT UNE CAVITE PRESENTANT DEUX FACES OPPOSEES CONSTITUANT DEUX ELECTRODES 20A ET 21A ET UN PENDULE FORME PAR UN DISQUE RELIE AU STATOR PAR UNE CHARNIERE. UN CIRCUIT D'ASSERVISSEMENT APPLIQUE, AUX DEUX CONDENSATEURS CONSTITUES CHACUN PAR UNE FACE DE LA CAVITE ET LA FACE CONDUCTRICE EN REGARD DU PENDULE 11, DES TENSIONS CONTINUES DE CREATION DE FORCES ELECTROSTATIQUES D'EQUILIBRAGE DES EFFORTS DUS A L'ACCELEROMETRE. APPLICATIONS COURANTES.
FR7909213A 1979-04-11 1979-04-11 Perfectionnements aux accelerometres pendulaires asservis Granted FR2454103A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7909213A FR2454103A1 (fr) 1979-04-11 1979-04-11 Perfectionnements aux accelerometres pendulaires asservis
US06/138,731 US4345474A (en) 1979-04-11 1980-04-09 Electrostatic accelerometer
IT21302/80A IT1140852B (it) 1979-04-11 1980-04-10 Perfezionamento agli accelerometri pendolari asserviti
GB8011897A GB2047902B (en) 1979-04-11 1980-04-10 Electrostatic accelerometer
DE3014038A DE3014038C2 (de) 1979-04-11 1980-04-11 Pendelbeschleunigungsmesser
CA349,629A CA1131930A (fr) 1979-04-11 1980-04-11 Accelerometre electrostatique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7909213A FR2454103A1 (fr) 1979-04-11 1979-04-11 Perfectionnements aux accelerometres pendulaires asservis

Publications (2)

Publication Number Publication Date
FR2454103A1 true FR2454103A1 (fr) 1980-11-07
FR2454103B1 FR2454103B1 (fr) 1982-06-18

Family

ID=9224227

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7909213A Granted FR2454103A1 (fr) 1979-04-11 1979-04-11 Perfectionnements aux accelerometres pendulaires asservis

Country Status (6)

Country Link
US (1) US4345474A (fr)
CA (1) CA1131930A (fr)
DE (1) DE3014038C2 (fr)
FR (1) FR2454103A1 (fr)
GB (1) GB2047902B (fr)
IT (1) IT1140852B (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2496894A1 (fr) * 1980-12-18 1982-06-25 Singer Co Circuit de commande d'un accelerometre electrostatique
FR2585474A1 (fr) * 1985-07-25 1987-01-30 Litton Systems Inc Accelerometre integre a compensation de forces
FR2592491A1 (fr) * 1985-12-31 1987-07-03 Onera (Off Nat Aerospatiale) Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve
EP0385917A1 (fr) * 1989-02-28 1990-09-05 United Technologies Corporation Accéléromètre à rééquilibrage par impulsions
FR2724463A1 (fr) * 1994-09-12 1996-03-15 Sagem Procede de mesure d'une acceleration par un capteur a armature mobile et capteur d'acceleration pour mettre en oeuvre le procede

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US4522553A (en) * 1982-09-13 1985-06-11 Deere & Company Combine power boost system
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US4634965A (en) * 1984-12-31 1987-01-06 Sundstrand Data Control, Inc. Charge balancing detection circuit
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
FR2617607B1 (fr) * 1987-06-30 1989-12-01 Applic Gles Electrici Meca Accelerometre pendulaire a reequilibrage et procede de fabrication d'un tel accelerometre
US4987780A (en) * 1987-11-16 1991-01-29 Litton Systems, Inc. Integrated accelerometer assembly
GB8805266D0 (en) * 1988-03-04 1988-04-07 Marconi Co Ltd Angular displacement sensor
JPH0672899B2 (ja) * 1988-04-01 1994-09-14 株式会社日立製作所 加速度センサ
DE3831593A1 (de) * 1988-09-15 1990-03-22 Siemens Ag Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung
US4945773A (en) * 1989-03-06 1990-08-07 Ford Motor Company Force transducer etched from silicon
US5045152A (en) * 1989-03-06 1991-09-03 Ford Motor Company Force transducer etched from silicon
CA1322107C (fr) * 1989-06-07 1993-09-14 Henry C. Abbink Accelerometre integre
EP0459723B1 (fr) * 1990-05-30 1996-01-17 Hitachi, Ltd. Capteur d'accélération à semi-conducteur et système de commande de véhicule utilisant celui-ci
US5142921A (en) * 1990-10-29 1992-09-01 Litton Systems, Inc. Force balance instrument with electrostatic charge control
US5177331A (en) * 1991-07-05 1993-01-05 Delco Electronics Corporation Impact detector
EP0539889A3 (en) * 1991-10-30 1993-07-28 Steinbichler, Hans, Dr. Micromechanical actuator
JP2765316B2 (ja) * 1991-11-21 1998-06-11 日本電気株式会社 容量型三軸加速度センサ
DE9205416U1 (de) * 1992-04-21 1993-05-19 Kampfrath, Gerit, Dr. Dynamischer Beschleunigungssensor
FR2700614B1 (fr) * 1993-01-19 1995-04-14 Sextant Avionique Accéléromètre capacitif à circuit de correction de l'effet perturbateur de capacités parasites.
US5399980A (en) * 1993-11-12 1995-03-21 Alliedsignal Inc. Capacitive measuring circuit
US5703292A (en) * 1994-03-28 1997-12-30 The Charles Stark Draper Laboratory, Inc. Sensor having an off-frequency drive scheme and a sense bias generator utilizing tuned circuits
US5481914A (en) * 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
US5488865A (en) * 1994-08-15 1996-02-06 Alliedsignal Inc. Wide-band servo accelerometer with flat leaf flexure suspension
JP3216455B2 (ja) * 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
CA2365886A1 (fr) * 1999-03-17 2000-09-21 Input/Output, Inc. Etalonnage de sondes
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US7114366B1 (en) 2000-03-16 2006-10-03 Input / Output Inc. Sensor
KR100382766B1 (ko) * 2001-07-02 2003-05-09 삼성전자주식회사 커패시턴스 변화량 측정 장치 및 방법
KR20050107470A (ko) * 2003-02-28 2005-11-11 배 시스템즈 피엘시 가속도계
US6904805B2 (en) * 2003-06-03 2005-06-14 Cherry Corporation Accelerometer
US6922063B2 (en) * 2003-07-11 2005-07-26 Zircon Corporation Apparatus and method for capacitive level sensor
US7334474B2 (en) * 2005-01-07 2008-02-26 Litton Systems, Inc. Force balanced instrument system and method for mitigating errors
US7552637B2 (en) * 2006-09-19 2009-06-30 Honeywell International Inc. Torque driving circuit
US20120090393A1 (en) * 2010-06-18 2012-04-19 Baolab Microsystems Sl Unstable electrostatic spring accelerometer
US9291638B2 (en) * 2012-01-20 2016-03-22 Mcube, Inc. Substrate curvature compensation methods and apparatus
FR3002324B1 (fr) * 2013-02-19 2016-01-22 Sagem Defense Securite Capteur a accelerometre pendulaire electrostatique et procede de commande d'un tel capteur
FR3005165B1 (fr) * 2013-04-26 2015-04-24 Sagem Defense Securite Dispositif d'acquisition differentielle de courant et procede de commande d'un tel dispositif d'acquisition
FR3105428B1 (fr) * 2019-12-20 2021-11-26 Safran Electronics & Defense Capteur accélérométrique pendulaire à détection capacitive conditionnelle

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229530A (en) * 1960-12-12 1966-01-18 North American Aviation Inc Accelerometer
FR1535985A (fr) * 1966-10-03 1968-08-09 Gen Precision Inc Accéléromètre sous miniaturisé, à un seul axe
US3742347A (en) * 1971-08-25 1973-06-26 Atomic Energy Authority Uk Shaft movement differential pressure measuring apparatus embodying capacitive transducers
US3877313A (en) * 1973-07-23 1975-04-15 Singer Co Electrostatic accelerometer
US4043204A (en) * 1976-08-16 1977-08-23 The United States Of America As Represented By The Secretary Of The Army Magnetic fluid bearing accelerometer
US4102202A (en) * 1976-11-26 1978-07-25 The Singer Company Electrostatic accelerometer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3209601A (en) * 1962-08-16 1965-10-05 Gen Precision Inc Quartz accelerometer
US3673873A (en) * 1969-10-23 1972-07-04 North American Rockwell Sensing instrument having a cantilevered proof mass
DE2326233C2 (de) * 1973-05-23 1986-02-06 Hans-Werner Dr.-Ing. 6382 Friedrichsdorf Fischer Verfahren zur Linearisierung der selbsttätigen elektrostatischen Kraftkompensation
CH588069A5 (fr) * 1975-02-27 1977-05-31 Wyler Ag
US4009607A (en) * 1975-12-24 1977-03-01 The Bendix Corporation Force measuring system including combined electrostatic sensing and torquing means

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229530A (en) * 1960-12-12 1966-01-18 North American Aviation Inc Accelerometer
FR1535985A (fr) * 1966-10-03 1968-08-09 Gen Precision Inc Accéléromètre sous miniaturisé, à un seul axe
US3742347A (en) * 1971-08-25 1973-06-26 Atomic Energy Authority Uk Shaft movement differential pressure measuring apparatus embodying capacitive transducers
US3877313A (en) * 1973-07-23 1975-04-15 Singer Co Electrostatic accelerometer
US4043204A (en) * 1976-08-16 1977-08-23 The United States Of America As Represented By The Secretary Of The Army Magnetic fluid bearing accelerometer
US4102202A (en) * 1976-11-26 1978-07-25 The Singer Company Electrostatic accelerometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/68 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2496894A1 (fr) * 1980-12-18 1982-06-25 Singer Co Circuit de commande d'un accelerometre electrostatique
FR2585474A1 (fr) * 1985-07-25 1987-01-30 Litton Systems Inc Accelerometre integre a compensation de forces
FR2592491A1 (fr) * 1985-12-31 1987-07-03 Onera (Off Nat Aerospatiale) Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve
EP0230198A3 (en) * 1985-12-31 1987-08-05 Office National D'etudes Et De Recherches Aerospatiales(O.N.E.R.A.) Triaxial electrostatic accelerometer with dual electrical connection to its test weight
EP0385917A1 (fr) * 1989-02-28 1990-09-05 United Technologies Corporation Accéléromètre à rééquilibrage par impulsions
FR2724463A1 (fr) * 1994-09-12 1996-03-15 Sagem Procede de mesure d'une acceleration par un capteur a armature mobile et capteur d'acceleration pour mettre en oeuvre le procede

Also Published As

Publication number Publication date
CA1131930A (fr) 1982-09-21
US4345474A (en) 1982-08-24
DE3014038A1 (de) 1980-10-23
IT1140852B (it) 1986-10-10
FR2454103B1 (fr) 1982-06-18
GB2047902B (en) 1983-09-28
GB2047902A (en) 1980-12-03
DE3014038C2 (de) 1986-09-25
IT8021302A0 (it) 1980-04-10

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Legal Events

Date Code Title Description
ST Notification of lapse