FR2418539A1 - Liquid contact relays driven by piezoelectric membrane - pref. of polyvinylidene fluoride film for high sensitivity at low power - Google Patents
Liquid contact relays driven by piezoelectric membrane - pref. of polyvinylidene fluoride film for high sensitivity at low powerInfo
- Publication number
- FR2418539A1 FR2418539A1 FR7805340A FR7805340A FR2418539A1 FR 2418539 A1 FR2418539 A1 FR 2418539A1 FR 7805340 A FR7805340 A FR 7805340A FR 7805340 A FR7805340 A FR 7805340A FR 2418539 A1 FR2418539 A1 FR 2418539A1
- Authority
- FR
- France
- Prior art keywords
- membrane
- pref
- low power
- polyvinylidene fluoride
- switches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title abstract 4
- 239000007788 liquid Substances 0.000 title abstract 3
- 239000002033 PVDF binder Substances 0.000 title abstract 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 title abstract 2
- 230000035945 sensitivity Effects 0.000 title 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000017525 heat dissipation Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Switch Cases, Indication, And Locking (AREA)
Abstract
Commutators for switching electrical or optical circuits by movement of conductive or transparent liquids derive their motion from variations in the geometry of a membrane which is a piezo-electric element. Slight variations in the length and hence curvature of the membrane in a reservoir is amplified by causing relatively large shifts of a liquid surface or interface level in a capillary system with lateral branches for the circuit connections. The membrane may be film made of oriented organic polymeric material, pref. polyvinylidene fluoride produced under conditions which enhance the phase content. Alternatively the piezoelectric switch motor may be a quartz or ceramic crystal. Suitable for switches or relays or voltage protection devices of relatively compact size, esp. for use in telephone exchange junctions etc. where the low power requirement of individual switches reduces the heat dissipation problem from large numbers of switches contained in a small volume.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7805340A FR2418539A1 (en) | 1978-02-24 | 1978-02-24 | Liquid contact relays driven by piezoelectric membrane - pref. of polyvinylidene fluoride film for high sensitivity at low power |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7805340A FR2418539A1 (en) | 1978-02-24 | 1978-02-24 | Liquid contact relays driven by piezoelectric membrane - pref. of polyvinylidene fluoride film for high sensitivity at low power |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2418539A1 true FR2418539A1 (en) | 1979-09-21 |
FR2418539B1 FR2418539B1 (en) | 1981-09-11 |
Family
ID=9205015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7805340A Granted FR2418539A1 (en) | 1978-02-24 | 1978-02-24 | Liquid contact relays driven by piezoelectric membrane - pref. of polyvinylidene fluoride film for high sensitivity at low power |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2418539A1 (en) |
Cited By (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2381595A (en) * | 2001-10-31 | 2003-05-07 | Agilent Technologies Inc | Piezoelectric actuated optical latching relay with movable liquid |
US6730866B1 (en) | 2003-04-14 | 2004-05-04 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay array |
US6741767B2 (en) | 2002-03-28 | 2004-05-25 | Agilent Technologies, Inc. | Piezoelectric optical relay |
US6740829B1 (en) | 2003-04-14 | 2004-05-25 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay |
US6743990B1 (en) | 2002-12-12 | 2004-06-01 | Agilent Technologies, Inc. | Volume adjustment apparatus and method for use |
US6747222B1 (en) | 2003-02-04 | 2004-06-08 | Agilent Technologies, Inc. | Feature formation in a nonphotoimagable material and switch incorporating same |
US6750594B2 (en) | 2002-05-02 | 2004-06-15 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
US6750413B1 (en) | 2003-04-25 | 2004-06-15 | Agilent Technologies, Inc. | Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate |
US6756551B2 (en) | 2002-05-09 | 2004-06-29 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
US6759610B1 (en) | 2003-06-05 | 2004-07-06 | Agilent Technologies, Inc. | Multi-layer assembly of stacked LIMMS devices with liquid metal vias |
US6759611B1 (en) | 2003-06-16 | 2004-07-06 | Agilent Technologies, Inc. | Fluid-based switches and methods for producing the same |
US6765161B1 (en) | 2003-04-14 | 2004-07-20 | Agilent Technologies, Inc. | Method and structure for a slug caterpillar piezoelectric latching reflective optical relay |
US6768068B1 (en) | 2003-04-14 | 2004-07-27 | Agilent Technologies, Inc. | Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch |
US6770827B1 (en) | 2003-04-14 | 2004-08-03 | Agilent Technologies, Inc. | Electrical isolation of fluid-based switches |
US6774324B2 (en) | 2002-12-12 | 2004-08-10 | Agilent Technologies, Inc. | Switch and production thereof |
US6774325B1 (en) | 2003-04-14 | 2004-08-10 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US6777630B1 (en) | 2003-04-30 | 2004-08-17 | Agilent Technologies, Inc. | Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates |
US6781074B1 (en) | 2003-07-30 | 2004-08-24 | Agilent Technologies, Inc. | Preventing corrosion degradation in a fluid-based switch |
US6787720B1 (en) | 2003-07-31 | 2004-09-07 | Agilent Technologies, Inc. | Gettering agent and method to prevent corrosion in a fluid switch |
US6794591B1 (en) | 2003-04-14 | 2004-09-21 | Agilent Technologies, Inc. | Fluid-based switches |
US6798937B1 (en) | 2003-04-14 | 2004-09-28 | Agilent Technologies, Inc. | Pressure actuated solid slug optical latching relay |
US6803842B1 (en) | 2003-04-14 | 2004-10-12 | Agilent Technologies, Inc. | Longitudinal mode solid slug optical latching relay |
US6809277B2 (en) | 2003-01-22 | 2004-10-26 | Agilent Technologies, Inc. | Method for registering a deposited material with channel plate channels, and switch produced using same |
US6816641B2 (en) | 2003-04-14 | 2004-11-09 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric optical relay |
US6818844B2 (en) | 2003-04-14 | 2004-11-16 | Agilent Technologies, Inc. | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
US6825429B2 (en) | 2003-03-31 | 2004-11-30 | Agilent Technologies, Inc. | Hermetic seal and controlled impedance RF connections for a liquid metal micro switch |
US6831532B2 (en) | 2003-04-14 | 2004-12-14 | Agilent Technologies, Inc. | Push-mode latching relay |
US6833520B1 (en) | 2003-06-16 | 2004-12-21 | Agilent Technologies, Inc. | Suspended thin-film resistor |
US6841746B2 (en) | 2003-04-14 | 2005-01-11 | Agilent Technologies, Inc. | Bent switching fluid cavity |
US6849144B2 (en) | 2002-12-12 | 2005-02-01 | Agilent Technologies, Inc. | Method for making switch with ultrasonically milled channel plate |
US6855898B2 (en) | 2002-12-12 | 2005-02-15 | Agilent Technologies, Inc. | Ceramic channel plate for a switch |
US6870111B2 (en) | 2003-04-14 | 2005-03-22 | Agilent Technologies, Inc. | Bending mode liquid metal switch |
US6872904B2 (en) | 2003-04-14 | 2005-03-29 | Agilent Technologies, Inc. | Fluid-based switch |
US6876133B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Latching relay with switch bar |
US6876131B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay with face contact |
US6876132B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric relay |
US6876130B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Damped longitudinal mode latching relay |
US6877878B2 (en) | 2003-04-14 | 2005-04-12 | Eric J. Raskas | Flashlight and video recorder device |
US6879089B2 (en) | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Damped longitudinal mode optical latching relay |
US6879088B2 (en) | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay array |
US6882088B2 (en) | 2003-04-14 | 2005-04-19 | Agilent Technologies, Inc. | Bending-mode latching relay |
US6885133B2 (en) | 2003-04-14 | 2005-04-26 | Agilent Technologies, Inc. | High frequency bending-mode latching relay |
US6888977B2 (en) | 2003-04-14 | 2005-05-03 | Agilent Technologies, Inc. | Polymeric liquid metal optical switch |
US6891116B2 (en) | 2003-04-14 | 2005-05-10 | Agilent Technologies, Inc. | Substrate with liquid electrode |
US6894424B2 (en) | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | High frequency push-mode latching relay |
US6894237B2 (en) | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch |
US6897387B2 (en) | 2003-01-13 | 2005-05-24 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch |
US6903490B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Longitudinal mode optical latching relay |
US6903492B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Wetting finger latching piezoelectric relay |
US6903493B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Inserting-finger liquid metal relay |
US6903287B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Liquid metal optical relay |
US6920259B2 (en) | 2003-04-14 | 2005-07-19 | Agilent Technologies, Inc. | Longitudinal electromagnetic latching optical relay |
US6925223B2 (en) | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Pressure actuated optical latching relay |
US6924443B2 (en) | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US6927529B2 (en) | 2002-05-02 | 2005-08-09 | Agilent Technologies, Inc. | Solid slug longitudinal piezoelectric latching relay |
US6946775B2 (en) | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
US6946776B2 (en) | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition |
US6956990B2 (en) | 2003-04-14 | 2005-10-18 | Agilent Technologies, Inc. | Reflecting wedge optical wavelength multiplexer/demultiplexer |
US6961487B2 (en) | 2003-04-14 | 2005-11-01 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch |
US7012354B2 (en) | 2003-04-14 | 2006-03-14 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch |
US7048519B2 (en) | 2003-04-14 | 2006-05-23 | Agilent Technologies, Inc. | Closed-loop piezoelectric pump |
US7070908B2 (en) | 2003-04-14 | 2006-07-04 | Agilent Technologies, Inc. | Feature formation in thick-film inks |
EP1376190A4 (en) * | 2001-04-06 | 2007-03-14 | Ngk Insulators Ltd | Optical switch |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE472235A (en) * | 1946-09-06 | |||
BE685716A (en) * | 1965-08-20 | 1967-02-20 | ||
DE1614600A1 (en) * | 1967-09-11 | 1970-10-29 | Siemens Ag | Piezoelectric hydraulic relay |
-
1978
- 1978-02-24 FR FR7805340A patent/FR2418539A1/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE472235A (en) * | 1946-09-06 | |||
BE685716A (en) * | 1965-08-20 | 1967-02-20 | ||
DE1614600A1 (en) * | 1967-09-11 | 1970-10-29 | Siemens Ag | Piezoelectric hydraulic relay |
Cited By (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1376190A4 (en) * | 2001-04-06 | 2007-03-14 | Ngk Insulators Ltd | Optical switch |
GB2381595A (en) * | 2001-10-31 | 2003-05-07 | Agilent Technologies Inc | Piezoelectric actuated optical latching relay with movable liquid |
GB2381595B (en) * | 2001-10-31 | 2005-03-16 | Agilent Technologies Inc | Optical latching relay |
US7078849B2 (en) | 2001-10-31 | 2006-07-18 | Agilent Technologies, Inc. | Longitudinal piezoelectric optical latching relay |
US6741767B2 (en) | 2002-03-28 | 2004-05-25 | Agilent Technologies, Inc. | Piezoelectric optical relay |
US6927529B2 (en) | 2002-05-02 | 2005-08-09 | Agilent Technologies, Inc. | Solid slug longitudinal piezoelectric latching relay |
US6750594B2 (en) | 2002-05-02 | 2004-06-15 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
US6756551B2 (en) | 2002-05-09 | 2004-06-29 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
US6849144B2 (en) | 2002-12-12 | 2005-02-01 | Agilent Technologies, Inc. | Method for making switch with ultrasonically milled channel plate |
US7022926B2 (en) | 2002-12-12 | 2006-04-04 | Agilent Technologies, Inc. | Ultrasonically milled channel plate for a switch |
US6855898B2 (en) | 2002-12-12 | 2005-02-15 | Agilent Technologies, Inc. | Ceramic channel plate for a switch |
US6743990B1 (en) | 2002-12-12 | 2004-06-01 | Agilent Technologies, Inc. | Volume adjustment apparatus and method for use |
US6924444B2 (en) | 2002-12-12 | 2005-08-02 | Agilent Technologies, Inc. | Ceramic channel plate for a fluid-based switch, and method for making same |
US6909059B2 (en) | 2002-12-12 | 2005-06-21 | Agilent Technologies, Inc. | Liquid switch production and assembly |
US6774324B2 (en) | 2002-12-12 | 2004-08-10 | Agilent Technologies, Inc. | Switch and production thereof |
US7019235B2 (en) | 2003-01-13 | 2006-03-28 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch |
US6897387B2 (en) | 2003-01-13 | 2005-05-24 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch |
US7098413B2 (en) | 2003-01-13 | 2006-08-29 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch, and method for making a switch using same |
US6911611B2 (en) | 2003-01-22 | 2005-06-28 | Agilent Technologies, Inc. | Method for registering a deposited material with channel plate channels |
US6809277B2 (en) | 2003-01-22 | 2004-10-26 | Agilent Technologies, Inc. | Method for registering a deposited material with channel plate channels, and switch produced using same |
US6747222B1 (en) | 2003-02-04 | 2004-06-08 | Agilent Technologies, Inc. | Feature formation in a nonphotoimagable material and switch incorporating same |
US6825429B2 (en) | 2003-03-31 | 2004-11-30 | Agilent Technologies, Inc. | Hermetic seal and controlled impedance RF connections for a liquid metal micro switch |
US6876132B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric relay |
US6765161B1 (en) | 2003-04-14 | 2004-07-20 | Agilent Technologies, Inc. | Method and structure for a slug caterpillar piezoelectric latching reflective optical relay |
US6818844B2 (en) | 2003-04-14 | 2004-11-16 | Agilent Technologies, Inc. | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
US6803842B1 (en) | 2003-04-14 | 2004-10-12 | Agilent Technologies, Inc. | Longitudinal mode solid slug optical latching relay |
US6831532B2 (en) | 2003-04-14 | 2004-12-14 | Agilent Technologies, Inc. | Push-mode latching relay |
US6730866B1 (en) | 2003-04-14 | 2004-05-04 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay array |
US6841746B2 (en) | 2003-04-14 | 2005-01-11 | Agilent Technologies, Inc. | Bent switching fluid cavity |
US6798937B1 (en) | 2003-04-14 | 2004-09-28 | Agilent Technologies, Inc. | Pressure actuated solid slug optical latching relay |
US6794591B1 (en) | 2003-04-14 | 2004-09-21 | Agilent Technologies, Inc. | Fluid-based switches |
US6740829B1 (en) | 2003-04-14 | 2004-05-25 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay |
US6870111B2 (en) | 2003-04-14 | 2005-03-22 | Agilent Technologies, Inc. | Bending mode liquid metal switch |
US6872904B2 (en) | 2003-04-14 | 2005-03-29 | Agilent Technologies, Inc. | Fluid-based switch |
US6876133B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Latching relay with switch bar |
US6876131B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay with face contact |
US7070908B2 (en) | 2003-04-14 | 2006-07-04 | Agilent Technologies, Inc. | Feature formation in thick-film inks |
US6876130B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Damped longitudinal mode latching relay |
US6877878B2 (en) | 2003-04-14 | 2005-04-12 | Eric J. Raskas | Flashlight and video recorder device |
US6879089B2 (en) | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Damped longitudinal mode optical latching relay |
US6879088B2 (en) | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay array |
US6882088B2 (en) | 2003-04-14 | 2005-04-19 | Agilent Technologies, Inc. | Bending-mode latching relay |
US6885133B2 (en) | 2003-04-14 | 2005-04-26 | Agilent Technologies, Inc. | High frequency bending-mode latching relay |
US6888977B2 (en) | 2003-04-14 | 2005-05-03 | Agilent Technologies, Inc. | Polymeric liquid metal optical switch |
US6891116B2 (en) | 2003-04-14 | 2005-05-10 | Agilent Technologies, Inc. | Substrate with liquid electrode |
US6894424B2 (en) | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | High frequency push-mode latching relay |
US6894237B2 (en) | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch |
US7048519B2 (en) | 2003-04-14 | 2006-05-23 | Agilent Technologies, Inc. | Closed-loop piezoelectric pump |
US6903490B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Longitudinal mode optical latching relay |
US6903492B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Wetting finger latching piezoelectric relay |
US6903493B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Inserting-finger liquid metal relay |
US6903287B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Liquid metal optical relay |
US6906271B2 (en) | 2003-04-14 | 2005-06-14 | Agilent Technologies, Inc. | Fluid-based switch |
US6774325B1 (en) | 2003-04-14 | 2004-08-10 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US6770827B1 (en) | 2003-04-14 | 2004-08-03 | Agilent Technologies, Inc. | Electrical isolation of fluid-based switches |
US6920259B2 (en) | 2003-04-14 | 2005-07-19 | Agilent Technologies, Inc. | Longitudinal electromagnetic latching optical relay |
US6768068B1 (en) | 2003-04-14 | 2004-07-27 | Agilent Technologies, Inc. | Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch |
US6925223B2 (en) | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Pressure actuated optical latching relay |
US6924443B2 (en) | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US6816641B2 (en) | 2003-04-14 | 2004-11-09 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric optical relay |
US6946775B2 (en) | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
US6946776B2 (en) | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition |
US6956990B2 (en) | 2003-04-14 | 2005-10-18 | Agilent Technologies, Inc. | Reflecting wedge optical wavelength multiplexer/demultiplexer |
US6961487B2 (en) | 2003-04-14 | 2005-11-01 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch |
US7012354B2 (en) | 2003-04-14 | 2006-03-14 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch |
US6750413B1 (en) | 2003-04-25 | 2004-06-15 | Agilent Technologies, Inc. | Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate |
US6777630B1 (en) | 2003-04-30 | 2004-08-17 | Agilent Technologies, Inc. | Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates |
US6759610B1 (en) | 2003-06-05 | 2004-07-06 | Agilent Technologies, Inc. | Multi-layer assembly of stacked LIMMS devices with liquid metal vias |
US6759611B1 (en) | 2003-06-16 | 2004-07-06 | Agilent Technologies, Inc. | Fluid-based switches and methods for producing the same |
US6833520B1 (en) | 2003-06-16 | 2004-12-21 | Agilent Technologies, Inc. | Suspended thin-film resistor |
US6781074B1 (en) | 2003-07-30 | 2004-08-24 | Agilent Technologies, Inc. | Preventing corrosion degradation in a fluid-based switch |
US6787720B1 (en) | 2003-07-31 | 2004-09-07 | Agilent Technologies, Inc. | Gettering agent and method to prevent corrosion in a fluid switch |
Also Published As
Publication number | Publication date |
---|---|
FR2418539B1 (en) | 1981-09-11 |
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