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FR2336775A1 - Procede de fabrication d'une resistance de mesure - Google Patents

Procede de fabrication d'une resistance de mesure

Info

Publication number
FR2336775A1
FR2336775A1 FR7638785A FR7638785A FR2336775A1 FR 2336775 A1 FR2336775 A1 FR 2336775A1 FR 7638785 A FR7638785 A FR 7638785A FR 7638785 A FR7638785 A FR 7638785A FR 2336775 A1 FR2336775 A1 FR 2336775A1
Authority
FR
France
Prior art keywords
manufacturing
measurement resistor
resistor
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7638785A
Other languages
English (en)
Other versions
FR2336775B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Degussa GmbH
Deutsche Gold und Silber Scheideanstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Degussa GmbH, Deutsche Gold und Silber Scheideanstalt filed Critical Degussa GmbH
Publication of FR2336775A1 publication Critical patent/FR2336775A1/fr
Application granted granted Critical
Publication of FR2336775B1 publication Critical patent/FR2336775B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Thermistors And Varistors (AREA)
  • Physical Vapour Deposition (AREA)
FR7638785A 1975-12-24 1976-12-22 Procede de fabrication d'une resistance de mesure Granted FR2336775A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2558752A DE2558752C3 (de) 1975-12-24 1975-12-24 Verfahren zur Herstellung eines Schichrwiderstandes als Meßwiderstand für Widerstandsthermometer

Publications (2)

Publication Number Publication Date
FR2336775A1 true FR2336775A1 (fr) 1977-07-22
FR2336775B1 FR2336775B1 (fr) 1980-06-27

Family

ID=5965682

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7638785A Granted FR2336775A1 (fr) 1975-12-24 1976-12-22 Procede de fabrication d'une resistance de mesure

Country Status (6)

Country Link
US (1) US4072593A (fr)
JP (1) JPS6037886B2 (fr)
DE (1) DE2558752C3 (fr)
FR (1) FR2336775A1 (fr)
GB (1) GB1538948A (fr)
IT (1) IT1072208B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2517056A1 (fr) * 1981-11-20 1983-05-27 Danfoss As Resistance variant avec la temperature

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4129848A (en) * 1975-09-03 1978-12-12 Raytheon Company Platinum film resistor device
US4375056A (en) * 1980-02-29 1983-02-22 Leeds & Northrup Company Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture
GB2096645B (en) * 1981-03-24 1984-10-31 Rosemount Eng Co Ltd A method of producing a resistance element for a resistance thermometer
CA1250155A (fr) * 1984-07-31 1989-02-21 James A. Ruf Thermometre a resistance faite de platine
IN165267B (fr) * 1984-07-31 1989-09-09 Rosemount Inc
US5089293A (en) * 1984-07-31 1992-02-18 Rosemount Inc. Method for forming a platinum resistance thermometer
JPS6140513A (ja) * 1984-08-01 1986-02-26 Hitachi Ltd 薄膜抵抗式空気流量検出装置及び薄膜抵抗式計測素子
DE3630393C2 (de) * 1985-09-10 1994-06-23 Sharp Kk Widerstandsthermometer
US4791398A (en) * 1986-02-13 1988-12-13 Rosemount Inc. Thin film platinum resistance thermometer with high temperature diffusion barrier
DE3906405A1 (de) * 1989-03-01 1990-09-06 Leybold Ag Verfahren zur herstellung eines schichtwiderstands
US5087297A (en) * 1991-01-17 1992-02-11 Johnson Matthey Inc. Aluminum target for magnetron sputtering and method of making same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645783A (en) * 1970-06-03 1972-02-29 Infrared Ind Inc Thin film planar resistor
US3833410A (en) * 1971-12-30 1974-09-03 Trw Inc High stability thin film alloy resistors
US3845443A (en) * 1972-06-14 1974-10-29 Bailey Meter Co Thin film resistance thermometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2517056A1 (fr) * 1981-11-20 1983-05-27 Danfoss As Resistance variant avec la temperature

Also Published As

Publication number Publication date
DE2558752C3 (de) 1978-10-19
DE2558752A1 (de) 1977-07-07
JPS5282374A (en) 1977-07-09
US4072593A (en) 1978-02-07
FR2336775B1 (fr) 1980-06-27
GB1538948A (en) 1979-01-24
IT1072208B (it) 1985-04-10
DE2558752B2 (de) 1978-03-09
JPS6037886B2 (ja) 1985-08-29

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Legal Events

Date Code Title Description
ST Notification of lapse