FR2092930B2 - - Google Patents

Info

Publication number: FR2092930B2
Authority: FR; France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

FR7039638A

Other languages

Other versions

FR2092930A2 (en

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Siemens Corp

Original Assignee

Siemens Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1970-05-05

Filing date

1970-11-04

Publication date

1973-02-02

1970-11-04 Application filed by Siemens Corp filed Critical Siemens Corp

1972-01-28 Publication of FR2092930A2 publication Critical patent/FR2092930A2/fr

1973-02-02 Application granted granted Critical

1973-02-02 Publication of FR2092930B2 publication Critical patent/FR2092930B2/fr

Status Expired legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

Chemical & Material Sciences (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Silicon Compounds (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Chemical Vapour Deposition (AREA)

FR7039638A 1970-05-05 1970-11-04 Expired FR2092930B2 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE19702022025 DE2022025C3 (en)	1970-05-05	1970-05-05	Device for producing a hollow body from semiconductor material

Publications (2)

Publication Number	Publication Date
FR2092930A2 FR2092930A2 (en)	1972-01-28
FR2092930B2 true FR2092930B2 (en)	1973-02-02

Family

ID=5770320

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR7039638A Expired FR2092930B2 (en)	1970-05-05	1970-11-04

Country Status (10)

Country	Link
JP (1)	JPS4918917B1 (en)
AT (1)	AT306105B (en)
CH (1)	CH561079A5 (en)
CS (1)	CS163774B2 (en)
DE (1)	DE2022025C3 (en)
FR (1)	FR2092930B2 (en)
GB (1)	GB1315167A (en)
IT (1)	IT951574B (en)
NL (1)	NL7017481A (en)
SE (1)	SE368912B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
BE789719A (en) *	1972-05-16	1973-02-01	Siemens Ag	METHOD AND DEVICE FOR MANUFACTURING HOLLOW BODIES FROM A SEMICONDUCTOR MATERIAL, IN PARTICULAR SILICON TUBES
DE2618273C3 (en) *	1976-04-27	1984-04-19	Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen	Process for the deposition of polycrystalline silicon
JPH0166340U (en) *	1987-10-21	1989-04-27

1970
- 1970-05-05 DE DE19702022025 patent/DE2022025C3/en not_active Expired
- 1970-10-22 SE SE1429670A patent/SE368912B/xx unknown
- 1970-10-22 AT AT954370A patent/AT306105B/en not_active IP Right Cessation
- 1970-10-23 CH CH1566470A patent/CH561079A5/xx not_active IP Right Cessation
- 1970-10-31 IT IT8966570A patent/IT951574B/en active
- 1970-11-04 FR FR7039638A patent/FR2092930B2/fr not_active Expired
- 1970-11-04 GB GB5236670A patent/GB1315167A/en not_active Expired
- 1970-11-05 CS CS745670A patent/CS163774B2/cs unknown
- 1970-11-30 NL NL7017481A patent/NL7017481A/xx unknown
1973
- 1973-03-05 JP JP2593773A patent/JPS4918917B1/ja active Pending

Also Published As

Publication number	Publication date
DE2022025B2 (en)	1979-06-28
FR2092930A2 (en)	1972-01-28
SE368912B (en)	1974-07-29
CH561079A5 (en)	1975-04-30
JPS4918917B1 (en)	1974-05-14
DE2022025A1 (en)	1971-11-18
NL7017481A (en)	1971-11-09
IT951574B (en)	1973-07-10
GB1315167A (en)	1973-04-26
AT306105B (en)	1973-03-26
DE2022025C3 (en)	1980-03-20
CS163774B2 (en)	1975-11-07

Publication	Publication Date	Title
FR2092930B2 (en)	1973-02-02
AU2044470A (en)	1972-03-30
AU2017870A (en)	1972-03-23
AU1716970A (en)	1972-01-06
AU2130570A (en)	1972-04-27
AU1833270A (en)	1972-02-10
AU2085370A (en)	1972-04-13
AU1943370A (en)	1972-03-09
AU2061170A (en)	1972-04-13
AU2144270A (en)	1972-04-27
AU1879170A (en)	1972-02-17
AU1881070A (en)	1972-02-17
AU1918570A (en)	1972-03-02
AU1832970A (en)	1972-02-03
AU1969370A (en)	1972-03-16
AU1974970A (en)	1972-03-16
AU1872870A (en)	1972-02-17
AU1841070A (en)	1972-02-10
AU2112570A (en)	1972-04-20
AU2115870A (en)	1972-04-20
AU2119370A (en)	1972-04-20
AU1789870A (en)	1972-01-27
AU2130770A (en)	1972-04-27
AU2131570A (en)	1972-04-27
BE767936A (en)	1971-11-03