[go: up one dir, main page]

AT306105B - Process for the production of hollow bodies from semiconductor material - Google Patents

Process for the production of hollow bodies from semiconductor material

Info

Publication number
AT306105B
AT306105B AT954370A AT954370A AT306105B AT 306105 B AT306105 B AT 306105B AT 954370 A AT954370 A AT 954370A AT 954370 A AT954370 A AT 954370A AT 306105 B AT306105 B AT 306105B
Authority
AT
Austria
Prior art keywords
production
semiconductor material
hollow bodies
bodies
hollow
Prior art date
Application number
AT954370A
Other languages
German (de)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of AT306105B publication Critical patent/AT306105B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
AT954370A 1970-05-05 1970-10-22 Process for the production of hollow bodies from semiconductor material AT306105B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702022025 DE2022025C3 (en) 1970-05-05 1970-05-05 Device for producing a hollow body from semiconductor material

Publications (1)

Publication Number Publication Date
AT306105B true AT306105B (en) 1973-03-26

Family

ID=5770320

Family Applications (1)

Application Number Title Priority Date Filing Date
AT954370A AT306105B (en) 1970-05-05 1970-10-22 Process for the production of hollow bodies from semiconductor material

Country Status (10)

Country Link
JP (1) JPS4918917B1 (en)
AT (1) AT306105B (en)
CH (1) CH561079A5 (en)
CS (1) CS163774B2 (en)
DE (1) DE2022025C3 (en)
FR (1) FR2092930B2 (en)
GB (1) GB1315167A (en)
IT (1) IT951574B (en)
NL (1) NL7017481A (en)
SE (1) SE368912B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE789719A (en) * 1972-05-16 1973-02-01 Siemens Ag METHOD AND DEVICE FOR MANUFACTURING HOLLOW BODIES FROM A SEMICONDUCTOR MATERIAL, IN PARTICULAR SILICON TUBES
DE2618273C3 (en) * 1976-04-27 1984-04-19 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Process for the deposition of polycrystalline silicon
JPH0166340U (en) * 1987-10-21 1989-04-27

Also Published As

Publication number Publication date
FR2092930A2 (en) 1972-01-28
CS163774B2 (en) 1975-11-07
CH561079A5 (en) 1975-04-30
DE2022025B2 (en) 1979-06-28
JPS4918917B1 (en) 1974-05-14
SE368912B (en) 1974-07-29
DE2022025A1 (en) 1971-11-18
IT951574B (en) 1973-07-10
FR2092930B2 (en) 1973-02-02
NL7017481A (en) 1971-11-09
GB1315167A (en) 1973-04-26
DE2022025C3 (en) 1980-03-20

Similar Documents

Publication Publication Date Title
AT305376B (en) Process for the production of hollow bodies from semiconductor material
CH555813A (en) PROCESS FOR THE PRODUCTION OF PERFLUORALKYL-ALKYLENE SULFONAMIDO-ALKYLEN DIALKYLAMINES.
CH508370A (en) Process for the production of zippers
CH544792A (en) Process for the production of foam materials
CH535329A (en) Process for the production of road surface materials
AT307369B (en) Process for the production of whiskers from silicon carbide
CH522961A (en) Process for the production of isolated semiconductor regions
AT322848B (en) PROCESS FOR THE PRODUCTION OF MOLDED BODIES FROM POLYAMIDES
AT313878B (en) Process for the production of alkylophenols
AT308075B (en) Process for the production of monochlorobenzaldehydes
AT314839B (en) Process for the production of foams from polyamides
CH494198A (en) Process for the production of silicon carbide bodies
AT306105B (en) Process for the production of hollow bodies from semiconductor material
CH499378A (en) Process for the production of hollow objects from sheet material
AT307747B (en) Process for the production of polycondensation products from hydroxymethyl-phosphonium compounds
AT277581B (en) Process for the production of hollow bodies from polyamides
AT310769B (en) Process for the production of ɛ-caprolactone
AT300818B (en) Process for the production of pure hexetidine
AT297930B (en) Process for the production of modified allergen materials
CH553236A (en) Process for the production of molded parts from polyamides
AT304133B (en) Process for the production of plant bases
AT324546B (en) PROCESS FOR THE PRODUCTION OF AMINOPENICILLINES
CH515783A (en) Process for the production of hygienic-sanitary devices
AT307418B (en) Process for the production of new 8-cyano-5-octanolide
AT311307B (en) Process for the production of methacrolein

Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee