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FR2076567A5 - - Google Patents

Info

Publication number
FR2076567A5
FR2076567A5 FR7001862A FR7001862A FR2076567A5 FR 2076567 A5 FR2076567 A5 FR 2076567A5 FR 7001862 A FR7001862 A FR 7001862A FR 7001862 A FR7001862 A FR 7001862A FR 2076567 A5 FR2076567 A5 FR 2076567A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7001862A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7001862A priority Critical patent/FR2076567A5/fr
Priority to GB251771A priority patent/GB1305523A/en
Priority to US00107720A priority patent/US3717785A/en
Priority to FR7101748A priority patent/FR2122684A6/fr
Priority to DE19712102608 priority patent/DE2102608A1/de
Priority to NL7100748A priority patent/NL7100748A/xx
Application granted granted Critical
Publication of FR2076567A5 publication Critical patent/FR2076567A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/80—Arrangements for controlling the ray or beam after passing the main deflection system, e.g. for post-acceleration or post-concentration, for colour switching
    • H01J29/803—Arrangements for controlling the ray or beam after passing the main deflection system, e.g. for post-acceleration or post-concentration, for colour switching for post-acceleration or post-deflection, e.g. for colour switching
    • H01J29/806—Electron lens mosaics, e.g. fly's eye lenses, colour selection lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Beam Exposure (AREA)
FR7001862A 1970-01-20 1970-01-20 Expired FR2076567A5 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7001862A FR2076567A5 (fr) 1970-01-20 1970-01-20
GB251771A GB1305523A (fr) 1970-01-20 1971-01-19
US00107720A US3717785A (en) 1970-01-20 1971-01-19 System of electrostatic quadrupole micro-lenses
FR7101748A FR2122684A6 (fr) 1970-01-20 1971-01-20
DE19712102608 DE2102608A1 (de) 1970-01-20 1971-01-20 Elektrostatisches Mikrohnsenraster
NL7100748A NL7100748A (fr) 1970-01-20 1971-01-20

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7001862A FR2076567A5 (fr) 1970-01-20 1970-01-20
FR7101748A FR2122684A6 (fr) 1970-01-20 1971-01-20

Publications (1)

Publication Number Publication Date
FR2076567A5 true FR2076567A5 (fr) 1971-10-15

Family

ID=26215496

Family Applications (2)

Application Number Title Priority Date Filing Date
FR7001862A Expired FR2076567A5 (fr) 1970-01-20 1970-01-20
FR7101748A Expired FR2122684A6 (fr) 1970-01-20 1971-01-20

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR7101748A Expired FR2122684A6 (fr) 1970-01-20 1971-01-20

Country Status (5)

Country Link
US (1) US3717785A (fr)
DE (1) DE2102608A1 (fr)
FR (2) FR2076567A5 (fr)
GB (1) GB1305523A (fr)
NL (1) NL7100748A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0069728A1 (fr) * 1981-01-23 1983-01-19 Veeco Instruments Inc. Systeme d'exposition a faisceau de particules chargees en parallele

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2326279A1 (de) * 1973-05-23 1974-12-19 Siemens Ag Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation
GB1443215A (en) * 1973-11-07 1976-07-21 Mullard Ltd Electrostatically clamping a semiconductor wafer during device manufacture
JPS52119178A (en) * 1976-03-31 1977-10-06 Toshiba Corp Electron beam exposure device
US4194123A (en) * 1978-05-12 1980-03-18 Rockwell International Corporation Lithographic apparatus
US4338548A (en) * 1980-01-30 1982-07-06 Control Data Corporation Unipotential lens assembly for charged particle beam tubes and method for applying correction potentials thereto
US4465934A (en) * 1981-01-23 1984-08-14 Veeco Instruments Inc. Parallel charged particle beam exposure system
JPS57163955A (en) * 1981-02-25 1982-10-08 Toshiba Corp Mask focusing type color picture tube
US4354111A (en) * 1981-03-10 1982-10-12 Veeco Instruments Incorporated Screen lens array system
DE3138744A1 (de) * 1981-09-29 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleitervorrichtungen
US4667108A (en) * 1985-06-28 1987-05-19 Control Data Corporation Impedance matched and thermally cooled deflection amplifiers for charged particle beam apparatus employing deflectors
US5023458A (en) * 1989-01-04 1991-06-11 Eaton Corporation Ion beam control system
JPH05205695A (ja) * 1992-01-28 1993-08-13 Hitachi Ltd 多段多重電極及び質量分析装置
DE60136036D1 (de) 2000-02-09 2008-11-20 Fei Co Zur anwendung in der herstellung von nanostrukturen
DE60323909D1 (de) * 2002-08-13 2008-11-20 Zeiss Carl Nts Gmbh Teilchenoptischer Apparat und seine Verwendung als elektronenmikroskopisches System
DE10237297A1 (de) * 2002-08-14 2004-03-11 Leo Elektronenmikroskopie Gmbh Teilchenoptische Vorrichtung, Elektronenmikroskopiesystem und Lithogrphiesystem
DE102004048892A1 (de) * 2004-10-06 2006-04-20 Leica Microsystems Lithography Gmbh Beleuchtungssystem für eine Korpuskularstrahleinrichtung und Verfahren zur Beleuchtung mit einem Korpuskularstrahl
JP2007287365A (ja) * 2006-04-13 2007-11-01 Jeol Ltd 多極子レンズ及び多極子レンズの製造方法
GB0700754D0 (en) * 2007-01-15 2007-02-21 Oxford Instr Analytical Ltd Charged particle analyser and method
US8389950B2 (en) * 2007-01-31 2013-03-05 Microsaic Systems Plc High performance micro-fabricated quadrupole lens
GB2446184B (en) * 2007-01-31 2011-07-27 Microsaic Systems Ltd High performance micro-fabricated quadrupole lens
KR102523547B1 (ko) 2018-05-01 2023-04-19 에이에스엠엘 네델란즈 비.브이. 멀티-빔 검사 장치
CN110534385A (zh) * 2019-09-09 2019-12-03 中国科学院合肥物质科学研究院 一种具有整体膜电极棒的电四极透镜组

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US2941114A (en) * 1958-01-09 1960-06-14 Bell Telephone Labor Inc Slalom focusing structures
NL155980B (nl) * 1966-08-11 1978-02-15 Philips Nv Kathodestraalbuis met een vierpoollens voor de correctie van orthogonaliteitsfouten.
US3612946A (en) * 1967-08-01 1971-10-12 Murata Manufacturing Co Electron multiplier device using semiconductor ceramic

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0069728A1 (fr) * 1981-01-23 1983-01-19 Veeco Instruments Inc. Systeme d'exposition a faisceau de particules chargees en parallele
EP0069728A4 (fr) * 1981-01-23 1983-07-08 Veeco Instr Inc Systeme d'exposition a faisceau de particules chargees en parallele.

Also Published As

Publication number Publication date
US3717785A (en) 1973-02-20
DE2102608A1 (de) 1971-07-29
GB1305523A (fr) 1973-02-07
NL7100748A (fr) 1971-07-22
FR2122684A6 (fr) 1972-09-01

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Legal Events

Date Code Title Description
ST Notification of lapse