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FR1415894A - Method for measuring the resistivity of a silicon crystal - Google Patents

Method for measuring the resistivity of a silicon crystal

Info

Publication number
FR1415894A
FR1415894A FR991708A FR991708A FR1415894A FR 1415894 A FR1415894 A FR 1415894A FR 991708 A FR991708 A FR 991708A FR 991708 A FR991708 A FR 991708A FR 1415894 A FR1415894 A FR 1415894A
Authority
FR
France
Prior art keywords
resistivity
measuring
silicon crystal
silicon
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR991708A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to FR991708A priority Critical patent/FR1415894A/en
Application granted granted Critical
Publication of FR1415894A publication Critical patent/FR1415894A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
FR991708A 1963-10-17 1964-10-16 Method for measuring the resistivity of a silicon crystal Expired FR1415894A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR991708A FR1415894A (en) 1963-10-17 1964-10-16 Method for measuring the resistivity of a silicon crystal

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5555363 1963-10-17
FR991708A FR1415894A (en) 1963-10-17 1964-10-16 Method for measuring the resistivity of a silicon crystal

Publications (1)

Publication Number Publication Date
FR1415894A true FR1415894A (en) 1965-10-29

Family

ID=26210597

Family Applications (1)

Application Number Title Priority Date Filing Date
FR991708A Expired FR1415894A (en) 1963-10-17 1964-10-16 Method for measuring the resistivity of a silicon crystal

Country Status (1)

Country Link
FR (1) FR1415894A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558587A1 (en) * 1984-01-20 1984-07-26 Thomson Csf Method and device for measuring the thickness of a slightly doped layer in a semiconductor slice

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558587A1 (en) * 1984-01-20 1984-07-26 Thomson Csf Method and device for measuring the thickness of a slightly doped layer in a semiconductor slice

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