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FR1348368A - Adjustment device for correcting image defects in an electronic optical system - Google Patents

Adjustment device for correcting image defects in an electronic optical system

Info

Publication number
FR1348368A
FR1348368A FR903385A FR903385A FR1348368A FR 1348368 A FR1348368 A FR 1348368A FR 903385 A FR903385 A FR 903385A FR 903385 A FR903385 A FR 903385A FR 1348368 A FR1348368 A FR 1348368A
Authority
FR
France
Prior art keywords
optical system
adjustment device
image defects
correcting image
electronic optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR903385A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Priority to FR903385A priority Critical patent/FR1348368A/en
Application granted granted Critical
Publication of FR1348368A publication Critical patent/FR1348368A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR903385A 1961-07-10 1962-07-09 Adjustment device for correcting image defects in an electronic optical system Expired FR1348368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR903385A FR1348368A (en) 1961-07-10 1962-07-09 Adjustment device for correcting image defects in an electronic optical system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL266898 1961-07-10
FR903385A FR1348368A (en) 1961-07-10 1962-07-09 Adjustment device for correcting image defects in an electronic optical system

Publications (1)

Publication Number Publication Date
FR1348368A true FR1348368A (en) 1964-01-10

Family

ID=26196557

Family Applications (1)

Application Number Title Priority Date Filing Date
FR903385A Expired FR1348368A (en) 1961-07-10 1962-07-09 Adjustment device for correcting image defects in an electronic optical system

Country Status (1)

Country Link
FR (1) FR1348368A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423859A1 (en) * 1978-04-17 1979-11-16 Philips Nv ELECTRONIC MICROSCOPE IMPROVEMENTS

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423859A1 (en) * 1978-04-17 1979-11-16 Philips Nv ELECTRONIC MICROSCOPE IMPROVEMENTS

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